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Monte Carlo simulation of electron transmission through masks in projection electron lithography

Xiao Pei Zhang Zeng-Ming Sun Xia Ding Ze-Jun

Citation:

Monte Carlo simulation of electron transmission through masks in projection electron lithography

Xiao Pei, Zhang Zeng-Ming, Sun Xia, Ding Ze-Jun
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  • Abstract views:  7651
  • PDF Downloads:  1411
  • Cited By: 0
Publishing process
  • Received Date:  23 January 2006
  • Accepted Date:  18 April 2006
  • Published Online:  20 November 2006

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