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INVESTIGATION OF LATTICE DEFORMATION OF POROUS SILICON FILMS BY X-RAY DOUBLE CRYSTAL DIFFRACTION

HE XIAN-CHANG WU ZI-QIN ZHAO TE-XIU Lü ZHI-HUI WANG XIAO-PING SUN GUO-XI

Citation:

INVESTIGATION OF LATTICE DEFORMATION OF POROUS SILICON FILMS BY X-RAY DOUBLE CRYSTAL DIFFRACTION

HE XIAN-CHANG, WU ZI-QIN, ZHAO TE-XIU, Lü ZHI-HUI, WANG XIAO-PING, SUN GUO-XI
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  • Received Date:  22 July 1992
  • Published Online:  05 March 1993

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