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溶液法铝诱导晶化制备多晶硅薄膜

罗翀 孟志国 王烁 熊绍珍

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溶液法铝诱导晶化制备多晶硅薄膜

罗翀, 孟志国, 王烁, 熊绍珍

Preparation of poly-slicon thin film by aluminum induced crystallization based on Al-salt solution

Luo Chong, Meng Zhi-Guo, Wang Shuo, Xiong Shao-Zhen
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  • 采用铝(Al)盐溶液作为诱导源进行了非晶硅晶化成多晶硅的研究.光学显微镜观测与Raman光谱分析表明,合适配比的铝盐溶液能够将非晶硅予以诱导晶化.采用剥层XPS测试分析,探究了Al盐溶液与硅表面可能的化学反应以及随之发生的硅-铝层交换的过程.最后对溶液法诱导晶化的机理进行了讨论.
    A new method to prepare polycrystalline silicon thin film from a-Si thin films using aluminate solution as induced source was introduced in this article. According to the analysis using optical microscope and Raman spectrum, it was indicated that the a-Si thin film could successfully be crystallized in certain Al-salt solutions. Using the X-ray photoelectron spectroscopy explored by shelling the samples into several sub-layers, the possible chemical reaction between the surface of silicon and aluminate solution was found and the continuous layer exchange process was confirmed. In the end, the mechanism of solution-based aluminum-induced crystallization was discussed.
    • 基金项目: 国家高技术研究发展计划(批准号:2004AA303570)和国家自然科学基金(批准号:60437030)资助的课题.
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  • 文章访问数:  6516
  • PDF下载量:  932
  • 被引次数: 0
出版历程
  • 收稿日期:  2008-06-19
  • 修回日期:  2009-03-12
  • 刊出日期:  2009-09-20

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