| [1] |
Yang Duo, Zhong Ning, Shang Hai-Long, Sun Shi-Yang, Li Ge-Yang. Microstructures and mechanical properties of (Ti, N)/Al nanocomposite films by magnetron sputtering. Acta Physica Sinica,
2013, 62(3): 036801.
doi: 10.7498/aps.62.036801
|
| [2] |
Tang Hua-Jie, Zhang Jin-Min, Jin Hao, Shao Fei, Hu Wei-Qian, Xie Quan. Influence of sputtering power on the optical properties of metal manganese film. Acta Physica Sinica,
2013, 62(24): 247803.
doi: 10.7498/aps.62.247803
|
| [3] |
Su Yuan-Jun, Xu Jun, Zhu Ming, Fan Peng-Hui, Dong Chuang. Hydrogenated poly-crystalline silicon thin films deposited by inductively coupled plasma assisted pulsed dc twin magnetron sputtering. Acta Physica Sinica,
2012, 61(2): 028104.
doi: 10.7498/aps.61.028104
|
| [4] |
Shen Xiang-Qian, Xie Quan, Xiao Qing-Quan, Chen Qian, Feng Yun. Computer simulation of the glow discharge characteristics in magnetron sputtering. Acta Physica Sinica,
2012, 61(16): 165101.
doi: 10.7498/aps.61.165101
|
| [5] |
Li Xiao-Na, Zheng Yue-Hong, Li Sheng-Bin, Dong Chuang. Fe3Si8M ternary alloy thin films prepared by magnetron sputtering. Acta Physica Sinica,
2012, 61(24): 247801.
doi: 10.7498/aps.61.247801
|
| [6] |
Wang Yong-Jun, Li Hong-Xuan, Ji Li, Liu Xiao-Hong, Wu Yan-Xia, Zhou Hui-Di, Chen Jian-Min. Preparation and properties of graphite-like carbon films fabricated by unbalanced magnetron sputtering. Acta Physica Sinica,
2012, 61(5): 056103.
doi: 10.7498/aps.61.056103
|
| [7] |
Li Lin-Na, Chen Xin-Liang, Wang Fei, Sun Jian, Zhang De-Kun, Geng Xin-Hua, Zhao Ying. Effects of hydrogen flux on aluminum doped zinc thin films by pulsed magnetron sputtering. Acta Physica Sinica,
2011, 60(6): 067304.
doi: 10.7498/aps.60.067304
|
| [8] |
Cao Yue-Hua, Di Guo-Qing. Analysis of Y2O3 doped TiO2 films topography prepared by radio frequency magnetron sputtering. Acta Physica Sinica,
2011, 60(3): 037702.
doi: 10.7498/aps.60.037702
|
| [9] |
Mu Zong-Xin, Mu Xiao-Dong, Jia Li, Wang Chun, Dong Chuang. Electrostatic oscillation and coupling resonance in double trap of unbalanced magnetron sputtering. Acta Physica Sinica,
2010, 59(10): 7164-7169.
doi: 10.7498/aps.59.7164
|
| [10] |
Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputtering. Acta Physica Sinica,
2009, 58(6): 4109-4116.
doi: 10.7498/aps.58.4109
|
| [11] |
Liu Feng, Meng Yue-Dong, Ren Zhao-Xing, Shu Xing-Sheng. Characterization of ZrN films deposited by ICP enhanced RF magnetron sputtering. Acta Physica Sinica,
2008, 57(3): 1796-1801.
doi: 10.7498/aps.57.1796
|
| [12] |
Xin Ping, Sun Cheng-Wei, Qin Fu-Wen, Wen Sheng-Ping, Zhang Qing-Yu. Room-temperature photoluminescence of ZnO/MgO multiple quantum wells deposited by reactive magnetron sputtering. Acta Physica Sinica,
2007, 56(2): 1082-1087.
doi: 10.7498/aps.56.1082
|
| [13] |
. The effect of temperature of substrate and oxygen partial pressure on V2O5 films fabricated by magnetron sputtering. Acta Physica Sinica,
2007, 56(12): 7255-7261.
doi: 10.7498/aps.56.7255
|
| [14] |
. Nano-β-FeSi2/a-Si multi-layered structure prepared by magnetron sputtering. Acta Physica Sinica,
2007, 56(12): 7188-7194.
doi: 10.7498/aps.56.7188
|
| [15] |
Liu Zhi-Wen, Gu Jian-Feng, Sun Cheng-Wei, Zhang Qing-Yu. Study on nucleation and dynamic scaling of morphological evolution of ZnO film deposition by reactive magnetron sputtering. Acta Physica Sinica,
2006, 55(4): 1965-1973.
doi: 10.7498/aps.55.1965
|
| [16] |
Ding Wan-Yu, Xu Jun, Li Yan-Qin, Piao Yong, Gao Peng, Deng Xin-Lü, Dong Chuang. Characterization of silicon nitride films prepared by MW-ECR magnetron sputtering. Acta Physica Sinica,
2006, 55(3): 1363-1368.
doi: 10.7498/aps.55.1363
|
| [17] |
Li Bao-He, Feng Chun, Yang Tao, Zhai Zhong-Hai, Teng Jiao, Yu Guang-Hua, Zhu Feng-Wu. The preparation of FePt/BN particle films with perpendicular texture by magnetron sputtering. Acta Physica Sinica,
2006, 55(5): 2562-2566.
doi: 10.7498/aps.55.2562
|
| [18] |
Li Bao-He, Feng Chun, Yang Tao, Zhai Zhong-Hai, Teng Jiao, Yu Guang-Hua, Zhu Feng-Wu. The effect of Cu doping on the ordering of FexPt1－x thin films. Acta Physica Sinica,
2006, 55(5): 2567-2571.
doi: 10.7498/aps.55.2567
|
| [19] |
Zhou Xiao-Li, Du Pi-Yi. CaCu33Ti44O1212 films prepared by magnetron s puttering. Acta Physica Sinica,
2005, 54(4): 1809-1813.
doi: 10.7498/aps.54.1809
|
| [20] |
Mu Zong-Xin, Li Guo-Qing, Qin Fu-Wen, Huang Kai-Yu, Che De-Liang. The model of the magnetic mirror effect in the unbalanced magnetron sputtering ion beams. Acta Physica Sinica,
2005, 54(3): 1378-1384.
doi: 10.7498/aps.54.1378
|
下载:
