氢化硅薄膜光吸收近似特性研究

郭立强; 丁建宁; 杨继昌; 王书博; 叶枫; 程广贵; 凌智勇; 范慧娟; 袁宁一; 王秀琴

doi:10.7498/aps.59.8184

摘要

利用等离子体化学气相沉积系统在直流电压源和射频源的双重激励下，以康宁7059玻璃为衬底制备了氢化硅薄膜．过测定氢化硅薄膜Raman光谱，对薄膜微结构进行了表征；建立氢化硅薄膜的光吸收模型，计算出薄膜的光吸收系数和光学带隙，和实验结果基本一致，说明该模型符合实验结果；并利用该模型计算的光吸收系数和光学带隙，结合AMPS软件对设计的太阳电池结构进行了模拟，给出的I-V特性曲线变化趋势与实验结果基本符合，同时对实验结果与模拟结果存在差异的原因进行了分析，并给出合理解释．

关键词:

Abstract

Hydrogenated silicon films are prepared on Corning 7059 glass by the plasma enhanced chemical vapour deposition technique with radio frequency ( RF),power,(13.56 MHz) and DC bias. The microstructures of hydrogenated silicon films investigated by Raman spectra. The photo-absorption coefficient is calculated by utilizing an established photo-absorption model. The I-V characteristics of hydrogenated silicon film solar cells are simulated by using software AMPS. The results show that photo-absorption coefficient curves and I-V curves are both consistent well with experimental data. At the same time, the difference between experimental results are calculated results were analyzed.

Keywords:

作者及机构信息

(1)常州大学,低维材料微纳器件与系统研究中心,常州 213164; (2)常州大学,低维材料微纳器件与系统研究中心,常州 213164;常州市新能源重点实验室,常州 213164; (3)江苏大学机械工程学院,微纳米研究中心,镇江 212013; (4)江苏大学机械工程学院,微纳米研究中心,镇江 212013;常州大学,低维材料微纳器件与系统研究中心,常州 213164;常州市新能源重点实验室,常州 213164

基金项目: 青蓝工程(批准号:2008-04),常州市工业科技攻关专项(批准号:CE2008014),常州市科技平台专项(批准号:CM2008301)和江苏省科技支撑计划(批准号:BE20080030)资助的课题.

Authors and contacts

(1)Low-dimension Material Micro/Nano Device and System Center, Changzhou University, Changzhou 213164, China; (2)Low-dimension Material Micro/Nano Device and System Center, Changzhou University, Changzhou 213164, China;Key Laboratory of New Energy Engineering, Changzhou 213164, China; (3)Micro/Nano Science and Technology Center, Jiangsu University, Zhenjiang 212013, China; (4)Micro/Nano Science and Technology Center, Jiangsu University, Zhenjiang 212013, China; Low-dimension Material Micro/Nano Device and System Center, Changzhou University, Changzhou 213164, China;Key Laboratory of New Energy Engineering, Changzhou 213164, Ch

