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Effect of O2-doping on bonding configuration and electric properties of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasma

Wei Yong-Xia Qian Xiao-Mei Yu Xiao-Zhu Ye Chao Ning Zhao-Yuan Liang Rong-Qing

Citation:

Effect of O2-doping on bonding configuration and electric properties of SiCOH films prepared by decamethylcyclopentasiloxane electron cyclotron resonance plasma

Wei Yong-Xia, Qian Xiao-Mei, Yu Xiao-Zhu, Ye Chao, Ning Zhao-Yuan, Liang Rong-Qing
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  • Abstract views:  7345
  • PDF Downloads:  985
  • Cited By: 0
Publishing process
  • Received Date:  19 June 2006
  • Accepted Date:  09 July 2006
  • Published Online:  05 January 2007

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