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方波调制下自由载流子吸收测量半导体载流子输运参数的时域模型

张希仁 高椿明

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方波调制下自由载流子吸收测量半导体载流子输运参数的时域模型

张希仁, 高椿明

Time domain theory of the electronic transport property of semiconductors measured by means of square-wave-modulated free carrier absorption technique

Zhang Xi-Ren, Gao Chun-Ming
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  • 本文建立了用于测量半导体载流子输运特性(载流子寿命、载流子扩散系数和前表面复合速度)的方波调制下自由载流子吸收(free carrier absorption,FCA)检测技术的时域理论模型. 通过数值模拟,分析了在不同调制频率下时域曲线的变化趋势以及各个载流子输运参数对时域曲线的影响. 结果表明方波调制下的自由载流子吸收的时域信号对各个参数都用较高的灵敏度,且参数值的测量范围大于频域测量范围.
    A time-domain model for the square-wave-modulated free carrier absorption (MFCA) is developed in measuring the electronic transport properties (the carrier lifetime, the carrier diffusivity, and the front surface recombination velocity) of semiconductor wafers. The dependences of time-domain MFCA signals on the electronic transport properties at different modulation frequencies are investigated by computer simulation. It is found that there are the high sensitivities of MFCA signal to the individual transport parameter. Furthermore, compared with the results by frequency-domain MFCA, in time-domain MFCA measuring ranges the transport properties can be improved.
    • 基金项目: 国家自然科学基金(批准号:61107078)和中央高校基本科研业务费资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 61107078), and the Fundamental Research Funds for the Central Universities of China.
    [1]

    Sanii F, Schwartz R J, Pierret R F 1988 Proceedings of the 20th IEEE Photovoltaic Specialists Conference p575

    [2]

    Sanii F, Giles F P, Schwartz R J 1992 Solid-State Electronics 35 311

    [3]

    Zhang X, Li B, Gao C 2006 Appl. Phys. Lett. 89 112120

    [4]

    Zhang X, Li B, Liu X 2008 Acta Phys. Sin. 57 7310 (in Chinese)[张希仁, 李斌成, 刘显明 2008 物理学报 57 7310]

    [5]

    Zhang X, Gao C, Zhou Y, Wang Z 2011 Chin. Phys. B 20 068105

    [6]

    Zhang X, Li B, Gao C 2008 J. Appl. Phys. 103 033709

    [7]

    Li B, Shaughnessy D, Mandelis A 2005 J. Appl. Phys. 97 023701

    [8]

    Mandelis A, Pawlak M, Wang C 2005 J. Appl. Phys. 98 123518

    [9]

    Ozisik N M 1993 Heat Conduction Second Edition p44 (New York: John Wiley & Sons, Inc.)

    [10]

    Kousik G S, Ling Z G, and Ajmera P K 1992 J. Appl. Phys. 72 141

    [11]

    Press W H, Teukolsky S A, Vetterling W T, Flannery B P 1992 Numerical Recipes in C: The Art of Scientific Computing Second Edition p362 (Cambridge: Cambridge University Press)

    [12]

    Sheard S J, Somekh M G, Hiller T 1990 Mater. Sci. Eng. B 5 101

  • [1]

    Sanii F, Schwartz R J, Pierret R F 1988 Proceedings of the 20th IEEE Photovoltaic Specialists Conference p575

    [2]

    Sanii F, Giles F P, Schwartz R J 1992 Solid-State Electronics 35 311

    [3]

    Zhang X, Li B, Gao C 2006 Appl. Phys. Lett. 89 112120

    [4]

    Zhang X, Li B, Liu X 2008 Acta Phys. Sin. 57 7310 (in Chinese)[张希仁, 李斌成, 刘显明 2008 物理学报 57 7310]

    [5]

    Zhang X, Gao C, Zhou Y, Wang Z 2011 Chin. Phys. B 20 068105

    [6]

    Zhang X, Li B, Gao C 2008 J. Appl. Phys. 103 033709

    [7]

    Li B, Shaughnessy D, Mandelis A 2005 J. Appl. Phys. 97 023701

    [8]

    Mandelis A, Pawlak M, Wang C 2005 J. Appl. Phys. 98 123518

    [9]

    Ozisik N M 1993 Heat Conduction Second Edition p44 (New York: John Wiley & Sons, Inc.)

    [10]

    Kousik G S, Ling Z G, and Ajmera P K 1992 J. Appl. Phys. 72 141

    [11]

    Press W H, Teukolsky S A, Vetterling W T, Flannery B P 1992 Numerical Recipes in C: The Art of Scientific Computing Second Edition p362 (Cambridge: Cambridge University Press)

    [12]

    Sheard S J, Somekh M G, Hiller T 1990 Mater. Sci. Eng. B 5 101

计量
  • 文章访问数:  5175
  • PDF下载量:  535
  • 被引次数: 0
出版历程
  • 收稿日期:  2013-10-30
  • 修回日期:  2014-03-19
  • 刊出日期:  2014-07-05

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