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电化学制备薄黑硅抗反射膜

刘光友 谭兴文 姚金才 王 振 熊祖洪

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电化学制备薄黑硅抗反射膜

刘光友, 谭兴文, 姚金才, 王 振, 熊祖洪

“Black silicon" antireflection thin film prepared by electrochemical etching

Liu Guang-You, Tan Xing-Wen, Yao Jin-Cai, Wang Zhen, Xiong Zu-Hong
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  • 采用计算机控制电流密度按指数规律衰减对单晶硅进行电化学腐蚀,得到了折射率随薄膜厚度连续均匀变化的抗反射膜,即黑硅样品. 这种在制取上快速、经济和工艺非常简单的样品,不仅在较宽波段范围内反射率小于5%,且整个薄膜厚度不足1μm. 利用传输矩阵方法对黑硅样品的反射谱进行模拟,得到了理论与实验符合较好的结果.
    Solar cells and optical detection devices are often covered with antireflective surfaces to enhance their performance. An economical, fast, and easily operational electrochemical etching technique has been developed to realize a continuous uniform variation in the refractive index of porous silicon layer as a function of the etching depth. By using this technique a black silicon sample was fabricated, which has a reflectance below 5% over a broad band and a thickness below 1μm. The depression mechanism of the optical reflectance is analyzed by simulating the structure with the transfer matrix method. The simulated results give a good agreement with the experimental measurements.
    • 基金项目: 教育部科学技术研究重点项目(批准号:105145),教育部新世纪优秀人才支持计划(批准号:NCET-05-0772),西南大学科技基金(批准号:SWNUB2005030)资助的课题.
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  • 文章访问数:  7620
  • PDF下载量:  2192
  • 被引次数: 0
出版历程
  • 收稿日期:  2007-03-15
  • 修回日期:  2007-05-19
  • 刊出日期:  2008-01-15

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