CO2激光光栅式扫描修复熔石英表面缺陷的实验研究与数值模拟

蒋勇; 贺少勃; 袁晓东; 王海军; 廖威; 吕海兵; 刘春明; 向霞; 邱荣; 杨永佳; 郑万国; 祖小涛

doi:10.7498/aps.63.068105

摘要

基于熔石英材料对波长为10.6 μm的CO2激光具有强吸收作用这一特点，提出采用CO2激光光栅式多次扫描修复熔石英光学元件表面密集分布的划痕和抛光点等缺陷的方法. 实验结果表明，在合理的扫描参数下，元件表面的划痕和抛光点等缺陷可被充分地消除. 损伤阈值测试结果表明，表面划痕和抛光点等缺陷被完全消除的元件的损伤阈值可回复到或超过基底的损伤阈值. 同时结合有限元软件Ansys的模拟结果分析了CO2激光扫描修复及消除元件表面划痕和抛光点等缺陷的过程. 本文为消除元件表面划痕和抛光点等缺陷提供了非常有意义的参考.

关键词:

Abstract

Based on the fact that fused silica material can strongly absorb 10.6 μm CO2 laser, a method of using CO2 laser multi-time raster scanning to repair the densely distributed scratches and polishing pits is investigated. The experimental results indicate that the scratches and polishing pits can be fully eliminated under the appropriate parameters. The damage threshold testing results also indicate that the damage threshold for fully eliminating scratches and polishing pits can reach or exceed the damage threshold of substrate. Meanwhile, Combining the simulation results obtained by finite element software-Ansys, the processes of the scratches and polishing pits eliminated by CO2 laser are analyzed. The present work is of significance for the study on how to eliminate the scratches and polishing pits on the surface of component.

Keywords:

作者及机构信息

1.
西南科技大学-中国工程物理研究院激光聚变研究中心极端条件物质特性联合实验室, 绵阳 621010;

2.
中国工程物理研究院激光聚变研究中心, 绵阳 621900;

3.
电子科技大学物理电子学院, 成都 610054

基金项目: 西南科技大学博士基金（批准号：13zx7120）和国家自然科学基金-中国工程物理研究院联合基金（批准号：10976025，11076008）资助的课题.

Authors and contacts

1.
Joint Laboratory for Extreme Conditions Matter Properties, Southwest University of Science and Technology and Research Center of Laser Fusion, Mianyang 621010, China;

2.
Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang 621900, China;

3.
School of Physical Electronics, University of Electronic Science and Technology of China, Chengdu 610054, China

Funds: Project supported by Ph. D. Research Fund of Southwest University of Science and Technology (Grant No. 13zx7120) and the Joint Fund of the National Natural Science Foundation of China and the China Academy of Engineering Physics (Grant Nos. 10976025, 11076008).

参考文献

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[2]	Liu H J, Zhou X D, Huang J, Wang F R, Jiang X D, Huang J, Wu W D, Zheng W G 2011 Acta Phys. Sin. 60 065202 (in Chinese) [刘红婕, 周信达, 黄进, 王凤蕊, 蒋晓东, 黄竞, 吴卫东, 郑万国 2011 物理学报 60 065202]
[3]	Bouchut P, Garrec P, Pelle C 2003 Proc. of SPIE 4932 103
[4]	Wang F R, Huang J, Liu H J, Zhou X D, Jiang X D, Wu W D, Zheng W G 2010 Acta Phys. Sin 59 5122 (in Chinese) [王凤蕊, 黄进, 刘红婕, 周信达, 蒋晓东, 吴卫东, 郑万国 2010 物理学报 59 5122]
[5]	Hrubesh L W, Norton M A, Molander W A, Donohue E E, Maricle S M, Penetrante B M, Brusasco R M, Grundler W, Butler J A, Carr J W, Hill R M, Summers L J, Feit M D, Rubenchik A, Key M H, Wegner P J, Burnham A K, Hackel L A, Kozlowski M R 2002 Proc. of SPIE 4679 23
[6]	Brusasco R M, Penetrante B M, Butler J A, Hrubesh L W 2001 Proc. of SPIE 4679 40
[7]	Guss G, Bass I, Draggoo V, Hackel R, Payne S, Lancaster M, Mak P 2007 Proc. of SPIE 6403 64030M
[8]	Jiang Y, Xiang X, Liu C M, Luo C S, Wang H J, Yuan X D, He S B, Ren W, L H Bi, Zheng W G, Zu X T 2012 Chin. Phys. B 21 064219
[9]	Mendez E, Nowak K M, Baker H J, Villarreal F J, Hall D R 2006 Appl. Opt. 45 5358
[10]	Bouchut P, Delrive L, Decruppe Dl, Garrec P 2004 Proc. of SPIE 5252 122
[11]	Brusasco R M, Penetrante B M, Butler J A, Maricle S M, Peterson J E 2002 Proc. of SPIE 4697 34
[12]	Nowak K M, Baker H J, Hall D R 2006 Appl. Opt. 45 162
[13]	Temple P A, Lowdermilk W H, Milam D 1982 Appl. Opt. 21 3249
[14]	Mendez E, Baker H J, Nowak K M, Villarreal F, Hall D R 2005 Proc. of SPIE 5647 165
[15]	Xiao Y M, Bass M 1983 Appl. Opt. 22 2933
[16]	Wong L, Suratwala T, Feit M D, Miller P E, Steele R 2009 J. Non-Cryst. Sol. 355 797
[17]	Genin F Y, Salleo A, Pistor T V, Chase L L 2001 J. Opt. Soc. Am. A 18 2607
[18]	Zhao J, Sullivan J, Zayac J, Bennett T D 2004 J. Appl. Phys. 95 5475
[19]	Yang S T, Matthews M J, Elhadj S, Cooke D, Guss G M, Draggoo V G, Wegner P L J 2010 Appl. Opt. 49 2606
[20]	Bouchut P, Decruppe D, Delrive L 2004 J. Appl. Phys. 96 3221

