镨掺杂铟镓氧化物薄膜晶体管的低频噪声特性分析

朱宇博; 徐华; 李民; 徐苗; 彭俊彪

doi:10.7498/aps.70.20210368

摘要

本文研究了镨掺杂铟镓氧化物 (PrIGO)薄膜晶体管 (thin film transistor, TFT) 的低频噪声特性. 根据低频噪声测试分析结果得知: IGO-TFT和PrIGO-TFT器件沟道电流的功率谱密度与频率的关系均满足1/f^γ (γ ≈ 0.8) 的关系, 符合载流子数涨落模型. 通过研究不同沟道长度对器件低频噪声的影响, 明确了器件的噪声主要来源于沟道区而非源/漏接触区. 基于载流子数涨落模型, 提取界面处的缺陷态, 发现Pr元素掺杂会在IGO体系中诱导出缺陷态. 而该缺陷态可以作为电离氧空位和电子的复合中心, 进而改善氧化物TFT器件中由氧空位所导致的光照负偏压 (negative bias illumination stability, NBIS) 稳定性问题.

关键词:

Abstract

Metal oxide thin film transistors (MOTFTs) have been extensively investigated in the display industry because of their attractive characteristics, including high performances, low processing temperatures, and simple fabrication. However, under the actual working condition, the characteristics of TFTs are easily affected by the light irradiation caused the negative gate bias stress (NBIS). Therefore, the NBIS stability of MOTFT is a crucial issue that must be solved before their commercialization into an optoelectronic device. In this article, praseodymium-doped indium gallium oxide (PrIGO) is employed as the channel layer of thin film transistor (TFT). The TFTs with Pr doping exhibit a remarkable enhancement in NBIS stability. The structure and chemical composition of PrIGO film are analyzed by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS), respectively. Besides, to further explore the mechanism for the improvement of NBIS stability, the low-frequency noise characteristics of IGO-TFT device and PrIGO-TFT device are studied. According to the low frequency noise characterization and analysis results, the correspondence between the normalized drain current noise power spectral density($ S_{\rm ID}/I_{\rm DS}^2 $) and frequency shows 1/f^γ (γ ≈ 0.8) low frequency noise behavior for IGO-TFT device and PrIGO-TFT device. In addition, by studying the influences of different channel lengths on the low frequency noise of the IGO-TFT and PrIGO-TFT devices, it can be concluded that the low frequency noise of the device comes mainly from the channel region rather than from the source/drain contact region. In the linear region of the IGO-TFT device and PrIGO-TFT device, according to the linear fitting of the $ S_{\rm ID}/I_{\rm DS}^2 $ versus the overdrive voltage (V_GS– V_th), it is proved that the low frequency noise of the IGO-TFT device and the PrIGO-TFT device are mainly affected by the carrier number fluctuation model. Finally, based on the carrier number fluctuation model, the defect state density at the interface between active layer and gate insulating layer is extracted to be 7.76 × 10¹⁷ cm^–3·eV^–1 and 9.55 × 10¹⁷ cm^–3·eV^–1 for IGO-TFT and PrIGO-TFT devices, respectively. We speculate that the Pr element can induce defect states in the IGO system, and the trap states induced by Pr ions facilitate the capture of free electrons by positively charged oxygen vacancies, which lead the photo-induced carrier in conduction band to be suppressed.

Keywords:

作者及机构信息

1.
华南理工大学电子与信息学院, 广州　510640

2.
广州新视界光电科技有限公司, 广州　510530

3.
华南理工大学高分子光电材料与器件研究所, 发光材料与器件国家重点实验室, 广州　510640

通信作者: 徐华, xuhua@newvision-cn.com ; 彭俊彪, psjbpeng@scut.edu.cn

基金项目: 广东省重点研发项目(批准号: 2019B010924004, 2019B010934001, 2019B010925001)、广东省国际科技合作计划(批准号: 2018A050506022)和季华实验室科研项目(批准号: X190221TF191)资助的课题

Authors and contacts

1.
School of Electronic and Information Engineering, South China University of Technology, Guangzhou 510640, China

2.
Guangzhou New Vision Opto-electronic Technology Co., Ltd., Guangzhou 510530, China

3.
State Key Laboratory of Luminescence Materials and Devices, Institute of Polymer Optoelectronic Materials and Devices, South China University of Technology, Guangzhou 510640, China

