搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

飞秒激光诱导自组织纳米周期结构及其光学特性的研究进展

彭娜娜 霍燕燕 周侃 贾鑫 潘佳 孙真荣 贾天卿

引用本文:
Citation:

飞秒激光诱导自组织纳米周期结构及其光学特性的研究进展

彭娜娜, 霍燕燕, 周侃, 贾鑫, 潘佳, 孙真荣, 贾天卿

The development of femtosecond laser-induced periodic nanostructures and their optical properties

Peng Na-Na, Huo Yan-Yan, Zhou Kan, Jia Xin, Pan Jia, Sun Zhen-Rong, Jia Tian-Qing
PDF
导出引用
  • 飞秒激光具有超快、超强的特点.飞秒激光微纳加工发展非常迅速. 本文综述了近十年来利用飞秒激光在金属、半导体、介质等各类材料中制备的纳米周期结构, 阐述了若干关于飞秒激光诱导纳米周期结构的物理机理的观点.讨论了基于偏振调制的多光束 干涉在半导体表面制备纳米周期结构,简要叙述了周期结构对材料光学特性的影响.
    Micromaching by using femtosecond laser has been developing rapidly. This paper introduces the main developments in the last ten years on the formation mechanisms of periodic ripples in metals, semiconductors, and dielectrics induced by femtosecond lasers. By combining the methods of multi-beam interferences with the self-organized periodic nanostructures, two-dimensional periodic complex nanostructures can be fabricated on the surface of semiconductors. Compared with that of plane surface, the photoluminescence of nanostructures increases greatly.
    • 基金项目: 国家自然科学基金(批准号:51132004,11027403)、国家重大研究计划项目(批准号:2010CB923203,2011CB808105)和上海市自然科学基金重点项目(批准号:11JC1403500,10XD1401800)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 51132004, 11027403 ), the Major Research Plan of the National Natural Science Foundation of China (Grant Nos. 2010CB923203, 2011CB808105), and the Shanghai Natural Science Foundation, China (Grant Nos. 11JC403500, 10XD1401800).
    [1]

    Birnbaum M 1965 J. Appl. Phys. 36 3688

    [2]

    Young J F, Preston J S, van Driel H M, Sipe J E 1983 Phys. Rev. B 27 1155

    [3]

    Emmony D C, Howson R P, Willis L J 1973 Appl. Phys. Lett. 23 598

    [4]

    Yong H, Zhang T Q, Wang S F, Gong Q H 2000 Acta Phys. Sin. 49 1292 (in Chinese) [杨宏, 张铁桥, 王树峰, 龚旗煌 2000 物理学报 49 1292]

    [5]

    Qiu J R, Jiang X W, Zhu C S, Gan F X 2001 Acta Phys. Sin. 50 871 (in Chinese) [邱建荣, 姜雄伟, 朱从善, 干福熹 2001 物理学报 50 871]

    [6]

    Lu P X, Yu W, He F 2003 Acta Phys. Sin. 52 1965 (in Chinese) [陆培祥, 余玮, 何峰 2003 物理学报 52 1965]

    [7]

    Zeng H D, Qu S L, Jiang X W, Qiu J R, Zhu C S, Gan X F 2003 Acta Phys. Sin. 52 2525 (in Chinese) [曾惠丹, 曲士良, 姜雄伟, 邱建荣, 朱从善, 干福熹 2003 物理学报 52 2525]

    [8]

    Varel H, Wahmber M, Rosenfeld A, Ashkenasi D, Campbell E E B 1998 Appl. Surf. Sci. 127 128

    [9]

    Ozkan A M, Malshe A P, Railkar T A, Brown W D, Shirk M D, Molian P A 1999 Appl. Phys. Lett. 75 3716

    [10]

    Prodan E, Radloff C, Halas N J, Nordlander P 2003 Science 302 419

    [11]

    Jia T Q, Chen H X, Huang M, Zhao F L, Qiu J R, Li R X, Xu Z Z, He X K, Zhang J, Kuroda H 2005 Phys. Rev. B 72 125429

    [12]

    Guo X D, Li R X, Hang Y, Xu Z Z, Yu B K, Ma H L, Sun X W 2007 Mater. Lett. 61 4583

    [13]

    Vorobyev A Y, Guo C L 2005 Phys. Rev. B 72 195422

    [14]

    Yang Y, Yang J J, Xue L, Guo Y, 2010 Appl. Phys. Lett. 97 141101

    [15]

