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针对半导体器件中普遍存在的1/f噪声提出了一种结合了提升小波变换和维纳滤波器的处理方法.首先利用重新加权迭代最小二乘法拟合1/f噪声的功率谱曲线得到噪声参数的估计,从而选择恰当的小波.其次,对包含了1/f噪声的信号进行提升小波变换.考虑到小波变换对1/f噪声的白化作用,利用维纳滤波器对每一层小波系数进行处理.设计了最优全通滤波器以校正维纳滤波器的相频特性,使得小波系数经滤波后相位不变.最后利用提升小波逆变换获得被1/f噪声淹没的信号.利用实验检验了提出方法的有效性,实验数据采自用于微创外科手术机器人的力传感器.结果表明提出的方法能够有效抑制1/f噪声,并使传感器的分辨力提高了25%.In order to reduce universal 1/f noise in semiconductor devices, a method with combining lifting wavelet transform and Wiener filter is presented. Firstly, the iteratively reweighted least square method is introduced to fit the power spectrum of 1/f noise and estimate its parameter, and then an appropriate wavelet can be selected. Secondly, the signal with 1/f noise is decomposed by lifting wavelet transform. Considering the fact that the wavelet transform whitens 1/f noise, Wiener filter is used to treat the wavelet coefficient of each layer. Allpass filter is optimized to adjust the phase frequency response of Wiener filter, and the phase of filtered wavelet coefficient is not changed. Finally, the useful signal embedded in 1/f noise is retrieved by the inverse lifting wavelet transform. Experimental study demonstrates the proposed procedure and verifies its effectiveness, and the experimental data are acquired from a force sensor developed for minimally invasive surgery robot. The results show that the method works very well in minimizing 1/f noise, and so the resolution of the sensor increases 25%.
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Keywords:
- semiconductor devices /
- 1/f noise /
- lifting wavelet transform /
- Wiener filter
[1] Zhang Z G, Guo S X, Gao F L, Yu S Y, Li X Y 2009 Acta Phys. Sin. 58 2772 (in Chinese)[张振国、郭树旭、郜峰利、于思瑶、李雪妍 2009 物理学报 58 2772]
[2] Bao J L, Zhuang Y Q, Du L, Li W H, Wan C X, Zhang P 2005 Acta Phys. Sin. 54 2118 (in Chinese)[包军林、庄奕琪、杜 磊、李伟华、万长兴、张 萍 2005 物理学报 54 2118]
[3] Liu Y A, Du L, Bao J L 2008 Acta Phys. Sin. 57 2468 (in Chinese)[刘宇安、杜 磊、包军林 2008 物理学报 57 2468]
[4] Lin L Y, Du L, Bao J L, He L 2011 Acta Phys. Sin. 60 047202 (in Chinese)[林丽艳、杜 磊、包军林、何 亮 2011 物理学报 60 047202]
[5] Zhuang Y Q,Sun Q 1993 Noise and its Minimizing Technology in Semiconductor Devices ( Beijing: National Defense Industry Press ) pp80-128 ( in Chinese) [庄奕琪、孙 青 1993 半导体器件中的噪声及其低噪声化技术(北京: 国防工业出版社) 第 80-128页]
[6] Tewfik A H, Kim M 1992 IEEE Trans. Inform. Theory 38 904
[7] Ninness B 1998 IEEE Trans. Inform. Theory 44 32
[8] Atto A M, Pastor D, Mercier G 2010 IEEE Trans. Inform. Theory 56 4741
[9] Jabr R A 2006 Int. J. Elec. Power 28 86
[10] Fomenko I, Durst M, Balaban D 2006 Comput. Meth. Prog. Bio. 82 31
[11] Hund E, Massart D L, Smeyers-Verbeke J 2002 Anal. Chim. Acta 463 53
[12] Sweldens W 1996 Appl. Comput. Harmon. A 3 186
[13] Sweldens W 1998 SIAM J. Math. Anal. 29 511
[14] Zhao Z H, Zhang Y H, Jiang H 2002 J. Shanghai Jiaotong Univ. 36 1037 (in Chinese)[赵忠华、张炎华、江 红 2002 上海交通大学学报 36 1037]
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[1] Zhang Z G, Guo S X, Gao F L, Yu S Y, Li X Y 2009 Acta Phys. Sin. 58 2772 (in Chinese)[张振国、郭树旭、郜峰利、于思瑶、李雪妍 2009 物理学报 58 2772]
[2] Bao J L, Zhuang Y Q, Du L, Li W H, Wan C X, Zhang P 2005 Acta Phys. Sin. 54 2118 (in Chinese)[包军林、庄奕琪、杜 磊、李伟华、万长兴、张 萍 2005 物理学报 54 2118]
[3] Liu Y A, Du L, Bao J L 2008 Acta Phys. Sin. 57 2468 (in Chinese)[刘宇安、杜 磊、包军林 2008 物理学报 57 2468]
[4] Lin L Y, Du L, Bao J L, He L 2011 Acta Phys. Sin. 60 047202 (in Chinese)[林丽艳、杜 磊、包军林、何 亮 2011 物理学报 60 047202]
[5] Zhuang Y Q,Sun Q 1993 Noise and its Minimizing Technology in Semiconductor Devices ( Beijing: National Defense Industry Press ) pp80-128 ( in Chinese) [庄奕琪、孙 青 1993 半导体器件中的噪声及其低噪声化技术(北京: 国防工业出版社) 第 80-128页]
[6] Tewfik A H, Kim M 1992 IEEE Trans. Inform. Theory 38 904
[7] Ninness B 1998 IEEE Trans. Inform. Theory 44 32
[8] Atto A M, Pastor D, Mercier G 2010 IEEE Trans. Inform. Theory 56 4741
[9] Jabr R A 2006 Int. J. Elec. Power 28 86
[10] Fomenko I, Durst M, Balaban D 2006 Comput. Meth. Prog. Bio. 82 31
[11] Hund E, Massart D L, Smeyers-Verbeke J 2002 Anal. Chim. Acta 463 53
[12] Sweldens W 1996 Appl. Comput. Harmon. A 3 186
[13] Sweldens W 1998 SIAM J. Math. Anal. 29 511
[14] Zhao Z H, Zhang Y H, Jiang H 2002 J. Shanghai Jiaotong Univ. 36 1037 (in Chinese)[赵忠华、张炎华、江 红 2002 上海交通大学学报 36 1037]
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