化学气相沉积法制备大尺寸单晶石墨烯的工艺参数研究

韩林芷; 赵占霞; 马忠权

doi:10.7498/aps.63.248103

摘要

石墨烯作为一种二维sp2杂化碳的同素异形体, 具有优良的电学、光学、热学及力学等性质. 产业化应用石墨烯要求其具有大的尺寸且性质均一. 化学气相沉积法(CVD)的出现为制备大尺寸、高质量的石墨烯提供了可能. 本文结合近几年CVD法制备石墨烯的研究进展, 综述了影响大尺寸、单晶石墨烯制备的工艺参数, 包括衬底选择与预处理、碳源与辅助气体流量调控、腔体温度和压力控制、沉积时间以及降温速率设定等. 最后展望了制备大尺寸单晶石墨烯的研究方向.

关键词:

Abstract

Graphene, as a two-dimensional sp2 hybridization allotropicity of carbon element, possesses unique properties of electricity, photology, thermology and mechanics. For industrialization, graphene possessing large dimension and homogeneous property is required. It can be prepared by chemical vapor deposition technology. In this paper, based on the progress of graphene research this year, we summarize the influence factors of graphene preparation, including substrate selection and preprocessing, carbon source and assist gas flow control, chamber temperature, pressure control, cooling rate, and deposition time setting, etc. Finally, we outlook the research direction of preparing the large-dimensional and single crystal graphenes.

Keywords:

作者及机构信息

1.
上海大学物理系索朗联合实验室, 上海 200444

基金项目: 国家自然科学基金(批准号: 61274067, 60876045)资助的课题.

Authors and contacts

1.
SHU-SolarE Research and Development Laboratory, Department of Physics, Shanghai University, Shanghai 200444, China

Funds: Project supported by the National Natural Science Foundation of China (Grant Nos. 61274067, 60876045).

参考文献

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[35]	Yu Q, Jauregui L A, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D 2011 Nature Mater. 10 443
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[39]	Kim J, Ishihara M, Koga Y, Tsugawa K, Hasegawa M, Iijima S 2011 Appl. Phys. Lett. 98 091502
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[42]	Muñoz R, Gómez-Aleixandre C 2014 J. Phys. D: Appl. Phys. 47 045305
[43]	Lee S, Lee K, Zhong Z 2010 Nano Lett. 10 4702

