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The influence of the magnetic field magnetron under the substrate on the sputtering glow and film thickness gradient

Zhao Xin-Min Di Guo-Qing

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The influence of the magnetic field magnetron under the substrate on the sputtering glow and film thickness gradient

Zhao Xin-Min, Di Guo-Qing
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  • Abstract views:  6038
  • PDF Downloads:  655
  • Cited By: 0
Publishing process
  • Received Date:  17 January 2003
  • Accepted Date:  01 April 2003
  • Published Online:  15 January 2004

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