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三环位相型光瞳滤波器的横向超分辨与轴向焦深扩展

王伟 周常河 余俊杰

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三环位相型光瞳滤波器的横向超分辨与轴向焦深扩展

王伟, 周常河, 余俊杰

Transverse superresolution and extended axial focal depth realized by three-zone annular phase pupil filter

Zhou Chang-He, Yu Jun-Jie, Wang Wei
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  • 用矢量衍射方法分析了线偏振光入射到带有三环位相型光瞳滤波器的高数值孔径物镜时,焦点的轴向和横向光强分布.数值模拟结果表明,高数值孔径物镜聚焦时需同时考虑光强的轴向和横向分布.通过加入三环位相光瞳滤波器,在实现横向超分辨的同时实现了光学系统轴向焦深扩展和轴向光强分布平坦化,并且位相调制深度变化时,会出现轴向焦移现象.对三环位相光瞳滤波器结构进行了优化,得出了优化结果.
    When linearly polarized light is focused using a high numerical aperture lens with three-zone annular phase pupil filter, vector diffraction method was applied to study the optical intensity distribution in transverse and axial directions. Numerical simulation results show that optical intensity distribution in transverse and axial directions need to be treated simultaneously. When three-zone annular phase pupil filter is added in front of a high numerical aperture lens, transverse super resolution, extended axial focal depth and flat-top focusing can be achieved at the same time. Furthermore, When phase modulation depth is changed, the phenomenon of axial focal shift can be found. The structure of three-zone annular phase pupil filter was optimized and the optimized results were given.
    • 基金项目: 安徽工业大学青年教师科研基金(批准号:QZ201017)资助的课题.
    [1]

    Rios S, López D 2009 Opt. Exp. 17 9669

    [2]

    Mico V, Zalevsky Z, Garcia J 2008 Opt. Comm. 281 4273

    [3]

    Zhao W Q, Chen S S, Feng Z D 2006 Acta Phys. Sin. 55 3363(in Chinese) [赵维谦、陈珊珊、冯政德 2006 物理学报 55 3363]

    [4]

    Shen Q H, Xu D Y, Qi G S, Hu H, Liu R 2005 Acta Phys.Sin. 54 4718 (in Chinese) [沈全洪、徐端颐、齐国生、胡 恒、刘 嵘 2005 物理学报 54 4718]

    [5]

    Lopez C I, Saavedra G, Boyei G 2005 Opt. Exp. 13 6168

    [6]

    Canales V F, de Juana D M, Cagigal M P 2004 Opt. Lett. 29 935

    [7]

    di Francia G T 1952 Naovo Cimento Sappl. 9 426

    [8]

    de Juana D M, Canales V F, Valle P J, Cagigal M P 2004 Opt. Comm. 229 71

    [9]

    Luo X H, Zhou C H 2004 Appl. Opt. 43 6242

    [10]

    Liu H T, Yan Y B, Jin G F 2006 Appl. Opt. 45 95

    [11]

    Yun M J, Wan Y, Kong W J, Wang M, Liu J H, Liang W 2008 Acta Phys. Sin. 57 194(in Chinese) [云茂金、万 勇、孔伟金、王 美、刘俊海、梁 伟 2008 物理学报 57 194]

    [12]

    Feng D, Ou P, Feng L S, Hu S L, Zhang C X 2008 Opt. Express. 16 20968

    [13]

    Zhan Q W, Leger J R 2002 Opt. Express 10 324

    [14]

    Sales T R M, Morris G M 1997 J.Opt.Soc.Am. A 14 1637

    [15]

    Richards B, Wolf E 1959 Proc. Royal Soc. A 253 358

    [16]

    Martinez C M, Martinez C R, Escobar I, Saavefra G 2004 Appl. Phys. Lett 85 4319

    [17]

    Jabhour T G, Kuebler S M 2006 Opt. Express 14 1033

    [18]

    Yun M J, Lee E H 2008 J. Mod. Opt. 55 2857

  • [1]

    Rios S, López D 2009 Opt. Exp. 17 9669

    [2]

    Mico V, Zalevsky Z, Garcia J 2008 Opt. Comm. 281 4273

    [3]

    Zhao W Q, Chen S S, Feng Z D 2006 Acta Phys. Sin. 55 3363(in Chinese) [赵维谦、陈珊珊、冯政德 2006 物理学报 55 3363]

    [4]

    Shen Q H, Xu D Y, Qi G S, Hu H, Liu R 2005 Acta Phys.Sin. 54 4718 (in Chinese) [沈全洪、徐端颐、齐国生、胡 恒、刘 嵘 2005 物理学报 54 4718]

    [5]

    Lopez C I, Saavedra G, Boyei G 2005 Opt. Exp. 13 6168

    [6]

    Canales V F, de Juana D M, Cagigal M P 2004 Opt. Lett. 29 935

    [7]

    di Francia G T 1952 Naovo Cimento Sappl. 9 426

    [8]

    de Juana D M, Canales V F, Valle P J, Cagigal M P 2004 Opt. Comm. 229 71

    [9]

    Luo X H, Zhou C H 2004 Appl. Opt. 43 6242

    [10]

    Liu H T, Yan Y B, Jin G F 2006 Appl. Opt. 45 95

    [11]

    Yun M J, Wan Y, Kong W J, Wang M, Liu J H, Liang W 2008 Acta Phys. Sin. 57 194(in Chinese) [云茂金、万 勇、孔伟金、王 美、刘俊海、梁 伟 2008 物理学报 57 194]

    [12]

    Feng D, Ou P, Feng L S, Hu S L, Zhang C X 2008 Opt. Express. 16 20968

    [13]

    Zhan Q W, Leger J R 2002 Opt. Express 10 324

    [14]

    Sales T R M, Morris G M 1997 J.Opt.Soc.Am. A 14 1637

    [15]

    Richards B, Wolf E 1959 Proc. Royal Soc. A 253 358

    [16]

    Martinez C M, Martinez C R, Escobar I, Saavefra G 2004 Appl. Phys. Lett 85 4319

    [17]

    Jabhour T G, Kuebler S M 2006 Opt. Express 14 1033

    [18]

    Yun M J, Lee E H 2008 J. Mod. Opt. 55 2857

计量
  • 文章访问数:  8372
  • PDF下载量:  806
  • 被引次数: 0
出版历程
  • 收稿日期:  2010-01-26
  • 修回日期:  2010-04-19
  • 刊出日期:  2011-01-05

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