单室沉积高效非晶硅/微晶硅叠层太阳电池的研究

张晓丹; 郑新霞; 王光红; 许盛之; 岳强; 林泉; 魏长春; 孙建; 张德坤; 熊绍珍; 耿新华; 赵颖

doi:10.7498/aps.59.8231

摘要

采用甚高频等离子体增强化学气相沉积技术,在前期单室沉积的微晶硅薄膜太阳电池和非晶硅/微晶硅叠层太阳电池研究的基础上,通过对微晶硅底电池本征层硅烷浓度的优化,获得了初始效率达到11.02%(电池面积1.0 cm2)的非晶硅/微晶硅叠层太阳电池.同时,100 cm2的非晶硅/微晶硅叠层太阳电池的组件效率也达到了9.04%.

关键词:

Based on the previous research on the deposition of amorphous/microcrystalline (micromorph) silicon tandem solar cells, silane concentration for the deposition of microcrystalline bottom cell is selected to further optimize the performance for micromorph tandem solar cells by using very high frequency technique. Finally, micromorph silicon tandem solar cell with 11.02% (Area=1.0cm2) initial conversion efficiency is fabricated at a certain silane concentration, and it has a structure suitable for trapping light. Furthermore, 100cm2 micromorph module with 9.04% initial conversion efficiency is also successfully obtained.

Keywords:

amorphous/microcrystalline silicon tandem solar cells /
single chamber /
very high frequency

作者及机构信息

1.
南开大学光电子薄膜器件与技术研究所,光电子薄膜器件与技术天津市重点实验室天津,300071

基金项目: 国家高技术研究发展计划(批准号:2007AA05Z436, 2009AA050602),天津科技支撑项目(批准号:08ZCKFGX03500),国家重点基础研究发展计划 (批准号:2006CB202602,2006CB202603),国家自然科学基金(批准号:60976051),科技部国际合作重点项目(批准号:2006DFA62390,2009DFA62580)和教育部新世纪人才(批准号:NCET-08-0295)资助的课题.

Authors and contacts

1.
Institute of Photo-electronic Thin Film Devices and Technology of Nankai University, Key Laboratory of Photo-Electronic Thin Film Devices and Technology of Tianjin, Tianjin 300071, China

参考文献

[1]	Yamamoto K, Nakajima A, Yoshimi M, Sawada T, Fukuda S, Suezaki T, Ichikawa M, Koi Y, Goto M, Meguro T, Matsuda T, Kondo M, Sasaki T, Tawada Y 2004 Solar Energy 77 939
[2]	Shah A V, Meier J, Vallat-Sayvain E, Wyrsch N, Kroll U, Droz C, Graf U 2003 Solar Energy and Solar Cells 78 469
[3]	Zhang X D, Zhao Y, Gao Y T, Zhu F, Wei C C, Chen X L, Sun J, Hou G F, Geng X H, Xiong S Z 2006 Journal of Non-Crystalline Solids 352 1863
[4]	Meier J, Kroll U, Spitznagel J, Benagli S, Androutsopoulos G, Monteduro G, Borello D, Hügli A, Roschek T, Zimin D, Stein W, Springer J, Kluth O, Ellert Ch, Zindel A, Büchel G, Büchel A, Koch D, Feitknecht L, Bucher C, Freitas F 2006 Conference Record of the 2006 IEEE 4th Confenrence on Photovoltaic Energy Conversion Volumo 2 1720
[5]	Repmann T, Appenzeller W, Sehrbrock B, Stiebig H, Rech B 2004 Proceedings of the 19th European Photovoltaic Solar Energy Conference 1334
[6]	Li Yuan-Min, Anna Selvan J A, Foustotchenko A, Li Liwei, Delahoy A E 2005 Photovoltaic Specialists Conference, Conference Record of the Thirty-first IEEE 1 1420
[7]	Yamamoto K, Nakajima A, Yoshimi M, Sawada T, Fukuda S, Suezaki T, Ichikawa M, Koi Y, Goto M, Megruo T, Matsuda T, Sasaki T, Tawada Y 2006 Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference 2 1489
[8]	Zhang X D, Zhao Y, Gao Y T, Chen F, Zhu F, Wei C C, Sun J, Geng X H, Xiong S Z 2006 Acta Phys. Sin. 55 6697 (in Chinese) [张晓丹、赵颖、高艳涛、陈飞、朱锋、魏长春、孙建、耿新华、熊绍珍 2006 物理学报 55 6697]
[9]	Zhao Y, Zhang X D, Zhu F, Gao Y T, Wei C C, Xue J M, Ren H Z, Zhang D K, Hou G F, Sun J, Geng X H 2005 15th International Photovoltaic Science and Engineering Conference (PVSEC-15) Shanghai China 65-67
[10]	Zhang X D, Sun F H, Wang G H, Xu S Z, Wei C C, Hou G F, Sun J, Xiong S Z, Geng X H, Zhao Y 2009 23rd ICANS, Utrecht Netherland, ID 53
[11]	Wang G H, Zhang X D, Xu S Z, Wei C C, Sun J, Xiong S Z, Geng X H, Zhao Y 2009 23rd ICANS, Utrecht Netherland, ID 503