参考文献

[1]	Huang R, Lin X Y, Yu Y P, Lin K X, Yao R H, Huang W Y, Wei J H, Wang Z K, Yu C Y 2004 Acta Phys. Sin. 53 3950 (in Chinese) [黄锐、林璇英、余云鹏、林揆训、姚若河、黄文勇、魏俊红、王照奎、余楚迎 2004 物理学报 53 3950]
[2]	Han X Y, Hou G F, Wei C C, Zhang X D, Dai Z H, Li G J, Sun J, Chen X L, Zhang D K, Xue J M, Zhao Y, Geng X H 2009 Acta Phys. Sin. 58 4254 (in Chinese) [韩晓艳、侯国付、魏长春、张晓丹、戴志华、李贵君、孙建、陈新亮、张德坤、薛俊明、赵颖、耿新华 2009 物理学报 58 4254]
[3]	Wei W S 2007 Vacuum 81 857
[4]	Ledinsky M, Fekete L, Stuchlik J, Mates T, Fejfar A, Kocka J 2006 Journal of Non-Crystalline Solids 352 1209
[5]	Liao N M, Li W, Jiang Y D, Kuang Y J, Qi K C, Li S B, Wu Z M 2008 Acta Phys. Sin. 57 1542 (in Chinese)[廖乃镘、李伟、蒋亚东、匡跃军、祁康成、李世彬、吴志明 2008 物理学报 57 1542]
[6]	Zhong L Z, Zhang W J, Cui M, Wu X W, Li G H, Ding H 2005. Semiconductor Optoelectronics. 26 327 (in Chinese) [钟立志、张维佳、崔敏、吴小文、李国华、丁琨 2005 半导体光电 26 327]
[7]	Atif M A 2007 Opt. Mater. 10 1016
[8]	Lin X R, Shao T M 2001 Acta Phys. Sin. 50 856 (in Chinese)[蔺秀川、邵天敏 2001 物理学报 50 856]
[9]	Kim W, Lee J, Lee J, Ko E K, Lyou J H 2004 Appl. Phys. A 79 1813
[10]	Funde A M, Bakr N A, Kamble D K, Hawaldar R R, Jadkar S R 2008 Solar Energy Materials and Solar Cells 92 1217
[11]	Xu W L, Zhu J L 1994 J.Infrared Millim. Waves 13 391 (in Chinese) [徐文兰、诸君浩 1994 红外与毫米波学报 13 391]
[12]	Hao J B, Xia D L, Jiang H, Zhao X J 2007 Journal of Wuhan University of Technology 29 55 (in Chinese) [郝江波、夏冬林、姜宏、赵修建 2007 武汉理工大学学报 29 55]
[13]	Ge D B, Yan Y B 2002 Finite-Difference Time-Domain Method for Electromagnetic Waves (Xi’an: Xi dian University Press)p73 (in Chinese) [葛德彪、阎玉波 2002 电磁波时域有限差分方法 (西安:西安电子科技大学出版社) 第73页]
[14]	Chen C Z, Qiu S H, Liu C Q, Wu Y D, Li P, Yu C Y, Lin X Y 2009 Acta Phys. Sin. 58 2565 (in Chinese)[陈城钊、邱胜桦、刘翠青、吴燕丹、李平、余楚迎、林璇英 2009 物理学报 58 2565]
[15]	Li S B, Wu Z M, Li W, Yu J S, Jiang Y D, Liao N M 2008 Acta Phys. Sin.57 7114(in Chinese)[李世彬、吴志明、李伟、于军胜、蒋亚东、廖乃镘2008 物理学报 57 7114]
[16]	Hu Z H, Liao X B, Zeng X B, Xu Y Y, Zhang S B, Diao H W, Kong G L 2003 Acta Phys. Sin. 52 218 (in Chinese) [胡志华、廖显波、曾湘波、徐艳月、张世斌、刁宏伟、孔光临 2003 物理学报 52 218]
[17]	Wang Y, Han X Y, Ren H Z, Hou G F, Guo Q C, Zhu F, Zhang D K, Sun J, Xue J M, Zhao Y, Geng X H 2006Acta Phys. Sin. 55 947 (in Chinese)[王岩、韩晓艳、任慧志、侯国付、郭群超、朱锋、张德坤、孙建、薛俊明、赵颖、耿新华 2006 物理学报 55 947]
[18]	Wang Q 2007 Ph. D. Dissertation (Zhenjiang: Jiangsu University) (in Chinese)[王权 2007 博士学位论文 (镇江:江苏大学)]
[19]	Peng W B, Liu S Y, Xiao H B, Zhang C S, Shi M J, Zeng X B, Xu Y Y, Kong G L, Yu Y D 2009 Acta Phys. Sin. 58 5716(in Chinese)[彭文博、刘石勇、肖海波、张长沙、石明吉、曾湘波、徐艳月、孔光临、俞育德 2009 物理学报 58 5716]
[20]	Zhu X H, Chen G H, Zhang W L, Ding Y, Ma Z J, Hu Y H, He B, Rong Y D 2005 Chin.Phys. 14 1009
[21]	Hu Z H, Liao X B, Diao H W, Xia C F, Xu L, Zeng X B, Hao H Y, Kong G L 2005 Acta Phys. Sin. 54 2302(in Chinese)[胡志华、廖显波、刁宏伟、夏朝凤、许玲、曾湘波、郝会颖、孔光临 2005 物理学报 54 2302]
[22]	Shim J H, Im S, Cho N H 2004 Appl. Surf. Sci. 234 268

