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六方相InGaN外延膜的显微Raman散射

王瑞敏 陈光德 竹有章

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六方相InGaN外延膜的显微Raman散射

王瑞敏, 陈光德, 竹有章

Micro-Raman scattering study of hexagonal InGaN epitaxial layer

Wang Rui-Min, Chen Guang-De, Zhu You-Zhang
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  • 用X射线衍射(XRD)技术和显微Raman散射方法对金属有机化学气相沉积(MOCVD)法生长的六方相InxGa1-xN薄膜样品进行了研究,观察到了相分离现象和LO声子-等离子耦合模(LPP+),讨论了InxGa1-xN的A1(LO)模被屏蔽的主要物理机制.同时,对Raman谱中E2和A1(TO)声子模进行了分析和讨论.在InxGa1-xN样品的低温Raman谱中还观察到单电子跃迁产生的Raman散射信号.
    Hexagonal InxGa1-xN film grown by metalorganic chemical vapor deposition (MOCVD) was studied by Micro-Raman scattering and X-ray diffraction. The phase separation was observed in InxGa1-xN, the biaxial stress was measured by both Raman and X-ray diffraction. In Raman spectroscopy, the A1(LO) mode of InxGa1-xN is absent. Instead, the LO phonon-plasmon coupled mode (LPP+) was observed at about 778 cm-1. The carrier concentration was determined by the frequency of the coupled mode. The E2 and A1(TO)modes of InxGa1-xN layer exhibit a down-shift compare to those of GaN layer. At low temperature, the peak induced by electronic transition was observed in Raman spectra of InxGa1-xN.
    • 基金项目: 国家自然科学基金(批准号:10474078)和陕西省自然科学基金(批准号:2004A01)资助的课题
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  • 文章访问数:  7279
  • PDF下载量:  1451
  • 被引次数: 0
出版历程
  • 收稿日期:  2005-03-25
  • 修回日期:  2005-06-27
  • 刊出日期:  2006-01-05

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