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不同含氮量的a-Si:H/a-SiNx:H超晶格界面性质的研究

朱美芳 宗军 张秀增

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不同含氮量的a-Si:H/a-SiNx:H超晶格界面性质的研究

朱美芳, 宗军, 张秀增

THE EFFECTS OF NITROGEN CONTENT OF a-SiNx:H ON THE INTERFACE PROPERTIES IN a-Si:H/a-SiNx:H SUPERLATTICES

ZHU MEI-FANG, ZONG JUN, ZHANG XIU-ZEN
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  • 通过电调制吸收、光热偏转谱、光致发光及红外吸收谱等实验技术,研究了不同含氮量的a-Si:H/a-SiNx:H超晶格的界面性质。由电调制吸收测试得出的界面电荷密度Qs~1012cm-2。Qs比由光热偏转谱所获得的界面态密度Ni~1011cm-2大出约半个数量级。Ni,Qs,及光致发光相对峰值
    The effects of nitrogen content on the interfacial properties in a-Si:H/a-SiNx:H superlat-tices have been studies by electroabsorption (EA) photothermal deflection spectroscopy (PDS), photoluminescence (PL) and infrared (IR). The density of interface charges Qs deduced from EA is approximately 1012cm-2. The density of interface states Ni estimated by PDS is ~1011cm-2 which is smaller by a factor of 5 than Qs. The nitrogen content x dependences of Qs, Ni and the relative peak intensity of luminescence Ipl exhibit similar behavior and show extreme values at x=xc which is defined as critical value of nitrigen content. The critical values of nitrogen content are in the x range of 0.85-0.95. The measurements of IR reveal that the absorption of N-H bonds increases rapidly with increasing x in the range of 0.6-1.0. The asymmetry of interfaces and a possible mechanism of presence of critical values are discussed-For interpretating the phenomena observed, a model of charged nitrogen dangling bond is suggested.
    • 基金项目: 国家自然科学基金;第三世界科学院研究基金
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  • 文章访问数:  6283
  • PDF下载量:  450
  • 被引次数: 0
出版历程
  • 收稿日期:  1990-03-14
  • 修回日期:  1990-06-20
  • 刊出日期:  1991-01-05

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