施引文献

[1]	Bercegol H, Grua P 2008 Proc. of SPIE 7132 71321B
[2]	Liu H J, Zhou X D, Huang J, Wang F R, Jiang X D, Huang J, Wu W D, Zheng W G 2011 Acta Phys. Sin. 60 065202 (in Chinese) [刘红婕, 周信达, 黄进, 王凤蕊, 蒋晓东, 黄竞, 吴卫东, 郑万国 2011 物理学报 60 065202]
[3]	Bouchut P, Garrec P, Pelle C 2003 Proc. of SPIE 4932 103
[4]	Wang F R, Huang J, Liu H J, Zhou X D, Jiang X D, Wu W D, Zheng W G 2010 Acta Phys. Sin 59 5122 (in Chinese) [王凤蕊, 黄进, 刘红婕, 周信达, 蒋晓东, 吴卫东, 郑万国 2010 物理学报 59 5122]
[5]	Hrubesh L W, Norton M A, Molander W A, Donohue E E, Maricle S M, Penetrante B M, Brusasco R M, Grundler W, Butler J A, Carr J W, Hill R M, Summers L J, Feit M D, Rubenchik A, Key M H, Wegner P J, Burnham A K, Hackel L A, Kozlowski M R 2002 Proc. of SPIE 4679 23
[6]	Brusasco R M, Penetrante B M, Butler J A, Hrubesh L W 2001 Proc. of SPIE 4679 40
[7]	Guss G, Bass I, Draggoo V, Hackel R, Payne S, Lancaster M, Mak P 2007 Proc. of SPIE 6403 64030M
[8]	Jiang Y, Xiang X, Liu C M, Luo C S, Wang H J, Yuan X D, He S B, Ren W, L H Bi, Zheng W G, Zu X T 2012 Chin. Phys. B 21 064219
[9]	Mendez E, Nowak K M, Baker H J, Villarreal F J, Hall D R 2006 Appl. Opt. 45 5358
[10]	Bouchut P, Delrive L, Decruppe Dl, Garrec P 2004 Proc. of SPIE 5252 122
[11]	Brusasco R M, Penetrante B M, Butler J A, Maricle S M, Peterson J E 2002 Proc. of SPIE 4697 34
[12]	Nowak K M, Baker H J, Hall D R 2006 Appl. Opt. 45 162
[13]	Temple P A, Lowdermilk W H, Milam D 1982 Appl. Opt. 21 3249
[14]	Mendez E, Baker H J, Nowak K M, Villarreal F, Hall D R 2005 Proc. of SPIE 5647 165
[15]	Xiao Y M, Bass M 1983 Appl. Opt. 22 2933
[16]	Wong L, Suratwala T, Feit M D, Miller P E, Steele R 2009 J. Non-Cryst. Sol. 355 797
[17]	Genin F Y, Salleo A, Pistor T V, Chase L L 2001 J. Opt. Soc. Am. A 18 2607
[18]	Zhao J, Sullivan J, Zayac J, Bennett T D 2004 J. Appl. Phys. 95 5475
[19]	Yang S T, Matthews M J, Elhadj S, Cooke D, Guss G M, Draggoo V G, Wegner P L J 2010 Appl. Opt. 49 2606
[20]	Bouchut P, Decruppe D, Delrive L 2004 J. Appl. Phys. 96 3221

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