| [1] |
Song Liu-Qin, Jia Wen-Zhu, Dong Wan, Zhang Yi-Fan, Dai Zhong-Ling, Song Yuan-Hong. Numerical investigation of SiO2 film deposition enhanced by capacitively coupled discharge plasma. Acta Physica Sinica,
2022, 71(17): 170201.
doi: 10.7498/aps.71.20220493
|
| [2] |
Cao Yu, Xue Lei, Zhou Jing, Wang Yi-Jun, Ni Jian, Zhang Jian-Jun. Developments of c-Si1-xGex:H thin films as near-infrared absorber for thin film silicon solar cells. Acta Physica Sinica,
2016, 65(14): 146801.
doi: 10.7498/aps.65.146801
|
| [3] |
Ding Dong, Yang Shi-E, Chen Yong-Sheng, Gao Xiao-Yong, Gu Jin-Hua, Lu Jing-Xiao. Numerical simulation of light absorption enhancement in microcrystalline silicon solar cells with Al nanoparticle arrays. Acta Physica Sinica,
2015, 64(24): 248801.
doi: 10.7498/aps.64.248801
|
| [4] |
Tan Zai-Shang, Wu Xiao-Meng, Fan Zhong-Yong, Ding Shi-Jin. Effect of thermal annealing on the structure and properties of plasma enhanced chemical vapor deposited SiCOH film. Acta Physica Sinica,
2015, 64(10): 107701.
doi: 10.7498/aps.64.107701
|
| [5] |
He Su-Ming, Dai Shan-Shan, Luo Xiang-Dong, Zhang Bo, Wang Jin-Bin. Preparation of SiON film by plasma enhanced chemical vapor deposition and passivation on Si. Acta Physica Sinica,
2014, 63(12): 128102.
doi: 10.7498/aps.63.128102
|
| [6] |
Hou Guo-Fu, Xue Jun-Ming, Yuan Yu-Jie, Zhang Xiao-Dan, Sun Jian, Chen Xin-Liang, Geng Xin-Hua, Zhao Ying. Key issues for high-efficiency silicon thin film solar cells prepared by RF-PECVD under high-pressure-depletion conditions. Acta Physica Sinica,
2012, 61(5): 058403.
doi: 10.7498/aps.61.058403
|
| [7] |
Zheng Xin-Xia, Zhang Xiao-Dan, Yang Su-Su, Wang Guang-Hong, Xu Sheng-Zhi, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying. a-Si ∶H/a-Si ∶H/μc-Si ∶H triple junction solar cells. Acta Physica Sinica,
2011, 60(6): 068801.
doi: 10.7498/aps.60.068801
|
| [8] |
Ding Yan-Li, Zhu Zhi-Li, Gu Jin-Hua, Shi Xin-Wei, Yang Shi-E, Gao Xiao-Yong, Chen Yong-Sheng, Lu Jing-Xiao. Effect of deposition rate on the scaling behavior of microcrystalline silicon films prepared by very high frequency-plasma enhanced chemical vapor deposition. Acta Physica Sinica,
2010, 59(2): 1190-1195.
doi: 10.7498/aps.59.1190
|
| [9] |
Song Jie, Guo Yan-Qing, Wang Xiang, Ding Hong-Lin, Huang Rui. Influence of excitation frequency on the growth properties of nanocrystalline silicon films with high hydrogen dilution. Acta Physica Sinica,
2010, 59(10): 7378-7382.
doi: 10.7498/aps.59.7378
|
| [10] |
Yuan He, Sun Chang-Zheng, Xu Jian-Ming, Wu Qing, Xiong Bing, Luo Yi. Design and fabrication of multilayer antireflection coating for optoelectronic devices by plasma enhanced chemical vapor deposition. Acta Physica Sinica,
2010, 59(10): 7239-7244.
doi: 10.7498/aps.59.7239
|
| [11] |
Zhang Xiao-Dan, Zheng Xin-Xia, Wang Guang-Hong, Xu Sheng-Zhi, Yue Qiang, Lin Quan, Wei Chang-Chun, Sun Jian, Zhang De-Kun, Xiong Shao-Zhen, Geng Xin-Hua, Zhao Ying. High efficiency amorphous/microcrystalline silicon tandem solar cells deposited in a single chamber system. Acta Physica Sinica,
2010, 59(11): 8231-8236.
