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Fang Jia, Li Shuang-Liang, Xu Sheng-Zhi, Wei Chang-Chun, Zhao Ying, Zhang Xiao-Dan. Analysis on steady plasma process of high-rate microcrystalline silicon by optical emission spectroscopy. Acta Physica Sinica,
2013, 62(16): 168103.
doi: 10.7498/aps.62.168103
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Xue Yuan, Gao Chao-Jun, Gu Jin-Hua, Feng Ya-Yang, Yang Shi-E, Lu Jing-Xiao, Huang Qiang, Feng Zhi-Qiang. Study on the properties and optical emission spectroscopy of the intrinsic silicon thin film in silicon heterojunction solar cells. Acta Physica Sinica,
2013, 62(19): 197301.
doi: 10.7498/aps.62.197301
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Li Yan-Yang, Yang Shi-E, Chen Yong-Sheng, Zhou Jian-Peng, Li Xin-Li, Lu Jing-Xiao. The study of capacitively-coupled hydrogen plasma at very high frequency. Acta Physica Sinica,
2012, 61(16): 165203.
doi: 10.7498/aps.61.165203
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Gao Hai-Bo, Li Rui, Lu Jing-Xiao, Wang Guo, Li Xin-Lin, Jiao Yue-Chao. High-rate deposition of microcrystalline silicon thin film by multi-step method. Acta Physica Sinica,
2012, 61(1): 018101.
doi: 10.7498/aps.61.018101
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Hou Guo-Fu, Xue Jun-Ming, Yuan Yu-Jie, Zhang Xiao-Dan, Sun Jian, Chen Xin-Liang, Geng Xin-Hua, Zhao Ying. Key issues for high-efficiency silicon thin film solar cells prepared by RF-PECVD under high-pressure-depletion conditions. Acta Physica Sinica,
2012, 61(5): 058403.
doi: 10.7498/aps.61.058403
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Zheng Xin-Xia, Zhang Xiao-Dan, Yang Su-Su, Wang Guang-Hong, Xu Sheng-Zhi, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying. a-Si ∶H/a-Si ∶H/μc-Si ∶H triple junction solar cells. Acta Physica Sinica,
2011, 60(6): 068801.
doi: 10.7498/aps.60.068801
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Li Tian-Wei, Liu Feng-Zhen, Zhu Mei-Fang. rf excited optical emission spectrum of radicals generated during hot wire chemical vapour deposition for the preparation of microcrystalline silicon thin film. Acta Physica Sinica,
2011, 60(1): 018103.
doi: 10.7498/aps.60.018103
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Lu Peng, Hou Guo-Fu, Yuan Yu-Jie, Yang Rui-Xia, Zhao Ying. Influence of n-type layer structure on performance and light-induced degradation of n-i-p microcrystalline silicon solar cells. Acta Physica Sinica,
2010, 59(6): 4330-4336.
doi: 10.7498/aps.59.4330
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Wang Guang-Hong, Zhang Xiao-Dan, Xu Sheng-Zhi, Sun Fu-He, Yue Qiang, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying. Effects of p-seeding layer on the performance of microcrystalline silicon solar cells deposited in single chamber. Acta Physica Sinica,
2009, 58(10): 7294-7299.
doi: 10.7498/aps.58.7294
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Sun Fu-He, Zhang Xiao-Dan, Wang Guang-Hong, Xu Sheng-Zhi, Yue Qiang, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying. Influence of boron on the properties of intrinsic microcrystalline silicon thin films. Acta Physica Sinica,
2009, 58(2): 1293-1297.
doi: 10.7498/aps.58.1293
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Han Xiao-Yan, Hou Guo-Fu, Li Gui-Jun, Zhang Xiao-Dan, Yuan Yu-Jie, Zhang De-Kun, Chen Xin-Liang, Wei Chang-Chun, Sun Jian, Geng Xin-Hua. Influence of low rate p/i interface layer on the performance of high growth rate microcrystalline silicon solar cells. Acta Physica Sinica,
2008, 57(8): 5284-5289.
doi: 10.7498/aps.57.5284
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Ge Hong, Zhang Xiao-Dan, Yue Qiang, Zhao Jing, Zhao Ying. Study of space voltage distribution between large-area parallel-plate electrodes for very high frequency plasma enhanced chemical vapor deposition. Acta Physica Sinica,
2008, 57(8): 5105-5110.
doi: 10.7498/aps.57.5105
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Zhang Fa-Rong, Zhang Xiao-Dan, Amanatides E., Mataras D., Zhao Jing, Zhao Ying. Study on the optical and electrical properties of plasma for the deposition of microcrystalline silicon. Acta Physica Sinica,
2008, 57(5): 3022-3026.
doi: 10.7498/aps.57.3022
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Guo Qun-Chao, Geng Xin-Hua, Sun Jian Wei, Chang-Chun, Han Xiao-Yan, Zhang Xiao_Dan, Zhao Ying. Role of gas residence time in the deposition rate and properties of microcrystalline silicon films. Acta Physica Sinica,
2007, 56(5): 2790-2795.
doi: 10.7498/aps.56.2790
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Chen Yong-Sheng, Gao Xiao-Yong, Yang Shi-E, Lu Jing-Xiao, Gu Jin-Hua. The influence of deposition temperature on the structure of microcrystalline silicon film. Acta Physica Sinica,
2007, 56(7): 4122-4126.
doi: 10.7498/aps.56.4122
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Hou Guo-Fu, Xue Jun-Ming, Sun Jian, Guo Qun-Chao, Zhang De-Kun, Ren Hui-Zhi, Zhao Ying, Geng Xin-Hua, Li Yi-Gang. Research on silane depletion status during the deposition of silicon thin films by high-pressure PECVD. Acta Physica Sinica,
2007, 56(2): 1177-1181.
doi: 10.7498/aps.56.1177
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Zhang Xiao-Dan, Zhao Ying, Zhu Feng, Wei Chang-Chun, Mai Yao-Hua, Gao Yan-Tao, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen. Secondary ion mass spectroscopic depth profile analysis of oxygen contamination in hydrogenated microcrystalline silicon. Acta Physica Sinica,
2005, 54(4): 1895-1898.
doi: 10.7498/aps.54.1895
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Zhang Xiao-Dan, Zhao Ying, Gao Yan-Tao, Zhu Feng, Wei Chang-Chun, Sun Jian, Wang Yan, Geng Xin-Hua, Xiong Shao-Zhen. Study of microcrystalline silicon solar cells fabricated by very high frequency plasma-enhanced chemical vapor deposition. Acta Physica Sinica,
2005, 54(4): 1899-1903.
doi: 10.7498/aps.54.1899
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Yang Hui-Dong, Wu Chun-Ｙa, Zhao Ying, Xue Jun-Ｍing, Geng Xin-Ｈua, Xiong Shao-Ｚhen. Investigation on the oxygen contamination in the μc-Si∶H thin film deposited b y VHF-PECVD. Acta Physica Sinica,
2003, 52(11): 2865-2869.
doi: 10.7498/aps.52.2865
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Yang Hui-Dong, Wu Chun-Ya, Li Hong-Bo, Mai Yao-Hua, Zhu Feng, Zhou Zhen-Hua, Zhao Ying, Geng Xin-Hua, Xiong Shao-Zheng. Diagnosis of VHF plasmas with optical emission spectroscopy. Acta Physica Sinica,
2003, 52(9): 2324-2330.
doi: 10.7498/aps.52.2324
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