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MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (I)——ESTABLISHMENT OF THE MODEL

XIAO DING-QUAN WEI LI-FAN LI ZI-SEN ZHU JIAN-GUO QIAN ZHENG-HONG PENG WEN-BIN

Citation:

MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (I)——ESTABLISHMENT OF THE MODEL

XIAO DING-QUAN, WEI LI-FAN, LI ZI-SEN, ZHU JIAN-GUO, QIAN ZHENG-HONG, PENG WEN-BIN
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Publishing process
  • Received Date:  08 October 1994
  • Published Online:  05 January 1996

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