    Qi L, Nishii K, Namba Y 2009 Opt. Lett. 34 1846

    [16]

    Hou S S, Huo Y Y, Xiong P X, Zhang Y, Zhang S A, Jia T Q, Sun Z R, Qiu J R, Xu Z Z 2011 J. Phys. D 44 505401

    [17]

    Shen M, Carey J E, Crouch C H, Kandyla M, Stone H A, Mazur E 2008 Nano Lett. 8 2087

    [18]

    Huang M, Zhao F L, Jia T Q, Cheng Y, Xu N S, Xu Z Z 2007 Nanotech. 18 505301

    [19]

    Costache F, Henyk M, Reif J 2002 Appl. Surf. Sci. 186 352

    [20]

    Liang F, Vallée R, Chin S L 2012 Appl. Phys. Lett. 100 251105

    [21]

    Liang F, Vallée R, Chin S L 2011 Opt. Express 20 4389

    [22]

    Shimotsuma Y, Kazansky P G, Qiu J R, Hirao K 2003 Phys. Rev. Lett. 91 247405

    [23]

    Yasumaru N, Miyazaki K, Kiuchi J 2003 Appl. Phys. A: Materials and Processing 76 983

    [24]

    Borowiec A, Haugen H K 2003 Appl. Phys. Lett. 82 4462

    [25]

    Bhardwaj V R, Simova E, Rajeev P P, Hnatovsky C, Taylor R S, Rayner D M, Corkum P B 2006 Phys. Rev. Lett. 96 057404

    [26]

    Dong Y Y, Molian P 2004 Appl. Phys. Lett. 84 10

    [27]

    Dufft D, Rosenfeld A, Das S K, Grunwald R, Bonse J 2009 J. Appl. Phys. 105 034908

    [28]

    Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 ACS Nano 3 4060

    [29]

    Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 Phys. Rev. B 79 125436

    [30]

    Wang J C, Guo C L 2005 Appl. Phys. Lett. 87 251914

    [31]

    Wang J C, Guo C L 2007 J. Appl. Phys. 102 053522

    [32]

    Dufft D, Rosenfeld A, Das S K, Grunwald R, Bonse J 2009 J. Appl. Phys. 105 034908

    [33]

    Jia X, Jia T Q, Zhang Y, Feng D H, Sun Z R, Qiu J R, Xu Z Z 2010 Opt. Lett. 35 1248

    [34]

    Jia T Q, Baba M, Suzuki M, Ganeev R A, Kuroda H, Qiu J R, Wang X S, Li R X, Xu Z Z 2008 Opt. Express 16 1874

    [35]

    Jia X, Jia T Q, Ding L E, Xiong P X, Deng L, Sun Z R, Wang Z G, Qiu J R, Xu Z Z 2009 Opt. Lett. 34 788

    [36]

    Xiong P X, Jia T Q, Jia X, Feng D H, Zhang S A, Ding L E, Sun Z R, Qiu J R, Xu Z Z 2011 New J. Phys. 13 023044

    [37]

    Yang Y, Yang J J, Liang C Y, Wang H S 2008 Opt. Express 16 11259

    [38]

    Vorobyev A Y, Guo C L 2008 Appl. Phys. Lett. 92 041914

    [39]

    Vorobyev A Y, Topkov A N, Gurin O V, Svich V A, Guo C L 2009 Appl. Phys. Lett. 95 121106

    [40]

    Zhao Q Z, Ciobanu F, Malzer S, Wang L J 2007 Appl. Phys. Lett. 91 121107

    [41]

    Jia X, Jia T Q, Zhang Y, Xiong P X, Feng D H, Sun Z R, Xu Z Z 2010 Opt. Express 18 14401

    [42]

    Vorobyev A Y, Makin V S, Guo C L 2009 Phys. Rev. Lett. 102 234301

    [43]

    Sudrie L, Franco M, Prade B, Mysyrowicz A 2001 Opt. Commun. 191 333

    [44]

    Bricchi E, Klappauf B G, Kazansky P G 2004 Opt. Lett. 29 119

    [45]

    Cheng G, Mishchik K, Mauclair C, Audouard E, Stoian R 2009 Opt. Express 17 9515

    [46]

    Ramirez L P R, Heinrich M, Richter S, Dreisow F, Keil R, Korovin A V, Peschel U, Nolte S, Tunnermann A 2010 Appl. Phys. A 100 1

