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紫外波段高透过率铜铟掺杂SnO2薄膜的研究

张治国

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紫外波段高透过率铜铟掺杂SnO2薄膜的研究

张治国

SnO2:(Cu,In) films with high transmittance in ultraviolet region

Zhang Zhi-Guo
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  • 采用反应蒸发的方法,在玻璃、Corning7059玻璃及石英玻璃衬底上制备了SnO2:(Cu,In)透明导电薄膜,对薄膜的各种元素的含量做了分析, 给出了各种元素在膜中的分布情况;测量了薄膜的透过率,结果显示个别样品对紫外线有较高透过率,退火过程对透过率有影响.测量了电阻率与温度的关系,同时解释了样品的阻-温特性.对材料的光学带隙与吸收系数的关系做了讨论,给出了用透过率曲线确定光学带隙的简易方法.讨论了扩展态迁移率与迁移率边和费米能级之间的关系.结果显示,用铜、铟掺杂的氧化锡透明导电
    By reactive evaporation method, the SnO2:(Cu,In) transparent conductive films are prepared on glass, Corning7059 glass and quartz glass substrates separately. The element contents are analyzed, the distributions of all elements in the films are given, and the transmittances of samples are also measured. The results show that the UV transmittance of individual sample is high, and the transmittance of the film depends on annealing process. The resistance-temperature characteristics are measured and explained. The relationship between optical band gap and absorption coefficient is discussed. The simple method in which the transmittance curve is used to determine the optical band gap is given. The relation between mobility of the extended state and mobility edge with Fermi level is discussed. The results show that the preparation of copper and indium co-doped tin oxide transparent conductive films has achieved the purpose of reducing the cost, and some particular samples have wide band gap.
    • 基金项目: 福建省教育厅A类科技项目(批准号:JA08210)资助的课题.
    [1]

    Su C H, Pang D W, Zhang Z G 1991 Chin. J. Semicond. 12 709(in Chinese) [宿昌厚、庞大文、张治国 1991 半导体学报 12 709]

    [2]

    León-Silva U, Nicho M E, Hailin Hu, Rodolfo Cruz-Silva 2007 Solar Energy Materials and Solar Cells 91 1444

    [3]

    Zhang W J, Wang T M, Cui M, Rong A L 2006 Acta Phys. Sin. 55 1295(in Chinese)[张维佳、王天明、崔 敏、戎蔼伦 2006 物理学报 55 1295]

    [4]

    Yutaka Ohhata, Fujitoshi Shinoki, Sada Fumi Yoshida 1979 Thin Solid Films 59 255

    [5]

    Shong C W, Liu Z W, Zhang Q Y 2006 Acta Phys. Sin. 55 430(in Chinese)[孙成伟、刘志文、张庆瑜 2006 物理学报 55 0430]

    [6]

    Lan W, Liu X Q, Huang C M 2006 Acta Phys. Sin.55 7048(in Chinese)[兰 伟、刘雪芹、黄春明 2006 物理学报 55 0748]

    [7]

    Ji Z G, He Z J, Song Y L 2004 Acta Phys. Sin. 53 4330(in Chinese)[季振国、何振杰、宋永梁 2004 物理学报 53 4330]

    [8]

    Guojia Fang, Dejie Li, Baolun Yao 2002 J. Phys, D: Appl. Phys. 35 3096

    [9]

    Yang Z W, Han S H, Yang T L 2000 Acta Phys. Sin.49 1200(in Chinese)[扬志伟、韩圣浩、扬田林 2000 物理学报 49 1200]

    [10]

    Hao X T, Ma J, Xu X G 2002 Acta Phys Sin. 51 353(in Chinese)[郝晓涛、马 瑾、徐现刚 2002 物理学报 51 353]

    [11]

    Huang J M, Dong J H, Zhang X Y 2003 Acta Energiae Solar Sin. 24 845(in Chinese)[黄佳木、董建华、张新元 2003 太阳能学报 24 845]

    [12]

    Eun Lyoung Kim, Sang Kooun Jung, Sang Ho Sohn, Duck Kyu Park 2007 J. Phys, D: Appl. Phys. 40 1784

  • [1]

    Su C H, Pang D W, Zhang Z G 1991 Chin. J. Semicond. 12 709(in Chinese) [宿昌厚、庞大文、张治国 1991 半导体学报 12 709]

    [2]

    León-Silva U, Nicho M E, Hailin Hu, Rodolfo Cruz-Silva 2007 Solar Energy Materials and Solar Cells 91 1444

    [3]

    Zhang W J, Wang T M, Cui M, Rong A L 2006 Acta Phys. Sin. 55 1295(in Chinese)[张维佳、王天明、崔 敏、戎蔼伦 2006 物理学报 55 1295]

    [4]

    Yutaka Ohhata, Fujitoshi Shinoki, Sada Fumi Yoshida 1979 Thin Solid Films 59 255

    [5]

    Shong C W, Liu Z W, Zhang Q Y 2006 Acta Phys. Sin. 55 430(in Chinese)[孙成伟、刘志文、张庆瑜 2006 物理学报 55 0430]

    [6]

    Lan W, Liu X Q, Huang C M 2006 Acta Phys. Sin.55 7048(in Chinese)[兰 伟、刘雪芹、黄春明 2006 物理学报 55 0748]

    [7]

    Ji Z G, He Z J, Song Y L 2004 Acta Phys. Sin. 53 4330(in Chinese)[季振国、何振杰、宋永梁 2004 物理学报 53 4330]

    [8]

    Guojia Fang, Dejie Li, Baolun Yao 2002 J. Phys, D: Appl. Phys. 35 3096

    [9]

    Yang Z W, Han S H, Yang T L 2000 Acta Phys. Sin.49 1200(in Chinese)[扬志伟、韩圣浩、扬田林 2000 物理学报 49 1200]

    [10]

    Hao X T, Ma J, Xu X G 2002 Acta Phys Sin. 51 353(in Chinese)[郝晓涛、马 瑾、徐现刚 2002 物理学报 51 353]

    [11]

    Huang J M, Dong J H, Zhang X Y 2003 Acta Energiae Solar Sin. 24 845(in Chinese)[黄佳木、董建华、张新元 2003 太阳能学报 24 845]

    [12]

    Eun Lyoung Kim, Sang Kooun Jung, Sang Ho Sohn, Duck Kyu Park 2007 J. Phys, D: Appl. Phys. 40 1784

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  • PDF下载量:  767
  • 被引次数: 0
出版历程
  • 收稿日期:  2009-05-04
  • 修回日期:  2010-03-03
  • 刊出日期:  2010-11-15

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