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提出了用能量为１．５－２．５ＭｅＶ的质子弹性背散射分析（ｅｌａｓｔｉｃ ｂａｃｋｓｃａｔｔｅｒｉｎｇ，缩写为ＥＢＳ）来测定薄膜中的氧含量，这个方法对于厚度为几十纳米到几个微米的样品，测量精度约５％。采用ＲＢＳ分析并结合ＥＢＳ分析，可全面测得薄膜中各元素的含量。In this paper, a technique of proton elastic backscattering (EBS) in the energy range of 1.5-2.5MeV is proposed for the measurement of the total contents of oxy-gen in the films. The accuracy is better than 5% for the film thickness between less than hundreds nm to a few microns.
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