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INFRARED ANALYSIS OF BOND CONFIGURATION FOR THE a-C∶F∶H FILMS DEPOSITED AT VARIABLE CHF3/CH4 FLOW RATIOS

XIN YU NING ZHAO-YUAN GAN ZHAO-QIANG LU XIN-HUA FANG LIANG CHENG SHAN-HUA

Citation:

INFRARED ANALYSIS OF BOND CONFIGURATION FOR THE a-C∶F∶H FILMS DEPOSITED AT VARIABLE CHF3/CH4 FLOW RATIOS

XIN YU, NING ZHAO-YUAN, GAN ZHAO-QIANG, LU XIN-HUA, FANG LIANG, CHENG SHAN-HUA
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Publishing process
  • Received Date:  05 May 2001
  • Accepted Date:  02 July 2001
  • Published Online:  05 June 2001

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