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质子与金属布线层核反应对微纳级静态随机存储器单粒子效应的影响分析

赵雯 郭晓强 陈伟 邱孟通 罗尹虹 王忠明 郭红霞

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质子与金属布线层核反应对微纳级静态随机存储器单粒子效应的影响分析

赵雯, 郭晓强, 陈伟, 邱孟通, 罗尹虹, 王忠明, 郭红霞

Effects of nuclear reactions between protons and metal interconnect overlayers on single event effects of micro/nano scaled static random access memory

Zhao Wen, Guo Xiao-Qiang, Chen Wei, Qiu Meng-Tong, Luo Yin-Hong, Wang Zhong-Ming, Guo Hong-Xia
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  • 金属布线层对微纳级静态随机存储器(static random access memory, SRAM) 质子单粒子效应敏感性的影响值得关注. 利用Geant4针对不同能量(30 MeV, 100 MeV, 200 MeV和500 MeV)的质子与微纳级SRAM器件的核反应过程开展计算, 研究了核反应次级粒子的种类、线性能量传输值(linear energy transfer, LET)及射程情况, 尤其对高LET 值的核反应次级粒子及其射程开展了详细分析. 研究表明, 金属布线层的存在和质子能量的增大为原子序数大于或等于30的重核次级粒子的产生创造了条件, 器件体硅区中原子序数大于60的重核离子来源于质子与钨材料的核反应, 核反应过程中的特殊作用机理会生成原子序数在30至50之间的次级粒子, 且质子能量的增大有助于这种作用机理的发生, 原子序数在30至50之间的次级粒子在器件体硅区的LET值最大约为37 MeV·cm2/mg, 相应射程可达到几微米, 对于阱深在微米量级的微纳级SRAM器件而言, 有引发单粒子闩锁的可能. 研究结果为空间辐射环境中宇航器件的质子单粒子效应研究提供理论支撑.
    Since metal interconnect overlayers are central components of micro/nano scaled static random access memory (SRAM), the effects of their presence on proton-induced single-event susceptibility are noteworthy. Geant4 is used to calculate the kinds and probabilities of secondary particles existing in bulk silicon, which are produced from nuclear reactions between protons of different energies (30, 100, 200 and 500 MeV) and micro/nano scaled SRAM. The probabilities of secondary particles with Z≥30 in different overlays are compared with one another; the particles are chiefly coming from nuclear reactions between 500 MeV protons and the SRAM topped with interconnect overlayers. In addition, the kinds and ranges of the secondary particles with high LETs (linear energy transfers) are also analyzed. Results show that there is an increase in the production of secondary particles with Z≥30 due to the presence of metal interconnect overlayers and the rise of proton energy. The secondary particles with Z>60 in bulk silicon are generated by proton interactions with tungsten. As another consequence of the interactions, the secondary particles with 30≤Z≤50 are produced, the probability of which is higher as the proton energy increases. The maximum LET for the secondary particles with 30≤Z≤50 is about 37 MeV·cm2/mg and the corresponding range is several microns, which may induce single event latch-up in micro/nano scaled SRAM with well depths on the order of microns. Results obtained support the theoretic analysis of proton-induced single event effects of aerospace devices in space radiation environment.
      通信作者: 赵雯, zhaowen@nint.ac.cn
    • 基金项目: 国家自然科学基金青年科学基金(批准号: 11175271)和国家科技重大专项(批准号: 2014ZX01022-301)资助的课题.
      Corresponding author: Zhao Wen, zhaowen@nint.ac.cn
    • Funds: Project supported by the Young Scientists Fund of the National Natural Science Foundation of China (Grant No. 11175271), and the National Science and Technology Major Project of the Ministry of Science and Technology of China (Grant No. 2014ZX01022-301).
    [1]

    Zhang K Y, Zhang F Q, Luo Y H, Guo H X 2013 Chin. Phys. B 22 028501

    [2]

    Zhang K Y, Guo H X, Luo Y H, Fan R Y, Chen W, Lin D S, Guo G, Yan Y H 2011 Chin. Phys. B 20 068501

    [3]

    He C H, Geng B, Yang H L, Chen X H, Wang Y P, Li G Z 2003 Acta Phys. Sin 52 2235 (in Chinese) [贺朝会, 耿斌, 杨海亮, 陈晓华, 王燕萍, 李国政 2003 物理学报 52 2235]

    [4]

    Zhang Q X, Hou M D, Liu J, Wang Z G, Jin Y F, Zhu Z Y, Sun Y M 2004 Acta Phys. Sin 53 566 (in Chinese) [张庆祥, 侯明东, 刘杰, 王志光, 金运范, 朱智勇, 孙友梅 2004 物理学报 53 566]

    [5]

    James A F, James R S, Marty R S, Jacques B, Philippe P 2008 IEEE Trans. Nucl. Sci. 55 2161

    [6]

    Harry Y L, Michael S L, Harold L H 2006 IEEE Trans. Nucl. Sci. 53 3502

    [7]

    Edward P 2011 Single Event Effects in Aerospace (United States of America: IEEE Press) p42