施引文献

[1]	Yamamoto K, Nakajima A, Yoshimi M, Sawada T, Fukuda S, Suezaki T, Ichikawa M, Koi Y, Goto M, Meguro T, Matsuda T, Kondo M, Sasaki T, Tawada Y 2004 Solar Energy 77 939
[2]	Shah A V, Meier J, Vallat-Sayvain E, Wyrsch N, Kroll U, Droz C, Graf U 2003 Solar Energy and Solar Cells 78 469
[3]	Zhang X D, Zhao Y, Gao Y T, Zhu F, Wei C C, Chen X L, Sun J, Hou G F, Geng X H, Xiong S Z 2006 Journal of Non-Crystalline Solids 352 1863
[4]	Meier J, Kroll U, Spitznagel J, Benagli S, Androutsopoulos G, Monteduro G, Borello D, Hügli A, Roschek T, Zimin D, Stein W, Springer J, Kluth O, Ellert Ch, Zindel A, Büchel G, Büchel A, Koch D, Feitknecht L, Bucher C, Freitas F 2006 Conference Record of the 2006 IEEE 4th Confenrence on Photovoltaic Energy Conversion Volumo 2 1720
[5]	Repmann T, Appenzeller W, Sehrbrock B, Stiebig H, Rech B 2004 Proceedings of the 19th European Photovoltaic Solar Energy Conference 1334
[6]	Li Yuan-Min, Anna Selvan J A, Foustotchenko A, Li Liwei, Delahoy A E 2005 Photovoltaic Specialists Conference, Conference Record of the Thirty-first IEEE 1 1420
[7]	Yamamoto K, Nakajima A, Yoshimi M, Sawada T, Fukuda S, Suezaki T, Ichikawa M, Koi Y, Goto M, Megruo T, Matsuda T, Sasaki T, Tawada Y 2006 Photovoltaic Energy Conversion, Conference Record of the 2006 IEEE 4th World Conference 2 1489
[8]	Zhang X D, Zhao Y, Gao Y T, Chen F, Zhu F, Wei C C, Sun J, Geng X H, Xiong S Z 2006 Acta Phys. Sin. 55 6697 (in Chinese) [张晓丹、赵颖、高艳涛、陈飞、朱锋、魏长春、孙建、耿新华、熊绍珍 2006 物理学报 55 6697]
[9]	Zhao Y, Zhang X D, Zhu F, Gao Y T, Wei C C, Xue J M, Ren H Z, Zhang D K, Hou G F, Sun J, Geng X H 2005 15th International Photovoltaic Science and Engineering Conference (PVSEC-15) Shanghai China 65-67
[10]	Zhang X D, Sun F H, Wang G H, Xu S Z, Wei C C, Hou G F, Sun J, Xiong S Z, Geng X H, Zhao Y 2009 23rd ICANS, Utrecht Netherland, ID 53
[11]	Wang G H, Zhang X D, Xu S Z, Wei C C, Sun J, Xiong S Z, Geng X H, Zhao Y 2009 23rd ICANS, Utrecht Netherland, ID 503

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板