序进应力在线加速退化模型研究

郭春生; 万宁; 马卫东; 熊聪; 张光沉; 冯士维

doi:10.7498/aps.60.128501

摘要

针对线下参数退化模型由于温度冲击而引入误差的问题,基于在线序进应力加速退化实验,建立了在线参数退化模型,提高了以参数变化为计算基础的参数退化模型的准确性.并以3CG120型高频晶体管为例,在150230 ℃范围内进行了在线序进应力加速实验.利用建立的在线参数退化模型,得到3CG120型高频晶体管的寿命误差为6.5%,比线下参数退化模型的误差(23.2%)要小.

关键词:

An online degradation model is presented, in which is avoided the error in parameter degradation accelerated test, which is caused by temperature shock during parameter measurement. Through the measurement with avoiding the error parameter, the parameter degradation model can be more accurate. To demonstrate the application of the method, a kind of mature product, 3CG120, is tested in a temperature range of 150230 ℃ under online process-stress. Then the error of lifetime is obtained by utilizing the online model to be about 6.5%, much less than that of the old model (23.2%).

Keywords:

作者及机构信息

1.
北京工业大学电子信息与控制工程学院,北京 100124

Authors and contacts

1.
College of Electronic Information and Control Engineering, Beijng University of Technology, Beijing 100124, China

参考文献

[1]	Grillot P N, Krames M R, Zhao H, Teoh S H 2006 IEEE Trans. Dev. Mater. Rel. 6 564
[2]	Huang J S 2005 IEEE Trans. Dev. Mater. Rel. 5 150
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[16]	Guo C S, Shan N N, Feng S W, Ma W D 2010 Acta Phys. Sin. 59 2350 (in Chinese) [郭春生、单尼娜、冯士维、马卫东 2010 物理学报 59 2350]
[17]

施引文献

[1]	Grillot P N, Krames M R, Zhao H, Teoh S H 2006 IEEE Trans. Dev. Mater. Rel. 6 564
[2]	Huang J S 2005 IEEE Trans. Dev. Mater. Rel. 5 150
[3]
[4]	Meneghini M, Trevisanello L R, Zehnder U 2007 IEEE Trans. Electron Dev. 54 3245
[5]
[6]
[7]	Zhao J Y, Liu F, Sun Q, Zhou J L 2005 Acta Electron. Sin. 33 378 (in Chinese)[赵建印、刘芳、孙权、周经伦 2005 电子学报 33 378]
[8]
[9]	Huang J S 2006 IEEE Trans. Dev. Mater. Rel. 6 46
[10]
[11]	Pasco R W, Schwarz J A 1983 Solid-State Electron. 26 445
[12]	Li Z G, Song Z C, Sun D P 2003 Chin. J. Semicond. 24 856 (in Chinese)[李志国、宋增超、孙大鹏 2003 半导体学报 24 856]
[13]
[14]	Luan S Z, Liu H X, Jia R X 2008 Acta Phys. Sin. 57 2524 (in Chinese) [栾苏珍、刘红侠、贾仁需 2008 物理学报 57 2524]
[15]
[16]	Guo C S, Shan N N, Feng S W, Ma W D 2010 Acta Phys. Sin. 59 2350 (in Chinese) [郭春生、单尼娜、冯士维、马卫东 2010 物理学报 59 2350]
[17]

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