    [8]

    Wang T Q 2003 Ph. D. Dissertation (Changsha: Graduate School of National University of Defense Technology) (in Chinese) [王同权 2003 博士学位论文 (长沙: 国防科技大学)]

    [9]

    He C H, Chen X H, Li G Z 2002 Chinese Journal of Computational Physics 19 367 (in Chinese) [贺朝会, 陈晓华, 李国政 2002 计算物理 19 367]

    [10]

    He C H, Chen X H, Li G Z, Yang H L 2000 Chinese Space Science and Technology 5 10 (in Chinese) [贺朝会, 陈晓华, 李国政, 杨海亮 2000 中国空间科学技术 5 10]

    [11]

    Zhang W Y 2002 M. D. Dissertation (Changsha: Graduate School of National University of Defense Technology) (in Chinese) [张文勇 2002 硕士学位论文 (长沙: 国防科技大学)]

    [12]

    Neill P M, Badhwar G D, Culpepper W X 1998 IEEE Trans. Nucl. Sci. 45 2467

    [13]

    David M H, Ewart W B 2003 IEEE Trans. Nucl. Sci. 50 2246

    [14]

    Cellere G, Paccagnella A, Visconti A 2008 IEEE Trans. Nucl. Sci. 55 2908

    [15]

    Schwank J R, Shaneyfelt M R, Baggio J 2005 IEEE Trans. Nucl. Sci. 52 2908

    [16]

    Loke L A S 1999 Ph. D. Dissertation (Stanford: Graduate School of Stanford University)

    [17]

    Warren K M 2010 Ph. D. Dissertation (Nashville: Graduate School of Vanderbilt University)

    [18]

    Schwank J R, Shaneyfelt M R, Dodd P E 2013 IEEE Trans. Nucl. Sci. 60 2110

  • [1]

    Zhang K Y, Zhang F Q, Luo Y H, Guo H X 2013 Chin. Phys. B 22 028501

    [2]

    Zhang K Y, Guo H X, Luo Y H, Fan R Y, Chen W, Lin D S, Guo G, Yan Y H 2011 Chin. Phys. B 20 068501

    [3]

    He C H, Geng B, Yang H L, Chen X H, Wang Y P, Li G Z 2003 Acta Phys. Sin 52 2235 (in Chinese) [贺朝会, 耿斌, 杨海亮, 陈晓华, 王燕萍, 李国政 2003 物理学报 52 2235]

    [4]

    Zhang Q X, Hou M D, Liu J, Wang Z G, Jin Y F, Zhu Z Y, Sun Y M 2004 Acta Phys. Sin 53 566 (in Chinese) [张庆祥, 侯明东, 刘杰, 王志光, 金运范, 朱智勇, 孙友梅 2004 物理学报 53 566]

    [5]

    James A F, James R S, Marty R S, Jacques B, Philippe P 2008 IEEE Trans. Nucl. Sci. 55 2161

    [6]

    Harry Y L, Michael S L, Harold L H 2006 IEEE Trans. Nucl. Sci. 53 3502

    [7]

    Edward P 2011 Single Event Effects in Aerospace (United States of America: IEEE Press) p42

    [8]

    Wang T Q 2003 Ph. D. Dissertation (Changsha: Graduate School of National University of Defense Technology) (in Chinese) [王同权 2003 博士学位论文 (长沙: 国防科技大学)]

    [9]

    He C H, Chen X H, Li G Z 2002 Chinese Journal of Computational Physics 19 367 (in Chinese) [贺朝会, 陈晓华, 李国政 2002 计算物理 19 367]

    [10]

    He C H, Chen X H, Li G Z, Yang H L 2000 Chinese Space Science and Technology 5 10 (in Chinese) [贺朝会, 陈晓华, 李国政, 杨海亮 2000 中国空间科学技术 5 10]

    [11]

    Zhang W Y 2002 M. D. Dissertation (Changsha: Graduate School of National University of Defense Technology) (in Chinese) [张文勇 2002 硕士学位论文 (长沙: 国防科技大学)]

    [12]

    Neill P M, Badhwar G D, Culpepper W X 1998 IEEE Trans. Nucl. Sci. 45 2467

    [13]

    David M H, Ewart W B 2003 IEEE Trans. Nucl. Sci. 50 2246

    [14]

    Cellere G, Paccagnella A, Visconti A 2008 IEEE Trans. Nucl. Sci. 55 2908

    [15]

    Schwank J R, Shaneyfelt M R, Baggio J 2005 IEEE Trans. Nucl. Sci. 52 2908

    [16]

    Loke L A S 1999 Ph. D. Dissertation (Stanford: Graduate School of Stanford University)

    [17]

    Warren K M 2010 Ph. D. Dissertation (Nashville: Graduate School of Vanderbilt University)

    [18]

    Schwank J R, Shaneyfelt M R, Dodd P E 2013 IEEE Trans. Nucl. Sci. 60 2110

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出版历程
  • 收稿日期:  2015-03-11
  • 修回日期:  2015-04-22
  • 刊出日期:  2015-09-05

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