| [1] |
Chen Fu, Tang Wen-Xin, Yu Guo-Hao, Zhang Li, Xu Kun, Zhang Bao-Shun. Effect of U-shape trench etching process on electrical properties of GaN vertical trench metal-oxide-semiconductor field-effect transistor. Acta Physica Sinica,
2020, 69(9): 098501.
doi: 10.7498/aps.69.20191850
|
| [2] |
Niu Zhong-Cai, He Zhi-Bing, Zhang Ying, Wei Jian-Jun, Liao Guo, Du Kai, Tang Yong-Jian. Influence of radio frequency power on the structure and optical properties of glow discharge polymer films. Acta Physica Sinica,
2012, 61(10): 106804.
doi: 10.7498/aps.61.106804
|
| [3] |
Yan Jian-Cheng, He Zhi-Bing, Yang Zhi-Lin, Zhang Ying, Tang Yong-Jian, Wei Jian-Jun. Influence of RF power on the structure and properties of glow discharge polymer. Acta Physica Sinica,
2011, 60(3): 036501.
doi: 10.7498/aps.60.036501
|
| [4] |
Wang Pei-Jun, Jiang Mei-Fu, Du Ji-Long, Dai Yong-Feng. Frictional properties of fluorinated diamond-like carbon films prepared by radio frequency reactive magnetron sputtering. Acta Physica Sinica,
2010, 59(12): 8920-8926.
doi: 10.7498/aps.59.8920
|
| [5] |
Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang. An XPS study on the structure of SiNx film deposited by microwave ECR magnetron sputtering. Acta Physica Sinica,
2009, 58(6): 4109-4116.
doi: 10.7498/aps.58.4109
|
| [6] |
Zhu Li, Jiang Mei-Fu, Ning Zhao-Yuan, Du Ji-Long, Wang Pei-Jun. Hydrophobic nature of fluorinated diamond-like carbon films prepared under different radio-frequency power. Acta Physica Sinica,
2009, 58(9): 6430-6435.
doi: 10.7498/aps.58.6430
|
| [7] |
Ma Guo-Jia, Liu Xi-Liang, Zhang Hua-Fang, Wu Hong-Chen, Peng Li-Ping, Jiang Yan-Li. Influences of acetylene gas flow rate on mechanical properties and chemical structure of nanocomposite TiC diamond-like carbon films. Acta Physica Sinica,
2007, 56(4): 2377-2381.
doi: 10.7498/aps.56.2377
|
| [8] |
Xiao Jian-Rong, Xu Hui, Wang Huan-You, Deng Chao-Sheng, Li Ming-Jun. Study on FN-DLC thin films: (Ⅳ) effect of nitrogen doping on structural properties of films. Acta Physica Sinica,
2007, 56(5): 3004-3009.
doi: 10.7498/aps.56.3004
|
| [9] |
Xiao Jian-Rong, Xu Hui, Guo Ai-Min, Wang Huan-You. Study on FN-DLC thin films: (Ⅱ) effect of radio frequency power on the optical band gap of the thin films. Acta Physica Sinica,
2007, 56(3): 1809-1814.
doi: 10.7498/aps.56.1809
|
| [10] |
Ma Tian-Bao, Hu Yuan-Zhong, Wang Hui. Molecular dynamics simulation of the growth and structural properties of ultra-thin diamond-like carbon films. Acta Physica Sinica,
2006, 55(6): 2922-2927.
doi: 10.7498/aps.55.2922
|
| [11] |
Gao Peng, Xu Jun, Deng Xin-Lu, Wang De-He, Dong Chuang. Structure and tribology properties of diamond-like carbon films prepared by microwave electron cyclotron resonance plasma source ion implantation. Acta Physica Sinica,
2005, 54(7): 3241-3246.
doi: 10.7498/aps.54.3241
|
| [12] |
Peng Hong-Yan, Zhou Chuan-Sheng, Zhao Li-Xin, Jin Zeng-Sun, Zhang Bing, Chen Bao-Ling, Chen Yu-Qiang, Li Min-Jun. Effect of the laser power density on the properties and structures of the diamond-like carbon films deposited by pulsed laser ablation of graphite. Acta Physica Sinica,
2005, 54(9): 4294-4299.
doi: 10.7498/aps.54.4294
|
| [13] |
Wang Ting-Ting, Ye Chao, Ning Zhao-Yuan, Cheng Shan-Hua. Characterization and bonding configuration of SiCOH low-k films. Acta Physica Sinica,
2005, 54(2): 892-896.
doi: 10.7498/aps.54.892
|
| [14] |
Li Hong-Xuan, Xu Tao, Chen Jian-Min, Zhou Hui-Di, Liu Hui-Wen. Effect of RF power on the structure and properties of diamond-like carbon films. Acta Physica Sinica,
2005, 54(4): 1885-1889.
doi: 10.7498/aps.54.1885
|
| [15] |
Jiang Mei-Fu, Ning Zhao-Yuan. XPS study of fluorinated diamond-like carbon films prepared by reactive magnetron sputtering. Acta Physica Sinica,
2004, 53(9): 3220-3224.
doi: 10.7498/aps.53.3220
|
| [16] |
Jiang Mei-Fu, Ning Zhao-Yuan. Structural analysis of fluorinated diamond-like carbon films by Raman and Fourier transform infrared absorption spectroscopy. Acta Physica Sinica,
2004, 53(5): 1588-1593.
doi: 10.7498/aps.53.1588
|
| [17] |
Liu Cun-Ye, Liu Chang. Microscopic structure studies on the diamond films fabricated by chemical vapor deposition method. Acta Physica Sinica,
2003, 52(6): 1479-1483.
doi: 10.7498/aps.52.1479
|
| [18] |
NING ZHAO-YUAN, CHENG SHAN-HUA, YE CHAO. CHEMICAL BONDING STRUCTURE OF FLUORINATED AMORPHOUS CARBON FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica,
2001, 50(3): 566-571.
doi: 10.7498/aps.50.566
|
| [19] |
JU JIAN-HUA, XIA YI-BEN, ZHANG WEI-LI, WANG LIN-JUN, SHI WEI-MIN, HUANG ZHI-MING, LI ZHI-FENG, ZHENG GUO-ZHEN, TANG DING-YUAN. EFFECT OF NITROGEN ON THE RESIDUAL STRESS AND ADHESION OF DIAMOND-LIKE AMORPHOUS CARBON NITRIDE FILMS. Acta Physica Sinica,
2000, 49(11): 2310-2314.
doi: 10.7498/aps.49.2310
|
| [20] |
CHEN SHIH-KANG, CHANG YI-SHANG, LIOU DE-SEN. INFLUENCE OF THE CHEMICAL BOND ON THE ENERGY BANDS OF THE ZINC BLENDE STRUCTURE. Acta Physica Sinica,
1962, 18(10): 491-500.
doi: 10.7498/aps.18.491
|
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