doi: 10.7498/aps.59.8231
|
| [12] |
Han Xiao-Yan, Hou Guo-Fu, Wei Chang-Chun, Zhang Xiao-Dan, Dai Zhi-Hua, Li Gui-Jun, Sun Jian, Chen Xin-Liang, Zhang De-Kun, Xue Jun-Ming, Zhao Ying, Geng Xin-Hua. Optimization of high rate growth high quality μc-Si:H thin films and its application to the solar cells. Acta Physica Sinica,
2009, 58(6): 4254-4259.
doi: 10.7498/aps.58.4254
|
| [13] |
Chen Zhao-Quan, Liu Ming-Hai, Liu Yu-Ping, Chen Wei, Luo Zhi-Qing, Hu Xi-Wei. Fabrication of transparent conductive AZO （ZnO:Al） film by plasma enhanced chemical vapor deposition. Acta Physica Sinica,
2009, 58(6): 4260-4266.
doi: 10.7498/aps.58.4260
|
| [14] |
Sun Fu-He, Zhang Xiao-Dan, Wang Guang-Hong, Xu Sheng-Zhi, Yue Qiang, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying. Influence of boron on the properties of intrinsic microcrystalline silicon thin films. Acta Physica Sinica,
2009, 58(2): 1293-1297.
doi: 10.7498/aps.58.1293
|
| [15] |
Wang Guang-Hong, Zhang Xiao-Dan, Xu Sheng-Zhi, Sun Fu-He, Yue Qiang, Wei Chang-Chun, Sun Jian, Geng Xin-Hua, Xiong Shao-Zhen, Zhao Ying. Effects of p-seeding layer on the performance of microcrystalline silicon solar cells deposited in single chamber. Acta Physica Sinica,
2009, 58(10): 7294-7299.
doi: 10.7498/aps.58.7294
|
| [16] |
Zhang Xiao-Dan, Zhao Ying, Gao Yan-Tao, Zhu Feng, Wei Chang-Chun, Sun Jian, Wang Yan, Geng Xin-Hua, Xiong Shao-Zhen. Study of microcrystalline silicon solar cells fabricated by very high frequency plasma-enhanced chemical vapor deposition. Acta Physica Sinica,
2005, 54(4): 1899-1903.
doi: 10.7498/aps.54.1899
|
| [17] |
Zeng Xiang－Bo, Liao Xian－Bo, Wang Bo, Diao Hong－Wei, Dai Song－Tao, Xiang Xian－Bi, Chang Xiu－Lan, Xu Yan－Yue, Hu Zhi－Hua, Hao Hui－Ying, Kong Guang－Lin. Boron-doped silicon nanowires grown by plasmaenhanced chemical vapor deposition. Acta Physica Sinica,
2004, 53(12): 4410-4413.
doi: 10.7498/aps.53.4410
|
| [18] |
Ji Ai-Ling, Ma Li-Bo, Liu Cheng, Wang Yong-Qian. Low temperature fabrication of nanostructured Si-SiOx and Si-SiNx composite films and their photoluminescence features. Acta Physica Sinica,
2004, 53(11): 3818-3822.
doi: 10.7498/aps.53.3818
|
| [19] |
YE CHAO, NING ZHAO-YUAN, CHENG SHAN-HUA, KANG JIAN. STUDY ON α-C∶F FILMS DEPOSITED BY ELECTRON CYCLOTRONRESONANCE PLASMA CHEMICAL VAPOR DEPOSITION. Acta Physica Sinica,
2001, 50(4): 784-789.
doi: 10.7498/aps.50.784
|
| [20] |
LIU XIANG-NA, WU XIAO-WEI, BAO XI-MAO, HE YU-LIANG. PHOTOLUMINESCENCE FROM NANO-CRYSTALLITES OF SILICON FILMS PREPARED BY PECVD. Acta Physica Sinica,
1994, 43(6): 985-990.
doi: 10.7498/aps.43.985
|
下载:
