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Based on the resarch of the traditional Fourier transform profilometry, Fourier transform profilometry of tilted measurement system is proposed in this paper. The proposed technology makes the three constraints of the traditional Fourier transform profilometry measurement system less stringent. The optical axis in the CCD imaging system is not necessarily perpendicular (with a certain tilting angle) to the reference plane. The connection line between the centers of the exit pupil of the projecting system and the entrance pupil of the CCD imaging system is not required to be horizontal to the reference plane. The optical axis of the CCD imaging system and that of the projecting system are not coplanar, moreover, the two axises do not intersect at a point in the reference plane. Through the stringent theoretical analysis, the mathematical relationship between phase and height is obtained. Compared with the traditional Fourier transform profilometry, the tilted measurement system is more practical.
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Keywords:
- Fourier transform profilometry(FTP) /
- tilting /
- measurement system /
- phase
[1] Chen F, Brown G M, Song M 2000 Optic Lasers Eng. 39 10
[2] Shen J Y, Li G C, Chang S J, Zhang Y 2005 Acta Phys. Sin. 54 5157 (in Chinese) [申金媛、李现国、常胜江、张 延 2005 物理学报 54 5157]
[3] Yuan C J, Zhai H S, Wang X L, Wu L 2007 Acta Phys. Sin. 56 218 (in Chinese) [袁操今、翟宏琛、王晓雷、吴 兰 2007 物理学报 56 218]
[4] Qiao N S, Cai X H, Yao C M 2009 Chin. Phys. B 18 4881
[5] Lin J F, Su X Y 1995 Optic Lasers Eng. 34 3297
[6] Takeda M,Mutoh K 1983 Appl. Opt. 22 3977
[7] Ni G Y, Yan L, Yuan N C 2008 Chin. Phys. B 17 3629
[8] Chen G F, Yan W B, Chen H J, Li X G, Li Y X 2009 Chin. Phys. B 18 293
[9] Hu W J, Xie F Y, Chen Q, Weng J 2009 Chin. Phys. B 18 1276
[10] Zhou X, Su X Y 1994 Appl. Opt. 33 8210
[11] Su X Y, Li J, Gou L R 1988 Proc SPIE 954 32
[12] Yi J, Huang S 1997 Optic Lasers Eng. 27 493
[13] Burton D R, Goodall A J, Atkinson J T, Lalor M J 1995 Optic Lasers Eng. 23 245
[14] Hu E, He Y 2009 Optic Lasers Eng. 47 57
[15] Su X Y, Chen W J 2001 Optic Lasers Eng. 35 263
[16] Niu X B 2003 Ph. D. Dissertation (Tianjing: Tianjing University) (in Chinese) [牛小兵 2003 博士学位论文 (天津: 天津大学)]
[17] Liu D, Wang F, Huang Q X, Yan J H, Chi Y, Cen K F 2008 Chin. Phys. B 17 1312
[18] Li C, Li Z, Yu A M, Li C Q 2007 Chin. Phys. 16 2319
[19] Mao X F, Su X Y, Chen W J, Jin H L Optlk. (in press)
[20] Xu Q H, Zhong Y X 2000 Optical Technology 26 126 (in Chinese) [许庆红、钟约先、由志福 2000 光学技术 26 126]
[21] Tian F, Chen W Y, Zhao H 1996 Optical Engineering. 23 64 (in Chinese) [田 丰、陈文艺、赵 宏 1996 光电工程 23 64]
[22] Zappa E, Busca G 2008 Optic Lasers Eng. 46 106
[23] Wang Y, Zhang Z, Zeng Z M, Han X F 2006 Acta Phys. Sin. 55 1148 (in Chinese) [王 勇、张 泽、曾中明、韩秀峰 2006 物理学报 55 1148]
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[1] Chen F, Brown G M, Song M 2000 Optic Lasers Eng. 39 10
[2] Shen J Y, Li G C, Chang S J, Zhang Y 2005 Acta Phys. Sin. 54 5157 (in Chinese) [申金媛、李现国、常胜江、张 延 2005 物理学报 54 5157]
[3] Yuan C J, Zhai H S, Wang X L, Wu L 2007 Acta Phys. Sin. 56 218 (in Chinese) [袁操今、翟宏琛、王晓雷、吴 兰 2007 物理学报 56 218]
[4] Qiao N S, Cai X H, Yao C M 2009 Chin. Phys. B 18 4881
[5] Lin J F, Su X Y 1995 Optic Lasers Eng. 34 3297
[6] Takeda M,Mutoh K 1983 Appl. Opt. 22 3977
[7] Ni G Y, Yan L, Yuan N C 2008 Chin. Phys. B 17 3629
[8] Chen G F, Yan W B, Chen H J, Li X G, Li Y X 2009 Chin. Phys. B 18 293
[9] Hu W J, Xie F Y, Chen Q, Weng J 2009 Chin. Phys. B 18 1276
[10] Zhou X, Su X Y 1994 Appl. Opt. 33 8210
[11] Su X Y, Li J, Gou L R 1988 Proc SPIE 954 32
[12] Yi J, Huang S 1997 Optic Lasers Eng. 27 493
[13] Burton D R, Goodall A J, Atkinson J T, Lalor M J 1995 Optic Lasers Eng. 23 245
[14] Hu E, He Y 2009 Optic Lasers Eng. 47 57
[15] Su X Y, Chen W J 2001 Optic Lasers Eng. 35 263
[16] Niu X B 2003 Ph. D. Dissertation (Tianjing: Tianjing University) (in Chinese) [牛小兵 2003 博士学位论文 (天津: 天津大学)]
[17] Liu D, Wang F, Huang Q X, Yan J H, Chi Y, Cen K F 2008 Chin. Phys. B 17 1312
[18] Li C, Li Z, Yu A M, Li C Q 2007 Chin. Phys. 16 2319
[19] Mao X F, Su X Y, Chen W J, Jin H L Optlk. (in press)
[20] Xu Q H, Zhong Y X 2000 Optical Technology 26 126 (in Chinese) [许庆红、钟约先、由志福 2000 光学技术 26 126]
[21] Tian F, Chen W Y, Zhao H 1996 Optical Engineering. 23 64 (in Chinese) [田 丰、陈文艺、赵 宏 1996 光电工程 23 64]
[22] Zappa E, Busca G 2008 Optic Lasers Eng. 46 106
[23] Wang Y, Zhang Z, Zeng Z M, Han X F 2006 Acta Phys. Sin. 55 1148 (in Chinese) [王 勇、张 泽、曾中明、韩秀峰 2006 物理学报 55 1148]
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