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低能粒子轰击对Si(001)-2×1表面原子行为的影响:分子动力学模拟研究

郏正明 杨根庆 程兆年 柳襄怀 邹世昌

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低能粒子轰击对Si(001)-2×1表面原子行为的影响:分子动力学模拟研究

郏正明, 杨根庆, 程兆年, 柳襄怀, 邹世昌

STUDY OF EFFECTS OF LOW-ENERGY BOMBARDMENTS OF Si(001)-2×1 BY MOLECULAR DYNAMICS SIMULATION

JIA ZHENG-MING, YANG GEN-QING, CHENG ZHAO-NIAN, LIU XIANG-HUAI, ZOU SHI-CHANG
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  • 对1─100ev的低能位子轰击Si(001)-2×1表面进行了分子动力学模拟研究,利用二维偶对相关函数分析了低能轰击对表面层原子行为的影响。研究表明,10eV,100eV粒子的轰击,一方面增强了表面原子形成二聚体的能力,使表面二聚体成键数量增加;另一方面,也使表面原子的排列更趋无序。1eV的粒子对表面原子行为的影响不大,只是使表面原子的振动加剧。
    Molecular dynamics simulations were performed for 1-100eV particle bombardments of Si(001)-2×1 surface. The two dimensional pair correlation functions were obtained to investigate the arrangement of surface atoms after such bombardments. The results show that 10eV and 100eV bombardments had the some effects on the behaviour of surface atoms. On one hand, 10eV and 100eV bombardments improved the mobility of surface atoms and produced more dimers. On the other hand, they increased the disordering of surface atom's arrangement and made the surface tend to be amorphous.
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出版历程
  • 收稿日期:  1993-12-14
  • 刊出日期:  1994-11-20

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