    [47]

    Bricchi E, Mills J D, Kazansky P G, Klappauf B G 2002 Opt. Lett. 27 2200

    [48]

    Beresna M, Kazansky P G 2010 Opt. Lett. 35 1662

    [49]

    Shimotsuma Y, Sakakura M, Kazansky P G, Beresna M, Qiu J R, Miura K, Hirao K 2010 Adv. Mater. 22 4039

  • [1]

    Birnbaum M 1965 J. Appl. Phys. 36 3688

    [2]

    Young J F, Preston J S, van Driel H M, Sipe J E 1983 Phys. Rev. B 27 1155

    [3]

    Emmony D C, Howson R P, Willis L J 1973 Appl. Phys. Lett. 23 598

    [4]

    Yong H, Zhang T Q, Wang S F, Gong Q H 2000 Acta Phys. Sin. 49 1292 (in Chinese) [杨宏, 张铁桥, 王树峰, 龚旗煌 2000 物理学报 49 1292]

    [5]

    Qiu J R, Jiang X W, Zhu C S, Gan F X 2001 Acta Phys. Sin. 50 871 (in Chinese) [邱建荣, 姜雄伟, 朱从善, 干福熹 2001 物理学报 50 871]

    [6]

    Lu P X, Yu W, He F 2003 Acta Phys. Sin. 52 1965 (in Chinese) [陆培祥, 余玮, 何峰 2003 物理学报 52 1965]

    [7]

    Zeng H D, Qu S L, Jiang X W, Qiu J R, Zhu C S, Gan X F 2003 Acta Phys. Sin. 52 2525 (in Chinese) [曾惠丹, 曲士良, 姜雄伟, 邱建荣, 朱从善, 干福熹 2003 物理学报 52 2525]

    [8]

    Varel H, Wahmber M, Rosenfeld A, Ashkenasi D, Campbell E E B 1998 Appl. Surf. Sci. 127 128

    [9]

    Ozkan A M, Malshe A P, Railkar T A, Brown W D, Shirk M D, Molian P A 1999 Appl. Phys. Lett. 75 3716

    [10]

    Prodan E, Radloff C, Halas N J, Nordlander P 2003 Science 302 419

    [11]

    Jia T Q, Chen H X, Huang M, Zhao F L, Qiu J R, Li R X, Xu Z Z, He X K, Zhang J, Kuroda H 2005 Phys. Rev. B 72 125429

    [12]

    Guo X D, Li R X, Hang Y, Xu Z Z, Yu B K, Ma H L, Sun X W 2007 Mater. Lett. 61 4583

    [13]

    Vorobyev A Y, Guo C L 2005 Phys. Rev. B 72 195422

    [14]

    Yang Y, Yang J J, Xue L, Guo Y, 2010 Appl. Phys. Lett. 97 141101

    [15]

    Qi L, Nishii K, Namba Y 2009 Opt. Lett. 34 1846

    [16]

    Hou S S, Huo Y Y, Xiong P X, Zhang Y, Zhang S A, Jia T Q, Sun Z R, Qiu J R, Xu Z Z 2011 J. Phys. D 44 505401

    [17]

    Shen M, Carey J E, Crouch C H, Kandyla M, Stone H A, Mazur E 2008 Nano Lett. 8 2087

    [18]

    Huang M, Zhao F L, Jia T Q, Cheng Y, Xu N S, Xu Z Z 2007 Nanotech. 18 505301

    [19]

    Costache F, Henyk M, Reif J 2002 Appl. Surf. Sci. 186 352

    [20]

    Liang F, Vallée R, Chin S L 2012 Appl. Phys. Lett. 100 251105

    [21]

    Liang F, Vallée R, Chin S L 2011 Opt. Express 20 4389

    [22]

    Shimotsuma Y, Kazansky P G, Qiu J R, Hirao K 2003 Phys. Rev. Lett. 91 247405

    [23]

    Yasumaru N, Miyazaki K, Kiuchi J 2003 Appl. Phys. A: Materials and Processing 76 983

    [24]

    Borowiec A, Haugen H K 2003 Appl. Phys. Lett. 82 4462

    [25]

    Bhardwaj V R, Simova E, Rajeev P P, Hnatovsky C, Taylor R S, Rayner D M, Corkum P B 2006 Phys. Rev. Lett. 96 057404

    [26]

