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基于标量衍射理论讨论了软X射线自支撑闪耀透射光栅的特性并设计了光栅的结构参数. 采用全息光刻和湿法腐蚀技术, 成功制作了周期1 m、占空比0.10.2、高宽比约100、栅线厚度10 m、 有效面积比为65%的自支撑闪耀透射光栅. 单元尺寸为15mm 15mm的硅绝缘体上含有四个5 mm 5 mm的自支撑闪耀透射光栅窗口. 在国家同步辐射实验室检测了该光栅在550 nm波长范围内的衍射效率. 波长扫描测量结果表明, 闪耀效应明显地发生在类似镜面的光栅侧壁镜面反射方向上, 闪耀级次位置及其特征与标量理论预测的一致. 衍射效率的实测结果基本与理论模拟符合, 只是因光栅结构上的缺陷致使衍射效率偏低, 峰值只有理论值的3849%. 实验结果证明了闪耀透射光栅的概念和湿法制作工艺的可行性.The performance prediction of freestanding blazed transmission grating is discussed using scalar diffraction theory, and grating design parameters are accodingly given. A freestanding transmission grating with a period of 1 m, duty cycle of 0.10.2, aspect ratio of about 100, thickness of 10 m and fractional area of 65% is successfully fabricated by holographic lithography and anisotropic wet etching. The size of a single die is 15 mm 15 mm divided into four 5 mm 5 mm windows. The diffraction efficiency of the fabricated grating is tested at the National Synchrotron Radiation Laboratory in a wavelength region of 550 nm. The wavelength scanning results show a strong blazing effect in the direction of specular reflection from mirror-like grating sidewalls, as expected. The measured and normalized diffraction efficiency is consistent with the theoretical prediction within 38%49% due to grating structural imperfections. These experimental results prove not only the concept of blazed transmission grating but also practicability of the fabrication process.
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Keywords:
- freestanding transmission grating /
- blazing effect /
- holographic lithography /
- anisotropic wet etching
[1] Tananbaum HD,White J A,Bookbinder J A 1999 SPIE 3765 62
[2] McEntaffer R L, Cash W, Shipley A 2002 SPIE 4851 549
[3] McEntaffer R L, Osterman S, Cash W 2004 SPIE 5168 492
[4] McEntaffer R L, Cash W, Shipley A 2008 SPIE 7011 701107
[5] Flanagan K, Ahn M, Daivis J 2007 SPIE 6688 66880Y
[6] Heilmann R K, Ahn M, Bautz M W 2009 SPIE 7437 74370G
[7] Heilmann R K, Daivis J, Dewey D 2010 SPIE 7732 77321J
[8] Moharam M G, Grann E B, Pommet D A 1995 J. Opt. Soc. Am. A 121 68
[9] Ahn M, Heilmann R K, Schattenburg M L 2007 J.Vac. Technol. B 25 2593
[10] Ahn M, Heilmann R K, Schattenburg M L 2008 J. Vac. Technol. B 26 2179
[11] Qiu KQ, Xu X D, Liu Y 2008 Acta Phys. Sin. 57 6329 (in Chinese) [邱克强, 徐向东, 刘颖 2008 物理学报 57 6329]
[12] Heilmann R K, Ahn M, Gullikson E M 2008 Optics Express 16 8658
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[1] Tananbaum HD,White J A,Bookbinder J A 1999 SPIE 3765 62
[2] McEntaffer R L, Cash W, Shipley A 2002 SPIE 4851 549
[3] McEntaffer R L, Osterman S, Cash W 2004 SPIE 5168 492
[4] McEntaffer R L, Cash W, Shipley A 2008 SPIE 7011 701107
[5] Flanagan K, Ahn M, Daivis J 2007 SPIE 6688 66880Y
[6] Heilmann R K, Ahn M, Bautz M W 2009 SPIE 7437 74370G
[7] Heilmann R K, Daivis J, Dewey D 2010 SPIE 7732 77321J
[8] Moharam M G, Grann E B, Pommet D A 1995 J. Opt. Soc. Am. A 121 68
[9] Ahn M, Heilmann R K, Schattenburg M L 2007 J.Vac. Technol. B 25 2593
[10] Ahn M, Heilmann R K, Schattenburg M L 2008 J. Vac. Technol. B 26 2179
[11] Qiu KQ, Xu X D, Liu Y 2008 Acta Phys. Sin. 57 6329 (in Chinese) [邱克强, 徐向东, 刘颖 2008 物理学报 57 6329]
[12] Heilmann R K, Ahn M, Gullikson E M 2008 Optics Express 16 8658
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