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飞秒激光烧蚀硅表面产生等离子体的发射光谱研究

高勋 宋晓伟 郭凯敏 陶海岩 林景全

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飞秒激光烧蚀硅表面产生等离子体的发射光谱研究

高勋, 宋晓伟, 郭凯敏, 陶海岩, 林景全

Optical emission spectra of Si plasma induced by femtosecond laser pulse

Gao Xun, Song Xiao-Wei, Guo Kai-Min, Tao Hai-Yan, Lin Jing-Quan
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  • 对中心波长为800 nm,脉宽为100 fs的激光脉冲烧蚀空气中硅(111)产生的等离子体发射光谱进行了时间和空间分辨研究. 结果表明,在等离子体羽膨胀初期(小于50 ns时间范围内),等离子体发射光谱主要由连续光谱构成,此后连续光谱强度逐渐减弱,线状光谱开始占主导地位;在羽体膨胀过程中离子谱线的存在时间短于原子谱线的存在时间. 由时间分辨发射光谱发现在羽体膨胀过程中等离子体辐射波长存在红移现象,波长红移量随时间演化呈二次指数衰减. 最后给出等离子体发射光谱谱线强度的时空演化规律.
    The time- and space-resolved optical emission spectra (OES) of Si plasma produced by femtosecond laser pulse with center wavelength of 800 nm and pulse width of 100 fs in air were investigated. The results show that the OES mainly consist of continuous spectrum at the early stage of plasma expansion (within the first 50 ns), then the continuous spectrum weakens gradually while the line spectrum becomes dominating. The existence time of ion spectra is shorter than that of atomic spectra in the process of plume expansion. The wavelength red-shift, which has a second order exponential decay with delay time, has been found by the time-resolved emission spectroscopy. Finally, the spatiotemporal evolution of OES intensity are presented.
    • 基金项目: 国家自然科学基金(批准号:60978014, 11074027)、吉林省科技厅基金(批准号: 20090523, 20100168, 20100521)、吉林省教育厅基金(批准号: [2008]297)和长春市科技局国际合作项目(批准号:09GH01)资助的课题.
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    Amoruso S, Bruzzese R, Spinelli N, Velotta R, Vitiello M, Wang X, Ausanio G, Iannotti V, Lanotte L 2004 Appl. Phys. Lett. 84 4502

    [3]

    Li Y P, Liu Z T 2009 Acta Phys. Sin. 58 5022 (in Chinese) [李阳平、 刘正堂 2009 物理学报 58 5022]

    [4]

    Perriere J, Boulmer-Leborgne C, Benzerga R, Tricot S 2007 J. Phys. D: Appl. Phys. 40 7069

    [5]

    Vorobyev A Y, Makin V S, Guo C L 2009 Phys. Rev. Lett. 102 234301

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    Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673

    [7]

    Huang Q J 2008 Acta Phys. Sin. 57 2314 (in Chinese) [黄庆举 2008 物理学报 57 2314]

    [8]

    Hafez M A, Khedr M A, Elaksher F F, Gamal Y E 2003 Plasma Sources Sci. Tech. 12 185

    [9]

    Man B Y, Dong Q L, Liu A H, Wei X Q, Zhang Q G, He J L, Wang X T 2004 J. Opt. A: Pure Appl. Opt. 6 17

    [10]

    Camacho J J, Diaz L, Santos M, Reyman D, Poyato J M L 2008 J. Phys. D: Appl. Phys. 41 105201

    [11]

    Guillermin M, Liebig C, Garrelie F, Stoian R, Loir A S, Audouard E 2009 Appl. Surf. Sci. 255 5163

    [12]

    Hu H F, Wang X L, Li Z L, Zhang N, Zhai H C 2009 Acta Phys. Sin. 58 7662 (in Chinese) [胡浩丰、 王晓雷、 李智磊、 张 楠、 翟宏琛 2009 物理学报 58 7662]

    [13]

    Yamagata Y, Sharma A, Narayan J, Mayo R M, Newman J W, Ebihara K 1999 J. Appl. Phys. 86 4154

    [14]

    Hong M H, Lu Y F, Bong S K 2000 Appl. Surf. Sci. 154—155 196

    [15]

    Chen C S, Zhou X L, Man B Y, Zhang Y Q, Guo J 2009 Optik 120 473

    [16]

    Junkel G C, Gunderson M A, Hooper C F 2000 Phys. Rev. E 62 5584

  • [1]

    Yang J J, Liu W W, Zhu X N 2007 Chin. Phys. 16 2003

    [2]

    Amoruso S, Bruzzese R, Spinelli N, Velotta R, Vitiello M, Wang X, Ausanio G, Iannotti V, Lanotte L 2004 Appl. Phys. Lett. 84 4502

    [3]

    Li Y P, Liu Z T 2009 Acta Phys. Sin. 58 5022 (in Chinese) [李阳平、 刘正堂 2009 物理学报 58 5022]

    [4]

    Perriere J, Boulmer-Leborgne C, Benzerga R, Tricot S 2007 J. Phys. D: Appl. Phys. 40 7069

    [5]

    Vorobyev A Y, Makin V S, Guo C L 2009 Phys. Rev. Lett. 102 234301

    [6]

    Her T H, Finlay R J, Wu C, Deliwala S, Mazur E 1998 Appl. Phys. Lett. 73 1673

    [7]

    Huang Q J 2008 Acta Phys. Sin. 57 2314 (in Chinese) [黄庆举 2008 物理学报 57 2314]

    [8]

    Hafez M A, Khedr M A, Elaksher F F, Gamal Y E 2003 Plasma Sources Sci. Tech. 12 185

    [9]

    Man B Y, Dong Q L, Liu A H, Wei X Q, Zhang Q G, He J L, Wang X T 2004 J. Opt. A: Pure Appl. Opt. 6 17

    [10]

    Camacho J J, Diaz L, Santos M, Reyman D, Poyato J M L 2008 J. Phys. D: Appl. Phys. 41 105201

    [11]

    Guillermin M, Liebig C, Garrelie F, Stoian R, Loir A S, Audouard E 2009 Appl. Surf. Sci. 255 5163

    [12]

    Hu H F, Wang X L, Li Z L, Zhang N, Zhai H C 2009 Acta Phys. Sin. 58 7662 (in Chinese) [胡浩丰、 王晓雷、 李智磊、 张 楠、 翟宏琛 2009 物理学报 58 7662]

    [13]

    Yamagata Y, Sharma A, Narayan J, Mayo R M, Newman J W, Ebihara K 1999 J. Appl. Phys. 86 4154

    [14]

    Hong M H, Lu Y F, Bong S K 2000 Appl. Surf. Sci. 154—155 196

    [15]

    Chen C S, Zhou X L, Man B Y, Zhang Y Q, Guo J 2009 Optik 120 473

    [16]

    Junkel G C, Gunderson M A, Hooper C F 2000 Phys. Rev. E 62 5584

计量
  • 文章访问数:  8595
  • PDF下载量:  8872
  • 被引次数: 0
出版历程
  • 收稿日期:  2009-12-27
  • 修回日期:  2010-03-06
  • 刊出日期:  2011-01-05

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