    Dong Y Y, Molian P 2004 Appl. Phys. Lett. 84 10

    [27]

    Dufft D, Rosenfeld A, Das S K, Grunwald R, Bonse J 2009 J. Appl. Phys. 105 034908

    [28]

    Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 ACS Nano 3 4060

    [29]

    Huang M, Zhao F L, Cheng Y, Xu N S, Xu Z Z 2009 Phys. Rev. B 79 125436

    [30]

    Wang J C, Guo C L 2005 Appl. Phys. Lett. 87 251914

    [31]

    Wang J C, Guo C L 2007 J. Appl. Phys. 102 053522

    [32]

    Dufft D, Rosenfeld A, Das S K, Grunwald R, Bonse J 2009 J. Appl. Phys. 105 034908

    [33]

    Jia X, Jia T Q, Zhang Y, Feng D H, Sun Z R, Qiu J R, Xu Z Z 2010 Opt. Lett. 35 1248

    [34]

    Jia T Q, Baba M, Suzuki M, Ganeev R A, Kuroda H, Qiu J R, Wang X S, Li R X, Xu Z Z 2008 Opt. Express 16 1874

    [35]

    Jia X, Jia T Q, Ding L E, Xiong P X, Deng L, Sun Z R, Wang Z G, Qiu J R, Xu Z Z 2009 Opt. Lett. 34 788

    [36]

    Xiong P X, Jia T Q, Jia X, Feng D H, Zhang S A, Ding L E, Sun Z R, Qiu J R, Xu Z Z 2011 New J. Phys. 13 023044

    [37]

    Yang Y, Yang J J, Liang C Y, Wang H S 2008 Opt. Express 16 11259

    [38]

    Vorobyev A Y, Guo C L 2008 Appl. Phys. Lett. 92 041914

    [39]

    Vorobyev A Y, Topkov A N, Gurin O V, Svich V A, Guo C L 2009 Appl. Phys. Lett. 95 121106

    [40]

    Zhao Q Z, Ciobanu F, Malzer S, Wang L J 2007 Appl. Phys. Lett. 91 121107

    [41]

    Jia X, Jia T Q, Zhang Y, Xiong P X, Feng D H, Sun Z R, Xu Z Z 2010 Opt. Express 18 14401

    [42]

    Vorobyev A Y, Makin V S, Guo C L 2009 Phys. Rev. Lett. 102 234301

    [43]

    Sudrie L, Franco M, Prade B, Mysyrowicz A 2001 Opt. Commun. 191 333

    [44]

    Bricchi E, Klappauf B G, Kazansky P G 2004 Opt. Lett. 29 119

    [45]

    Cheng G, Mishchik K, Mauclair C, Audouard E, Stoian R 2009 Opt. Express 17 9515

    [46]

    Ramirez L P R, Heinrich M, Richter S, Dreisow F, Keil R, Korovin A V, Peschel U, Nolte S, Tunnermann A 2010 Appl. Phys. A 100 1

    [47]

    Bricchi E, Mills J D, Kazansky P G, Klappauf B G 2002 Opt. Lett. 27 2200

    [48]

    Beresna M, Kazansky P G 2010 Opt. Lett. 35 1662

    [49]

    Shimotsuma Y, Sakakura M, Kazansky P G, Beresna M, Qiu J R, Miura K, Hirao K 2010 Adv. Mater. 22 4039