Corresponding author: Xu Hua, xuhua@newvision-cn.com ; Peng Jun-Biao, psjbpeng@scut.edu.cn

Funds: Project supported by the Key-Area Research and Development Program of Guangdong Province, China (Grant Nos. 2019B010924004, 2019B010934001, 2019B010925001), the Guangdong Provincial International Science & Technology Cooperation Program, China (Grant No. 2018A050506022), and Ji Hua Laboratory Scientific Research Project, China (Grant No. X190221TF191)

文章全文 : translate this paragraph

参考文献

[1]	Nomura K, Ohta H, Takagi A, Kamiya T, Hirano M, Hosono H 2004 Nature 432 488 Google Scholar
[2]	Ebata K, Tomai S, Tsuruma Y, Iitsuka T, Matsuzaki S, Yano K 2012 Appl. Phys. Express 5 11102 Google Scholar
[3]	Xiao P, Dong T, Lan L, Lin Z, Song W, Song E, Sun S, Li Y, Gao P, Luo D, Xu M, Peng J 2016 Phys. Status Solidi RRL 10 493 Google Scholar
[4]	Park H, Bae J, Kang H, Kim D H, Jung P, Park H, Lee S, Bae J U, Yoon S Y, Kang I 2019 SID Int. Symp. Digest Techn. Papers 50 1222 Google Scholar
[5]	Cheng Y, Chang S, Chang S 2019 Mater. Res. Express 6 106445 Google Scholar
[6]	Chen T, Chang T, Hsieh T, Tsai C, Chen S, Lin C, Hung M, Tu C, Chang J, Chen P 2010 Appl. Phys. Lett. 97 192103 Google Scholar
[7]	Chowdhury M D H, Migliorato P, Jang J 2010 Appl. Phys. Lett. 97 173506 Google Scholar
[8]	Ryu B, Noh H, Choi E, Chang K J 2010 Appl. Phys. Lett. 97 22108 Google Scholar
[9]	Xu H, Xu M, Li M, Chen Z, Zou J, Wu W, Qiao X, Tao H, Wang L, Ning H, Ma D, Peng J 2019 ACS Appl. Mater. Interfaces. 11 5232 Google Scholar
[10]	Fung T, Baek G, Kanicki J 2010 J. Appl. Phys. 108 74518 Google Scholar
[11]	Wang L, Liu Y, Geng K, Chen Y, En Y 2018 Chin. Phys. B 27 68504 Google Scholar
[12]	Cho I, Cheong W, Hwang C, Lee J, Kwon H, Lee J 2009 IEEE Electron Device Lett. 30 828 Google Scholar
[13]	Song A, Javaid K, Liang Y, Wu W, Yu J, Liang L, Zhang H, Lan L, Chang T, Cao H 2018 Phys. Status Solidi RRL 12 1800034 Google Scholar
[14]	王静, 刘远, 刘玉荣, 吴为敬, 罗心月, 刘凯, 李斌, 恩云飞 2016 物理学报 65 128501 Google Scholar Wang J, Liu Y, Liu Y R, Wu W J, Luo X Y, Liu K, Li B, En Y F 2016 Acta Phys. Sin. 65 128501 Google Scholar
[15]	刘远, 何红宇, 陈荣盛, 李斌, 恩云飞, 陈义强 2017 物理学报 66 237101 Google Scholar Liu Y, He H Y, Chen R S, Li B, En Y F, Chen Y Q 2017 Acta Phys. Sin. 66 237101 Google Scholar
[16]	Deen M J, Rumyantsev S L, Landheer D, Xu D X 2000 Appl. Phys. Lett. 77 2234 Google Scholar
[17]	Choi H, Jeon S, Kim H, Shin J, Kim C, Chung U 2011 IEEE Electron Device Lett. 32 1083 Google Scholar
[18]	Liu Y, He H, Chen R, En Y, Li B, Chen Y 2018 IEEE J. Electron Devi. 6 271 Google Scholar
[19]	Kim S, Jeon Y, Lee J, Ahn B D, Park S Y, Park J, Kim J H, Park J, Kim D M, Kim D H 2010 IEEE Electron Device Lett. 31 1236
[20]	Vandamme L K J, Hooge F N 2008 IEEE Trans. Electron Devices 55 3070 Google Scholar
[21]	Cai M, Yao R 2017 J. Appl. Phys. 122 154503 Google Scholar
[22]	Ghibaudo G, Roux O, Nguyen-Duc C, Balestra F, Brini J 1991 Phys. Status Solidi A 124 571 Google Scholar
[23]	Petit L, Svane A, Szotek Z, Temmerman W M 2005 Phys. Rev. B 72 205118 Google Scholar