施引文献

[1]	Huang R, Lin X Y, Yu Y P, Lin K X, Yao R H, Huang W Y, Wei J H, Wang Z K, Yu C Y 2004 Acta Phys. Sin. 53 3950 (in Chinese) [黄锐、林璇英、余云鹏、林揆训、姚若河、黄文勇、魏俊红、王照奎、余楚迎 2004 物理学报 53 3950]
[2]	Han X Y, Hou G F, Wei C C, Zhang X D, Dai Z H, Li G J, Sun J, Chen X L, Zhang D K, Xue J M, Zhao Y, Geng X H 2009 Acta Phys. Sin. 58 4254 (in Chinese) [韩晓艳、侯国付、魏长春、张晓丹、戴志华、李贵君、孙建、陈新亮、张德坤、薛俊明、赵颖、耿新华 2009 物理学报 58 4254]
[3]	Wei W S 2007 Vacuum 81 857
[4]	Ledinsky M, Fekete L, Stuchlik J, Mates T, Fejfar A, Kocka J 2006 Journal of Non-Crystalline Solids 352 1209
[5]	Liao N M, Li W, Jiang Y D, Kuang Y J, Qi K C, Li S B, Wu Z M 2008 Acta Phys. Sin. 57 1542 (in Chinese)[廖乃镘、李伟、蒋亚东、匡跃军、祁康成、李世彬、吴志明 2008 物理学报 57 1542]
[6]	Zhong L Z, Zhang W J, Cui M, Wu X W, Li G H, Ding H 2005. Semiconductor Optoelectronics. 26 327 (in Chinese) [钟立志、张维佳、崔敏、吴小文、李国华、丁琨 2005 半导体光电 26 327]
[7]	Atif M A 2007 Opt. Mater. 10 1016
[8]	Lin X R, Shao T M 2001 Acta Phys. Sin. 50 856 (in Chinese)[蔺秀川、邵天敏 2001 物理学报 50 856]
[9]	Kim W, Lee J, Lee J, Ko E K, Lyou J H 2004 Appl. Phys. A 79 1813
[10]	Funde A M, Bakr N A, Kamble D K, Hawaldar R R, Jadkar S R 2008 Solar Energy Materials and Solar Cells 92 1217
[11]	Xu W L, Zhu J L 1994 J.Infrared Millim. Waves 13 391 (in Chinese) [徐文兰、诸君浩 1994 红外与毫米波学报 13 391]
[12]	Hao J B, Xia D L, Jiang H, Zhao X J 2007 Journal of Wuhan University of Technology 29 55 (in Chinese) [郝江波、夏冬林、姜宏、赵修建 2007 武汉理工大学学报 29 55]
[13]	Ge D B, Yan Y B 2002 Finite-Difference Time-Domain Method for Electromagnetic Waves (Xi’an: Xi dian University Press)p73 (in Chinese) [葛德彪、阎玉波 2002 电磁波时域有限差分方法 (西安:西安电子科技大学出版社) 第73页]
[14]	Chen C Z, Qiu S H, Liu C Q, Wu Y D, Li P, Yu C Y, Lin X Y 2009 Acta Phys. Sin. 58 2565 (in Chinese)[陈城钊、邱胜桦、刘翠青、吴燕丹、李平、余楚迎、林璇英 2009 物理学报 58 2565]
[15]	Li S B, Wu Z M, Li W, Yu J S, Jiang Y D, Liao N M 2008 Acta Phys. Sin.57 7114(in Chinese)[李世彬、吴志明、李伟、于军胜、蒋亚东、廖乃镘2008 物理学报 57 7114]
[16]	Hu Z H, Liao X B, Zeng X B, Xu Y Y, Zhang S B, Diao H W, Kong G L 2003 Acta Phys. Sin. 52 218 (in Chinese) [胡志华、廖显波、曾湘波、徐艳月、张世斌、刁宏伟、孔光临 2003 物理学报 52 218]
[17]	Wang Y, Han X Y, Ren H Z, Hou G F, Guo Q C, Zhu F, Zhang D K, Sun J, Xue J M, Zhao Y, Geng X H 2006Acta Phys. Sin. 55 947 (in Chinese)[王岩、韩晓艳、任慧志、侯国付、郭群超、朱锋、张德坤、孙建、薛俊明、赵颖、耿新华 2006 物理学报 55 947]
[18]	Wang Q 2007 Ph. D. Dissertation (Zhenjiang: Jiangsu University) (in Chinese)[王权 2007 博士学位论文 (镇江:江苏大学)]
[19]	Peng W B, Liu S Y, Xiao H B, Zhang C S, Shi M J, Zeng X B, Xu Y Y, Kong G L, Yu Y D 2009 Acta Phys. Sin. 58 5716(in Chinese)[彭文博、刘石勇、肖海波、张长沙、石明吉、曾湘波、徐艳月、孔光临、俞育德 2009 物理学报 58 5716]
[20]	Zhu X H, Chen G H, Zhang W L, Ding Y, Ma Z J, Hu Y H, He B, Rong Y D 2005 Chin.Phys. 14 1009
[21]	Hu Z H, Liao X B, Diao H W, Xia C F, Xu L, Zeng X B, Hao H Y, Kong G L 2005 Acta Phys. Sin. 54 2302(in Chinese)[胡志华、廖显波、刁宏伟、夏朝凤、许玲、曾湘波、郝会颖、孔光临 2005 物理学报 54 2302]
[22]	Shim J H, Im S, Cho N H 2004 Appl. Surf. Sci. 234 268

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