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Influences of substrate temperature on crystalline characteristics and mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering

Ding Wan-Yu Xu Jun Lu Wen-Qi Deng Xin-Lu Dong Chuang

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Influences of substrate temperature on crystalline characteristics and mechanical properties of SiNx films deposited by microwave electron cyclotron resonance magnetron sputtering

Ding Wan-Yu, Xu Jun, Lu Wen-Qi, Deng Xin-Lu, Dong Chuang
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  • Abstract views:  8159
  • PDF Downloads:  1104
  • Cited By: 0
Publishing process
  • Received Date:  27 November 2007
  • Accepted Date:  27 February 2008
  • Published Online:  05 April 2008

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