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Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped target

Liu Cheng-Sen Wang De-Zhen Liu Tian-Wei Wang Yan-Hui

Citation:

Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped target

Liu Cheng-Sen, Wang De-Zhen, Liu Tian-Wei, Wang Yan-Hui
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  • Abstract views:  7745
  • PDF Downloads:  1332
  • Cited By: 0
Publishing process
  • Received Date:  23 July 2007
  • Accepted Date:  14 April 2008
  • Published Online:  05 May 2008

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