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Shift and broadening of W4f peak were observed in the course of reduction of WO3 during Ar+- and H+-bombarding in different energies. Three different doublets W+6, W+4 and W0 corresponding to W4f electrons were obtained by decomposing the spectrum. The reduction is interpreted by defect states of oxygen. The UPS spectrum shows an increase of the density of states near the Fermi energy.
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