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Characteristics of two-electron-temperature in inductively coupled CF4 plasmas

Huang Song Ning Zhao-Yuan Xin Yu Gan Zhao-Qiang

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Characteristics of two-electron-temperature in inductively coupled CF4 plasmas

Huang Song, Ning Zhao-Yuan, Xin Yu, Gan Zhao-Qiang
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  • Abstract views:  7787
  • PDF Downloads:  857
  • Cited By: 0
Publishing process
  • Received Date:  28 August 2003
  • Accepted Date:  16 January 2004
  • Published Online:  05 May 2004

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