  • [1] 赵颂, 周华, 王淑英, 韩非, 蒋斯涵, 沈向前. 基于金属纳米球等离增强的高效钙钛矿/硅电池设计. 物理学报, 2022, 71(3): 038801. doi: 10.7498/aps.71.20211585
    [2] 张克瑾, 刘磊, 曾庆伟, 高太长, 胡帅, 陈鸣. 不同散射介质对飞秒脉冲激光传输特性影响研究. 物理学报, 2019, 68(19): 194207. doi: 10.7498/aps.68.20190430
    [3] 焦悦, 陶海岩, 季博宇, 宋晓伟, 林景全. 用于飞秒激光纳米加工的TiO2粒子阵列诱导多种基底表面近场增强. 物理学报, 2017, 66(14): 144203. doi: 10.7498/aps.66.144203
    [4] 吕浩, 尤凯, 兰燕燕, 高冬, 赵秋玲, 王霞. 非对称光束干涉制备二维微纳光子结构研究. 物理学报, 2017, 66(21): 217801. doi: 10.7498/aps.66.217801
    [5] 杨青, 杜广庆, 陈烽, 吴艳敏, 欧燕, 陆宇, 侯洵. 时间整形飞秒激光诱导熔融硅表面纳米周期条纹的电子动力学研究. 物理学报, 2014, 63(4): 047901. doi: 10.7498/aps.63.047901
    [6] 张伟, 滕浩, 王兆华, 沈忠伟, 刘成, 魏志义. 采用环形再生腔结构的飞秒激光啁啾脉冲放大研究. 物理学报, 2013, 62(10): 104211. doi: 10.7498/aps.62.104211
    [7] 刘小亮, 孙少华, 曹瑜, 孙铭泽, 刘情操, 胡碧涛. 飞秒激光低压N2等离子体特性的实验研究. 物理学报, 2013, 62(4): 045201. doi: 10.7498/aps.62.045201
    [8] 汪昌州, 朱伟玲, 翟继卫, 赖天树. Ga30Sb70/Sb80Te20纳米复合多层薄膜的相变特性研究. 物理学报, 2013, 62(3): 036402. doi: 10.7498/aps.62.036402
    [9] 杜允, 鲁年鹏, 杨虎, 叶满萍, 李超荣. In掺杂氮化亚铜薄膜的电学、光学和结构特性研究. 物理学报, 2013, 62(11): 118104. doi: 10.7498/aps.62.118104
    [10] 张晓青, 贺号, 胡明列, 颜鑫, 张霞, 任晓敏, 王清月. 多波长飞秒激光激发下GaAs纳米线SHG特性研究. 物理学报, 2013, 62(7): 076102. doi: 10.7498/aps.62.076102
    [11] 李保家, 周明, 张伟. 贴膜条件下飞秒激光诱导硅基表面锥状微结构. 物理学报, 2012, 61(23): 237901. doi: 10.7498/aps.61.237901
    [12] 朱丽丹, 孙方远, 祝捷, 唐大伟. 飞秒激光抽运探测热反射法对金属纳米薄膜超快非平衡传热的研究. 物理学报, 2012, 61(13): 134402. doi: 10.7498/aps.61.134402
    [13] 王光昶, 马春生, 张建炜, 白春燕, 刘玉红, 郑志坚. 飞秒激光与固体靶相互作用中光辐射时间特性的实验研究. 物理学报, 2012, 61(9): 095201. doi: 10.7498/aps.61.095201
    [14] 熊平新, 贾鑫, 贾天卿, 邓莉, 冯东海, 孙真荣, 徐至展. 三光束飞秒激光干涉在GaP,ZnSe表面诱导二维复合纳米-微米周期结构. 物理学报, 2010, 59(1): 311-316. doi: 10.7498/aps.59.311
    [15] 刘 欢, 姚建铨, 李恩邦. 激光全息法制作二、三维光子晶体的模拟计算及禁带分析. 物理学报, 2006, 55(5): 2286-2292. doi: 10.7498/aps.55.2286
    [16] 王兆华, 魏志义, 张 杰. 飞秒激光脉冲的频率分辨偏振光学开关法测量研究. 物理学报, 2005, 54(3): 1194-1199. doi: 10.7498/aps.54.1194
    [17] 罗志勇, 杨丽峰, 陈允昌. 基于多光束干涉原理的相移算法研究. 物理学报, 2005, 54(7): 3051-3057. doi: 10.7498/aps.54.3051
    [18] 许海军, 富笑男, 孙新瑞, 李新建. 硅纳米孔柱阵列的结构和光学特性研究. 物理学报, 2005, 54(5): 2352-2357. doi: 10.7498/aps.54.2352
    [19] 王兆华, 魏志义, 滕 浩, 王 鹏, 张 杰. 飞秒激光脉冲的谐波频率分辨光学开关法测量研究. 物理学报, 2003, 52(2): 362-366. doi: 10.7498/aps.52.362
    [20] 邱建荣, 姜雄伟, 朱从善, 干福熹. 飞秒激光作用下光学玻璃和激光玻璃的光致暗化及其ESR研究. 物理学报, 2001, 50(5): 871-874. doi: 10.7498/aps.50.871
计量
  • 文章访问数:  6519
  • PDF下载量:  1233
  • 被引次数: 0
出版历程
  • 收稿日期:  2012-12-03
  • 修回日期:  2013-01-02
  • 刊出日期:  2013-05-05

/

返回文章
返回