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铒离子注入绝缘体上Si的射程分布研究

秦希峰 马桂杰 时术华 王凤翔 付刚 赵金花

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铒离子注入绝缘体上Si的射程分布研究

秦希峰, 马桂杰, 时术华, 王凤翔, 付刚, 赵金花

Investigation on range distribution of Er ions implanted in silicon-on-insulator

Qin Xi-Feng, Ma Gui-Jie, Shi Shu-Hua, Wang Feng-Xiang, Fu Gang, Zhao Jin-Hua
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  • 利用离子注入掺杂技术设计、制作半导体集成器件时,了解离子注入半导体材料的射程分布和横向离散规律等是很重要的. 用200500 keV能量的铒(Er)离子注入SOI(silicon-on-insulator,绝缘体上的硅)样品中,利用卢瑟福背散射(RBS)技术研究了剂量为21015 cm-2的Er离子注入SOI的平均投影射程Rp和射程离散Rp,把测出的实验值和SRIM软件得到的理论计算值进行了比较,发现平均投影射程Rp的实验值跟理论计算值符合较好,射程离散 Rp的实验值和理论计算值差别大一些.
    It is very important to take into consideration the distribution of range, range straggling, and lateral spread of ions implanted into semiconductor materials during designing and fabrication of semiconductor integration devices by means of ion implantation. Er ions with energies between 200 and 500 keV are implanted in SOI (silicon-on-insulator) samples. The mean projection range Rp and the range stragglings Rp of Er ions with a dose of 21015 cm-2 implanted in SOI samples are measured by Rutherford backscattering (RBS) technique. The obtained data are then compared with those predicted by TRIM codes. It is seen that the experimental data of Rp agree well with the theoretical values. However, there are great differences between the experimental data and the theoretical values of Rp.
    • 基金项目: 国家自然科学基金(批准号:11205096)、山东省自然科学基金(批准号:ZR2011AM011,ZR2013AM014)、山东建筑大学博士基金(批准号:XNBS1341)和济南市科技发展项目(批准号:201202092,OUT_02440)资助的课题.
    • Funds: Project supported by the National Natural Science Foundation of China (Grant No. 11205096), the Natural Science Foundation of Shandong Province, China (Grant Nos. ZR2011AM011, ZR2013AM014), the Foundation for Docotors of Shandong Jianzhu University, China (Grant No. XNBS1341), and the Science and Technology Development Plan of Jinan City, China (Grant No. 201202092, OUT_02440).
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  • [1]

    Ennen H, Schneider J, Pomrenke G, Axmann A 1983 Appl. Phys. Lett. 43 943

    [2]

    Xiao Z S, Xu F, Zhang T H, Cheng G A, Gu L L 2009 Acta Phys. Sin. 58 164 (in Chinese)[肖志松, 徐飞, 张通和, 程国安, 顾岚岚 2009 物理学报 58 164]

    [3]
    [4]
    [5]

    Wang J Z, Shi Z Q, Lou H N, Zhang X L, Zuo Z W, Pu L, Ma E, Zhang R, Zheng Y L, Lu F, Shi Y 2009 Acta Phys. Sin. 58 4243 (in Chinese)[王军转, 石卓琼, 娄昊楠, 章新栾, 左则文, 濮林, 马恩, 张荣, 郑有炓, 陆昉, 施毅 2009 物理学报 58 4243]

    [6]

    Hansson G V, Du W X, Elfving A, Duteil F 2001 Appl. Phys. Lett. 78 2104

    [7]
    [8]

    Lei H B, Yang Q Q, Wang Q M 1998 Acta Phys. Sin. 47 1201 (in Chinese)[雷红兵, 杨沁清, 王启明 1998 物理学报 47 1201]

    [9]
    [10]

    Liang J J, Chen W D, Wang Y Q, Chang Y, Wang Z G 2000 Chin. Phys. 9 783

    [11]
    [12]
    [13]

    Ding W C, Liu Y, Zhang Y, Guo J C, Zuo Y H, Cheng B W, Yu J Z, Wang Q M 2009 Chin. Phys. B 18 3044

    [14]
    [15]

    Chen C Y, Chen W D, Wang Y Q, Song S F, Xu Z J 2003 Acta Phys. Sin. 52 736 (in Chinese)[陈长勇, 陈维德, 王永谦, 宋淑芳, 许振嘉 2003 物理学报 52 736]

    [16]
    [17]

    Qin X F, Chen M, Wang X L, Liang Y and Zhang S M 2010 Chin. Phys. B 19 113403

    [18]

    Galli M, Politi A, Belotti M, Gerace D, Liscidini M, Patrini M, Andreani L C 2006 Appl. Phys. Lett. 81 251114

    [19]
    [20]

    Qin X F, Li H Zh, Li S, Ji Z W, W H N, Wang F X, Fu G 2012 Chin. Phys. B 21 066105

    [21]
    [22]

    Barrios A, Lipson M 2005 Opt. Express 13 10092

    [23]
    [24]
    [25]

    Zelsmann M, Picard E, Charvolin T, Hadji E, Heitzmann M 2003 Appl. Phys. Lett. 83 2542

    [26]
    [27]

    Qin X F, Ji Z Wu, Chen M, Liu X H, Wang X L, Wang K M, Zhao Q T, Fu G 2012 Nuclear Inst. and Methods in Physics Research B 278 1

    [28]
    [29]

    Chu W K, Mayer J W, Nicolet M A 1978 Backscattering Spectrometry (New York: Academic) chap 5, p137-141

    [30]
    [31]

    Liu X D 2003 Ph. D. dissertation (Jinan: Shandong University) (in Chinese)[刘向东2003博士学位论文(济南: 山东大学)]

    [32]
计量
  • 文章访问数:  4555
  • PDF下载量:  422
  • 被引次数: 0
出版历程
  • 收稿日期:  2013-12-11
  • 修回日期:  2014-05-16
  • 刊出日期:  2014-09-05

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