施引文献

图 1 IGO-TFT和PrIGO-TFT　(a) 结构示意图; (b) 转移特性曲线; IGO-TFT (c) 和PrIGO-TFT (d) NBIS稳定性

Fig. 1. (a) Cross section views and (b) transfer characteristics of IGO-TFT and PrIGO-TFT; NBIS stability of (c) IGO-TFT and (d) PrIGO-TFT.

下载: 全尺寸图片幻灯片

图 2 IGO和PrIGO薄膜　(a) X射线衍射谱图; (b) 紫外-可见透射光谱图 (插图为 (αhv)²随hv变化曲线); (c) X射线光电子能谱图 (插图为局部放大图)

Fig. 2. (a) X-ray diffraction spectra, (b) UV-visible transmission spectra (the inset shows the curve of (αhv)² varying with hv) and (c) X-ray photoelectron spectroscopy (the inset is a partial enlarged view) of IGO and PrIGO thin film.

下载: 全尺寸图片幻灯片

图 3 IGO-TFT和PrIGO-TFT归一化噪声功率谱密度随频率的变化

Fig. 3. Normalized noise power spectral densities (S_ID/I²_DS) versus frequency in the IGO-TFT and PrIGO-TFT.

下载: 全尺寸图片幻灯片

图 4 不同沟道长度的IGO-TFT　(a) 和PrIGO-TFT (b) S_ID/I²_DS随频率的变化

Fig. 4. S_ID/I²_DS versus frequency in the (a) IGO-TFT and (b) PrIGO-TFT with different channel length.

下载: 全尺寸图片幻灯片

图 5 IGO-TFT和PrIGO-TFT　(a) S_ID/I²_DS随沟道长度的变化; (b) S_ID/I_DS²随过驱动电压V_GS–V_th的变化

Fig. 5. S_ID/I²_DS versus (a) channel length and (b) overdrive voltage (V_GS–V_th) in the IGO-TFT and PrIGO-TFT.

下载: 全尺寸图片幻灯片

图 6 IGO-TFT　(a) 和PrIGO-TFT (b) S_ID/I²_DS随沟道电流的变化

Fig. 6. S_ID/I²_DS versus drain current in the (a) IGO-TFT and (b) PrIGO-TFT.

下载: 全尺寸图片幻灯片

表 1 IGO和PrIGO薄膜中各元素的百分比含量

Table 1. Percentage contents of each element in IGO and PrIGO films.

