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Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings

An Tao Wang Li-Li Wen Mao Zheng Wei-Tao

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Influence of sputtering pressure on microstructure and mechanical properties of TiN/SiNx multilayer coatings

An Tao, Wang Li-Li, Wen Mao, Zheng Wei-Tao
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  • Abstract views:  7469
  • PDF Downloads:  961
  • Cited By: 0
Publishing process
  • Received Date:  20 January 2010
  • Accepted Date:  12 May 2010
  • Published Online:  15 January 2011

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