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Diagnostics of the atmospheric pressure plasma jets for plasma enhanced chemical vapor deposition of polycrystalline silicon thin film

Liu Li-Ying Zhang Jia-Liang Guo Qing-Chao Wang De-Zhen

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Diagnostics of the atmospheric pressure plasma jets for plasma enhanced chemical vapor deposition of polycrystalline silicon thin film

Liu Li-Ying, Zhang Jia-Liang, Guo Qing-Chao, Wang De-Zhen
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  • Abstract views:  7715
  • PDF Downloads:  1142
  • Cited By: 0
Publishing process
  • Received Date:  13 June 2009
  • Accepted Date:  25 August 2009
  • Published Online:  05 February 2010

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