The reaction kinetic processes of species produced in a pulsed TEA CO2 laser induced si-lane plasma were studied with the time-resolved OES. It is showed that the time position of main peaks for different fragments' charactristic lines are appreciably different. The reaction kinetic processes are discussed based on the results. By comparing the time evolution of the lines of the fragments and considering the other results of OES, We infer that the final reaction channel of the laser-induced silane plasma is a Si producing channel.