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采用流体力学方法研究了负偏压射频放电的物理过程,计算了带电粒子密度及电场的时空分布,分析了在不同的近似条件下,离子动量平衡方程中各项的贡献。In this paper , we have analysed the physical procedures of RF discharges with negative bias , using the hydrodynamics method, and have calculated the spatiotemporal distributions of charged par-ticals and the electric field. The contributions of each terms in momentum-balance equation of ions are also discussed under different approximations.
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