施引文献

[1]	Novoselov K S, Geim A K, Morozov S, Jiang D, Zhang Y, Dubonos S, Grigorieva I, Firsov A 2004 Science 306 666
[2]	Yu H L, Zhu J Q, Cao W X, Han J C 2013 Acta Phys. Sin. 62 028201 (in Chinese) [于海玲, 朱嘉琦, 曹文鑫, 韩杰才 2013 物理学报 62 028201]
[3]	Zeng M, Wang W L, Bai X D 2013 Chin. Phys. B 22 098105
[4]	Park S, Ruoff R S 2009 Nature Nanotech. 4 217
[5]	Qin M M, Ji W, Feng Y Y, Feng W 2014 Chin. Phys. B 23 028103
[6]	Nyakiti L, Myers-Ward R, Wheeler V, Imhoff E, Bezares F, Chun H, Caldwell J, Friedman A, Matis B, Baldwin J 2012 Nano Lett. 12 1749
[7]	Xu W Y, Huang L, Que Y D, Lin X, Wang Y L, Du S X, Gao H J 2014 Chin. Phys. B 23 088108
[8]	Tang J, Liu Z L, Kang C Y, Pan H B, Wei S Q, Xu P S, Gao Y Q, Xu X G 2009 Chin. Phys. Lett. 26 088104
[9]	Wei C, Li J, Liu Q B, Cai S J, Feng Z H 2014 Acta Phys. Sin. 63 038102 (in Chinese) [蔚翠, 李佳, 刘庆彬, 蔡树军, 冯志红 2014 物理学报 63 038102]
[10]	Somani P R, Somani S P, Umeno M 2006 Chem. Phys. Lett. 430 56
[11]	Feng D J, Huang W Y, Jiang S Z, Ji W, Jia D F 2013 Acta Phys. Sin. 62 054202 (in Chinese) [冯德军, 黄文育, 姜守振, 季伟, 贾东方 2013 物理学报 62 054202]
[12]	Bae S, Kim H, Lee Y, Xu X, Park J S, Zheng Y, Balakrishnan J, Lei T, Kim H R, Song Y I 2010 Nature Nanotech. 5 574
[13]	Zhou H, Yu W J, Liu L, Cheng R, Chen Y, Huang X, Liu Y, Wang Y, Huang Y, Duan X 2013 Nat. Commun. 4 2096
[14]	Mohsin A, Liu L, Liu P, Deng W, Ivanov I N, Li G, Dyck O E, Duscher G, Dunlap J R, Xiao K 2013 ACS Nano 7 8924
[15]	Fuhrer M S, Lau C N, MacDonald A H 2010 MRS Bull. 35 289
[16]	Kim K S, Zhao Y, Jang H, Lee S Y, Kim J M, Kim K S, Ahn J H, Kim P, Choi J Y, Hong B H 2009 Nature 457 706
[17]	Pan Y, Zhang H, Shi D, Sun J, Du S, Liu F, Gao H J 2009 Adv. Mater. 21 2777
[18]	Coraux J, N'Diaye A T, Busse C, Michely T 2008 Nano Lett. 8 565
[19]	Sutter P, Sadowski J T, Sutter E 2009 Phys. Rev. B 80 245411
[20]	Varykhalov A, Rader O 2009 Phys. Rev. B 80 035437
[21]	Xue Y, Wu B, Guo Y, Huang L, Jiang L, Chen J, Geng D, Liu Y, Hu W, Yu G 2011 Nano Res. 4 1208
[22]	Wang H, Wang G, Bao P, Yang S, Zhu W, Xie X, Zhang W J 2012 J. Am. Chem. Soc. 134 3627
[23]	Yan Z, Lin J, Peng Z, Sun Z, Zhu Y, Li L, Xiang C, Samuel E L, Kittrell C, Tour J M 2012 ACS Nano 6 9110
[24]	Chen S, Ji H, Chou H, Li Q, Li H, Suk J W, Piner R, Liao L, Cai W, Ruoff R S 2013 Adv. Mater. 25 2062
[25]	Geng D, Wu B, Guo Y, Huang L, Xue Y, Chen J, Yu G, Jiang L, Hu W, Liu Y 2012 Proc. Natl. Acad. Sci. 109 7992
[26]	Wu Y A, Fan Y, Speller S, Creeth G L, Sadowski J T, He K, Robertson A W, Allen C S, Warner J H 2012 ACS Nano 6 5010
[27]	Kim S M, Hsu A, Lee Y H, Dresselhaus M, Palacios T, Kim K K, Kong J 2013 Nano Technology 24 365602
[28]	Wu T, Ding G, Shen H, Wang H, Sun L, Jiang D, Xie X, Jiang M 2013 Adv. Funct. Mater. 23 198
[29]	Zhang B, Lee W H, Piner R, Kholmanov I, Wu Y, Li H, Ji H, Ruoff R S 2012 ACS Nano 6 2471
[30]	Luo Y R 2007 Comprehensive Handbook of Chemical Bond Energies (Boca Raton: CRC Press) p7
[31]	Hwang C, Yoo K, Kim S J, Seo E K, Yu H, Biró L P 2011 J. Phys. Chem. C 115 22369
[32]	Losurdo M, Giangregorio M M, Capezzuto P, Bruno G 2011 Phys. Chem. Chem. Phys. 13 20836
[33]	Wu B, Geng D, Xu Z, Guo Y, Huang L, Xue Y, Chen J, Yu G, Liu Y 2013 NPG Asia Mater. 5 e36
[34]	Bhaviripudi S, Jia X, Dresselhaus M S, Kong J 2010 Nano Lett. 10 4128
[35]	Yu Q, Jauregui L A, Wu W, Colby R, Tian J, Su Z, Cao H, Liu Z, Pandey D, Wei D 2011 Nature Mater. 10 443
[36]	Wofford J M, Nie S, McCarty K F, Bartelt N C, Dubon O D 2010 Nano Lett. 10 4890
[37]	Robinson Z R, Tyagi P, Mowll T R, Ventrice Jr C A, Hannon J B 2012 Phys. Rev. B 86 235413
[38]	Sun J, Cole M T, Lindvall N, Teo K B, Yurgens A 2012 Appl. Phys. Lett. 100 022102
[39]	Kim J, Ishihara M, Koga Y, Tsugawa K, Hasegawa M, Iijima S 2011 Appl. Phys. Lett. 98 091502
[40]	Kim Y, Song W, Lee S, Jeon C, Jung W, Kim M, Park C Y 2011 Appl. Phys. Lett. 98 263106
[41]	Zhang L, Shi Z, Liu D, Yang R, Shi D, Zhang G 2012 Nano Res. 5 258
[42]	Muñoz R, Gómez-Aleixandre C 2014 J. Phys. D: Appl. Phys. 47 045305
[43]	Lee S, Lee K, Zhong Z 2010 Nano Lett. 10 4702

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