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PbTiO3/PbZr0.3Ti0.7O3/PbTiO3夹心结构铁电薄膜子晶层的优化

王龙海 于 军 王耘波 高峻雄 赵素玲

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PbTiO3/PbZr0.3Ti0.7O3/PbTiO3夹心结构铁电薄膜子晶层的优化

王龙海, 于 军, 王耘波, 高峻雄, 赵素玲

Optimization of seed layer of PbTiO3/PbZr0.3Ti0.7O3/PbTiO3 sandwich structure ferroelectric thin film

Wang Long-Hai, Yu Jun, Wang Yun-Bo, Gao Jun-Xiong, Zhao Su-Ling
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  • 用Sol-Gel法制备了Pb(1+x)TiO3/PbZr03Ti07O3/Pb(1+x)TiO3(PT/PZT/PT)夹心结构及PZT铁电薄膜,为了获得高质量的PT/PZT/PT夹心结构铁电薄膜,使用不同过量Pb配比(x)的PbTiO3 (PT)层进行制备,以获得优化的PT子晶层.X射线
    The PT/PZT/PT and PZT thin films were prepared by sol-gel method. Different Pb content (x) (x=0, 005, 010, 015, 020) were added in excess to the PT precursor to optimize PT seed layer. The XRD and AFM results show that the crystalline phase and microstructure of the films were greatly affected by the excess Pb content (x) in PT layers. The pure perovskite structure PT/PZT/PT films with dense, void-free and uniform fine grain size were obtained for the proper choice of excess Pb content (x=010—015). EDX results showed that, in the interlayer and surface regions, the Pb deficiently and Pb abandance are obvious for the samples of x=0 and x=02, respectively. The ferroelectric, fatigue and leakage current properties of the films are not obviously relate to the change of excess Pb content (x), but correlate obviously with the crystalline behavior of PT layers. A well-saturated hysteresis loop with high remnant polarization, excellent fatigue properties and low leakage curremt were obtained for the films of excess Pb content x= 010 and 015. The excess Pb content (x) in PT layers affects the crystallization of PT layer, which will act as a nucleation site or seeding layer for PZT films and affect the perovskite phase formation of the PZT films. The optimized seed layer with excess Pb content x=010—015 improves not only the microstructure, but also the electric properties.
    • 基金项目: 国家自然科学基金重大研究计划(批准号:90407023)资助的课题.
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  • 文章访问数:  7267
  • PDF下载量:  1060
  • 被引次数: 0
出版历程
  • 收稿日期:  2007-03-04
  • 修回日期:  2007-03-20
  • 刊出日期:  2008-01-05

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