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采用逐级校正法数值求解LSS方程,计算了Be+,N+,Ne+,Mg+,Si+,Ar+,Cr+共七种离子注入到砷化镓靶中的射程统计参数Rp,△Rp,R⊥提出了计算Rp,△Rp,R⊥时简单的初值计算公式,既可避免能量零点发散,并有足够的计算精度。所提出的β积分表式,可大大节省机器计算时间。所使用的数值方法和计算程序也适用于其它离子注入到其它靶材料的计算。Based on successive correction method, we have solved LSS equation numerically and calculated the range statistic parameters Rp,△Rp and R⊥ for ions implanted in GaAs. We propose simple formulas for initial values in calculating Rp,△Rp and R⊥; by using these formulas, the zero-energy divergence can be avoided and sufficient accuracy achieved. The expressions for β-integration are given to save computation time. Our numerical method and computer program can also be used to other ion-target systems.
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