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Investigating the effect of doping amorphous silicon nitride on retention characteristics of SONOS device by DFT calculation

Fang Shao-Hua Cheng Xiu-Lan Huang Ye Gu Huai-Huai

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Investigating the effect of doping amorphous silicon nitride on retention characteristics of SONOS device by DFT calculation

Fang Shao-Hua, Cheng Xiu-Lan, Huang Ye, Gu Huai-Huai
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  • Abstract views:  7141
  • PDF Downloads:  1132
  • Cited By: 0
Publishing process
  • Received Date:  27 December 2006
  • Accepted Date:  06 March 2007
  • Published Online:  20 November 2007

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