搜索

x

留言板

尊敬的读者、作者、审稿人, 关于本刊的投稿、审稿、编辑和出版的任何问题, 您可以本页添加留言。我们将尽快给您答复。谢谢您的支持!

姓名
邮箱
手机号码
标题
留言内容
验证码

计及溅射损失的平行板静电场法离子引出和收集

谢国锋 王德武 应纯同

引用本文:
Citation:

计及溅射损失的平行板静电场法离子引出和收集

谢国锋, 王德武, 应纯同

Ion extraction and collection studied by parallel electrode method on considerin g sputtering loss

Xie Guo-Feng, Wang De-Wu, Ying Chun-Tong
PDF
导出引用
  • 采用粒子模拟-Monte Carlo碰撞(particle in cell_Monte Carlo collision)方法研究了 原子蒸气激光同位素分离工程中一维平行板静电场法离子引出和收集过程,记录引出离子的 能量分布和角度分布,计算离子在收集板上造成的溅射损失.模拟结果表明,增加引出电压 可以缩短引出时间,降低碰撞损失,但是增加了溅射损失,使得收集率降低;增加电子温度 可以缩短引出时间,提高收集率;增加初始等离子体密度将使引出时间增加,收集率降低;而目标同位素丰度较高的情况下,离子引出过程的碰撞损失
    One-dimensional ion extraction and collection is studied by parallel electrode method using particle in cell_Monte Carlo collision (PIC-MCC) simulation. The e nergy and angle distribution of extracted ions is recorded and the sputtering lo ss is calculated. The results show that the extraction time and collision loss a re decreased by increasing extraction voltage, but the sputtering loss increases and collection ratio decreases. The extraction time is decreased and the collec tion ratio is increased by increasing electron temperature, while the extraction time is increased and the collection ratio is decreased by increasing initializ ed plasma density;and the collision loss is decreased and the collection ratio i s increased, if the target isotope concentration is higher. Improving the parall el electrode method leads to decreasing sputtering loss and increasing collectio n ratio greatly.
    • 基金项目: 国家重点基础研究发展规划(批准号:G2000077400)、国家自然科学基金(批准号:10435080,10175080, 10447006)和中国科学院知识创新工程重点方向项目(批准号:KJCX2-SW-N02)资助的课题.
计量
  • 文章访问数:  6447
  • PDF下载量:  578
  • 被引次数: 0
出版历程
  • 收稿日期:  2004-07-13
  • 修回日期:  2004-12-22
  • 刊出日期:  2005-02-05

/

返回文章
返回