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阴极透镜象差的变分理论

西门纪业 周立伟 艾克聪

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阴极透镜象差的变分理论

西门纪业, 周立伟, 艾克聪

VARIATIONAL THEORY OF ABERRATIONS IN CATHODE LENSES

XIMEN JI-YE, ZHOU LI-WEI, AI KE-CONG
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  • 本文运用变分原理研究了电磁复合聚焦阴极透镜的象差理论,导出了在任意象平面中象差系数的普遍公式。它们可以用Glaser导出的象差系数的线性组合来表示。这就表明了宽束与细束电子光学系统的象差都可以用统一的变分方法处理,并建立了两者之间的联系,本文采用矢量形式描写阴极透镜的近轴轨迹,并采用矩阵形式描写象差。本文所得的象差系数较之文献上已有结果形式更为简洁且适用于计算机计算。本文考虑了阴极面上磁场和横向电场不为零的情况,因而所得结果较为普遍。
    In this paper, the aberration theory for cathode lenses with combined electrostatic and magnetic focusing is discussed in detail. The more general case, when cathode is situated in both magnetic and transversal electric fields, has also been considered. Based on the variational principle, we have derived the general formulae of aberration coefficients of cathode lenses on any image plane, and transformed them into the linear combination of the well-known aberration coefficients given by Glaser. It follows that the aberrations for both the wide electron beam system (cathode lens) and the narrow electron beam system (conventional electron lens) can be treated by the universal variational theory. Hence the relationship between these two systems is also established.The paraxial electron trajectories of cathode lenses are described in the vector form. The aberrations are expressed in the matrix form, and they are suitable for computer calculation.
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出版历程
  • 收稿日期:  1982-10-07
  • 刊出日期:  1983-06-05

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