Element/at.% Pr In Ga O

PrIGO 2.86 28.76 15.10 51.89
IGO — 30.93 15.51 51.85

下载: 导出CSV

[1]	Nomura K, Ohta H, Takagi A, Kamiya T, Hirano M, Hosono H 2004 Nature 432 488 Google Scholar
[2]	Ebata K, Tomai S, Tsuruma Y, Iitsuka T, Matsuzaki S, Yano K 2012 Appl. Phys. Express 5 11102 Google Scholar
[3]	Xiao P, Dong T, Lan L, Lin Z, Song W, Song E, Sun S, Li Y, Gao P, Luo D, Xu M, Peng J 2016 Phys. Status Solidi RRL 10 493 Google Scholar
[4]	Park H, Bae J, Kang H, Kim D H, Jung P, Park H, Lee S, Bae J U, Yoon S Y, Kang I 2019 SID Int. Symp. Digest Techn. Papers 50 1222 Google Scholar
[5]	Cheng Y, Chang S, Chang S 2019 Mater. Res. Express 6 106445 Google Scholar
[6]	Chen T, Chang T, Hsieh T, Tsai C, Chen S, Lin C, Hung M, Tu C, Chang J, Chen P 2010 Appl. Phys. Lett. 97 192103 Google Scholar
[7]	Chowdhury M D H, Migliorato P, Jang J 2010 Appl. Phys. Lett. 97 173506 Google Scholar
[8]	Ryu B, Noh H, Choi E, Chang K J 2010 Appl. Phys. Lett. 97 22108 Google Scholar
[9]	Xu H, Xu M, Li M, Chen Z, Zou J, Wu W, Qiao X, Tao H, Wang L, Ning H, Ma D, Peng J 2019 ACS Appl. Mater. Interfaces. 11 5232 Google Scholar
[10]	Fung T, Baek G, Kanicki J 2010 J. Appl. Phys. 108 74518 Google Scholar
[11]	Wang L, Liu Y, Geng K, Chen Y, En Y 2018 Chin. Phys. B 27 68504 Google Scholar
[12]	Cho I, Cheong W, Hwang C, Lee J, Kwon H, Lee J 2009 IEEE Electron Device Lett. 30 828 Google Scholar
[13]	Song A, Javaid K, Liang Y, Wu W, Yu J, Liang L, Zhang H, Lan L, Chang T, Cao H 2018 Phys. Status Solidi RRL 12 1800034 Google Scholar
[14]	王静, 刘远, 刘玉荣, 吴为敬, 罗心月, 刘凯, 李斌, 恩云飞 2016 物理学报 65 128501 Google Scholar Wang J, Liu Y, Liu Y R, Wu W J, Luo X Y, Liu K, Li B, En Y F 2016 Acta Phys. Sin. 65 128501 Google Scholar
[15]	刘远, 何红宇, 陈荣盛, 李斌, 恩云飞, 陈义强 2017 物理学报 66 237101 Google Scholar Liu Y, He H Y, Chen R S, Li B, En Y F, Chen Y Q 2017 Acta Phys. Sin. 66 237101 Google Scholar
[16]	Deen M J, Rumyantsev S L, Landheer D, Xu D X 2000 Appl. Phys. Lett. 77 2234 Google Scholar
[17]	Choi H, Jeon S, Kim H, Shin J, Kim C, Chung U 2011 IEEE Electron Device Lett. 32 1083 Google Scholar
[18]	Liu Y, He H, Chen R, En Y, Li B, Chen Y 2018 IEEE J. Electron Devi. 6 271 Google Scholar
[19]	Kim S, Jeon Y, Lee J, Ahn B D, Park S Y, Park J, Kim J H, Park J, Kim D M, Kim D H 2010 IEEE Electron Device Lett. 31 1236
[20]	Vandamme L K J, Hooge F N 2008 IEEE Trans. Electron Devices 55 3070 Google Scholar
[21]	Cai M, Yao R 2017 J. Appl. Phys. 122 154503 Google Scholar
[22]	Ghibaudo G, Roux O, Nguyen-Duc C, Balestra F, Brini J 1991 Phys. Status Solidi A 124 571 Google Scholar
[23]	Petit L, Svane A, Szotek Z, Temmerman W M 2005 Phys. Rev. B 72 205118 Google Scholar

