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利用金属掩模法制备钉扎型磁性隧道结

由 臣 赵燕平 金恩姬 李飞飞 王天兴 曾中明 彭子龙

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利用金属掩模法制备钉扎型磁性隧道结

由 臣, 赵燕平, 金恩姬, 李飞飞, 王天兴, 曾中明, 彭子龙

Fabrication of pinned magnetic tunnel junctions using a contact shadow mask method

You Chen, Zhao Yan-Ping, Jin En-Ji, Li Fei-Fei, Wang Tian-Xing, Zeng Zhong-Ming, Peng Zi-Long
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  • 利用金属掩模法和Ir22Mn78合金反铁磁钉扎层,制备了四种钉扎型的Py/Al2O3/Py,Py/Al2O3/Co,Co/Al2O3/Py和Co/Al2O3/Co磁性隧道结,坡莫合金的成分为Py=Ni79Fe21.例如:利用狭缝宽度为100?μm的金属掩模,直接制备出室温隧穿磁电阻比值为17.2%的磁性隧道结Co/Al2O3/Co,其结电阻为76Ω,结电阻和结面积的积矢为76×104Ωμm2,自由层的偏转场为1114?A/m,并且在外加磁场0.1114A·m-1之间时室温磁电阻比值
    Four types of pinned magnetic tunnel junctions (MTJs) with threekeylayer structures of Py/Al2O3/Py,Py/Al2O3/Co,Co/Al2O3/Py,Co/Al2O3/Co were fabricated using a contact shadow mask method and an antiferromagnetically pinned layer of Ir22Mn78.The slit width of the shadow mask is 100μm, and the composition of permalloy is Py=Ni79Fe21.For example, the MTJs of Co/Al2O3/Co with a tunneling magnetoresistance (TMR) ratio of 17.2%, the junction resistance of 76?Ω, the resistance area product RS of 760?kΩμm2, and the freelayer reversal field of 1114A·m-1 defined as the field where the TMR rises to 50% of the total jump were achieved at the as deposited state at room temperature. Furthermore, when the magnetic field increases from 0 to 1114?A·m-1 the TMR ratio jumps from 0 to 17.2% with one step, which shows that the magnetic field sensitivity of the junction reached at 0.1%/(103A·m-1). While, the TMR vs external filed H curves for the pinned MTJs of Co/Al2O3/Py show a good rectangular shape with a small free-layer reversal filed of 1114?A·m-1. Our exprimental results show that such MTJs can be used to fabricate the magnetic field sensitive sensors or prototype demonstration devices of magnetoresistive random access memory.
    • 基金项目: 天津市高等学校科技发展基金(批准号:0120216)资助的课题.
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  • 被引次数: 0
出版历程
  • 收稿日期:  2003-11-21
  • 修回日期:  2003-12-29
  • 刊出日期:  2004-04-05

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