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Effects of radio-frequency bias on silicon oxide films deposited by dual electron cyclotron resonance-radio frequency hybrid plasma

Ke Bo Wang Lei Ni Tian-Ling Ding Fang Chen Mu-Di Zhou Hai-Yang Wen Xiao-Hui Zhu Xiao-Dong

Citation:

Effects of radio-frequency bias on silicon oxide films deposited by dual electron cyclotron resonance-radio frequency hybrid plasma

Ke Bo, Wang Lei, Ni Tian-Ling, Ding Fang, Chen Mu-Di, Zhou Hai-Yang, Wen Xiao-Hui, Zhu Xiao-Dong
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  • Abstract views:  7628
  • PDF Downloads:  2927
  • Cited By: 0
Publishing process
  • Received Date:  05 May 2009
  • Accepted Date:  05 June 2009
  • Published Online:  05 January 2010

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