[1]	张雪, KimBokyung, LeeHyeonju, ParkJaehoon. 低温快速制备基于溶液工艺的高性能氧化铟薄膜及晶体管. 物理学报, 2024, 73(9): 096802. doi: 10.7498/aps.73.20240082
[2]	吕玲, 邢木涵, 薛博瑞, 曹艳荣, 胡培培, 郑雪峰, 马晓华, 郝跃. 重离子辐射对AlGaN/GaN高电子迁移率晶体管低频噪声特性的影响. 物理学报, 2024, 73(3): 036103. doi: 10.7498/aps.73.20221360
[3]	徐华, 刘京栋, 蔡炜, 李民, 徐苗, 陶洪, 邹建华, 彭俊彪. N ₂O处理对背沟刻蚀金属氧化物薄膜晶体管性能的影响. 物理学报, 2022, 71(5): 058503. doi: 10.7498/aps.71.20211350
[4]	闫大为, 田葵葵, 闫晓红, 李伟然, 俞道欣, 李金晓, 曹艳荣, 顾晓峰. GaN肖特基二极管的正向电流输运和低频噪声行为. 物理学报, 2021, 70(8): 087201. doi: 10.7498/aps.70.20201467
[5]	刘贤哲, 张旭, 陶洪, 黄健朗, 黄江夏, 陈艺涛, 袁炜健, 姚日晖, 宁洪龙, 彭俊彪. 溶胶-凝胶法制备氧化锡基薄膜及薄膜晶体管的研究进展. 物理学报, 2020, 69(22): 228102. doi: 10.7498/aps.69.20200653
[6]	王党会, 许天旱. 蓝紫光发光二极管中的低频产生-复合噪声行为研究. 物理学报, 2019, 68(12): 128104. doi: 10.7498/aps.68.20190189
[7]	覃婷, 黄生祥, 廖聪维, 于天宝, 罗衡, 刘胜, 邓联文. 铟镓锌氧薄膜晶体管的悬浮栅效应研究. 物理学报, 2018, 67(4): 047302. doi: 10.7498/aps.67.20172325
[8]	邵龑, 丁士进. 氢元素对铟镓锌氧化物薄膜晶体管性能的影响. 物理学报, 2018, 67(9): 098502. doi: 10.7498/aps.67.20180074
[9]	刘远, 何红宇, 陈荣盛, 李斌, 恩云飞, 陈义强. 氢化非晶硅薄膜晶体管的低频噪声特性. 物理学报, 2017, 66(23): 237101. doi: 10.7498/aps.66.237101
[10]	兰林锋, 张鹏, 彭俊彪. 氧化物薄膜晶体管研究进展. 物理学报, 2016, 65(12): 128504. doi: 10.7498/aps.65.128504
[11]	王静, 刘远, 刘玉荣, 吴为敬, 罗心月, 刘凯, 李斌, 恩云飞. 铟锌氧化物薄膜晶体管局域态分布的提取方法. 物理学报, 2016, 65(12): 128501. doi: 10.7498/aps.65.128501
[12]	王党会, 许天旱, 王荣, 雒设计, 姚婷珍. InGaN/GaN多量子阱结构发光二极管发光机理转变的低频电流噪声表征. 物理学报, 2015, 64(5): 050701. doi: 10.7498/aps.64.050701
[13]	宁洪龙, 胡诗犇, 朱峰, 姚日晖, 徐苗, 邹建华, 陶洪, 徐瑞霞, 徐华, 王磊, 兰林锋, 彭俊彪. 铜-钼源漏电极对非晶氧化铟镓锌薄膜晶体管性能的改善. 物理学报, 2015, 64(12): 126103. doi: 10.7498/aps.64.126103
[14]	高娅娜, 李喜峰, 张建华. 溶胶凝胶法制备高性能锆铝氧化物作为绝缘层的薄膜晶体管. 物理学报, 2014, 63(11): 118502. doi: 10.7498/aps.63.118502
[15]	徐华, 兰林锋, 李民, 罗东向, 肖鹏, 林振国, 宁洪龙, 彭俊彪. 源漏电极的制备对氧化物薄膜晶体管性能的影响. 物理学报, 2014, 63(3): 038501. doi: 10.7498/aps.63.038501
[16]	刘远, 吴为敬, 李斌, 恩云飞, 王磊, 刘玉荣. 非晶铟锌氧化物薄膜晶体管的低频噪声特性与分析. 物理学报, 2014, 63(9): 098503. doi: 10.7498/aps.63.098503
[17]	李帅帅, 梁朝旭, 王雪霞, 李延辉, 宋淑梅, 辛艳青, 杨田林. 高迁移率非晶铟镓锌氧化物薄膜晶体管的制备与特性研究. 物理学报, 2013, 62(7): 077302. doi: 10.7498/aps.62.077302
[18]	刘玉栋, 杜磊, 孙鹏, 陈文豪. 静电放电对功率肖特基二极管I-V及低频噪声特性的影响. 物理学报, 2012, 61(13): 137203. doi: 10.7498/aps.61.137203
[19]	赵孔胜, 轩瑞杰, 韩笑, 张耕铭. 基于氧化铟锡的无结低电压薄膜晶体管. 物理学报, 2012, 61(19): 197201. doi: 10.7498/aps.61.197201
[20]	王雄, 才玺坤, 原子健, 朱夏明, 邱东江, 吴惠桢. 氧化锌锡薄膜晶体管的研究. 物理学报, 2011, 60(3): 037305. doi: 10.7498/aps.60.037305

计量

文章访问数: 4242
PDF下载量: 111
被引次数: 0

姓名
邮箱
手机号码
标题
留言内容
验证码

搜索

留言板

镨掺杂铟镓氧化物薄膜晶体管的低频噪声特性分析