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红外薄膜热电探测器分析

陈继述

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红外薄膜热电探测器分析

陈继述

THEORY OF THIN PYROELECTRIC FILM DETECTORS

CHEN JI-SHU
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  • 本文用一维扩散模型推出了热电探测器响应率的表达式,并计算了悬空的和有底板的TGS热电探测器的响应率和NEP的数值(作为器件厚度和工作频率的函数)。根据数值计算的结果,分析了薄膜热电探测器的发展前景。本文认为:(i)必须用薄膜底板。底板和热电晶体的厚度最好都在0.1微米以下。底板宜选用比热和密度尽量小的材料。这样的薄膜器件,其低频NEP可能比10微米厚的悬空器件降低一个数量级。(ii)如底板厚度超过热扩散长度,薄膜器件响应率便下降,同时温度噪声上升,NEP上升。这样的薄膜器件,其低频性能将显著地不如10微米厚的悬空器件。
    The pyroelectric response and NEP of pyroelectric detectors with and without a substrate are calculated as functions of detector thickness and working frequency, using the one-dimensional diffusion theory. It is found that in order for a thin pyroelectric film detector to have better low frequency performance, it is essential that the substrate should be effectively free-bearing and very thin, preferably less than 0.1μ thick. The pyroelectric layer should also be thin, preferably as thin as the substrate. As concerns the substrate material, the product of its specific heat and density should be as small as possible.
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  • 文章访问数:  6568
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  • 被引次数: 0
出版历程
  • 收稿日期:  1973-09-19
  • 刊出日期:  1974-03-05

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