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In this paper, we design a SiO2/Si3N4 dielectric distributed Bragg reflector (DDBR) by the transfer-matrix method, which is grown by plasma-enhanced chemical vapor deposition on sapphire (0001). There exists a slight difference between theoretical and experimental results in peak wavelength (～ 10 nm). The peak wavelength is blue shifted with the number of DDBR pairs increasing. The 13-pair DDBR provides a 58 nm wide stop band centered at 333 nm with a maximal reflectivity of higher than 99%, as the refractive index ratio of Si3N4 to SiO2 is relatively high. It is proved by the scanning electron microscope and atomic force microscope measurements that the variations of thickness and roughness of Si3N4 layer with respect to SiO2 layer during growth contribute to the blue shift of peak wavelength. The X-ray reflectivity measurements indicate that the interfacial degradation of the samples has little effect on the maximum reflectivity, and the relatively poor quality of SiO2 compared with Si3N4 may be one of the reasons that cause the difference between the measurements and simulations.
[1] Kishino K, Ünl? M S, Chyi J I, Reed J, Arsenault L, Morkoc H 1991 IEEE J. Quantum Electron. 27 2025
[2] Ünl? M S, Strite S 1995 J. Appl. Phys. 78 607
[3] Feltin E, Carlin J F, Dorsaz J, Christmann G, Butt? R, La黦t M, Ilegems M, Grandjean N 2006 Appl. Phys. Lett. 88 051108
[4] Mitrofanov O, Schmult S, Manfra M J, Siegrist T, Weimann N G, Sergent A M, Molnar R J 2006 Appl. Phys. Lett. 88 171101
[5] Li T, Carrano J C, Eiting C J, Grudowski P A, Lambert D J H, Kwon H K, Dupuis R D, Campbell J C, Tober R T 2001 Fiber Integ. Opt. 20 125
[6] Kishino K, Yonemaru M, Kikuchi A, Toyoura Y 2001 Phys. Stat. Sol. A 188 321
[7] Mitrofanov O, Schmult S, Manfra M J, Siegrist T, Weimann N G, Sergent A M 2006 Appl. Phys. Lett. 88 171101
[8] Ji X L, Jiang R L, Liu B, Xie Z L, Zhou J J, Li L, Han P, Zhang R, Zheng Y D, Zheng J G 2008 Phys. Stat. Sol. A 205 1572
[9] Ji X L, Jiang R L, Xie Z L, Liu B, Zhou J J, Li L, Han P, Zhang R, Zheng Y D, Gong H M 2007 Chin. Phys. Lett. 24 1735
[10] Liu B, Zhang R, Zheng J G, Ji X L, Fu D Y, Xie Z L, Chen D J, Chen P, Jiang R L, Zheng Y D 2011 Appl. Phys. Lett. 98 261916
[11] Stephens D J, He S S, Lucovsky G, Mikkelsen H, Leo K, Kurz H 1993 J. Vac. Sci. Technol. A 11 4
[12] Feltin E, Christmann G, Dorsaz J, Castiglia A, Carlin J F, Butte R, Grandjean N, Christopoulos S, Baldassarri G, Hogersthal H V, Grundy A J D, Lagoudakis P G, Baumberg J J 2007 Electron. Lett. 43 17
[13] Palik E D 1985 Handbook of Optical Constants of Solids (San Diego: Academic Press) pp719---774
[14] Macleod H A 1986 Thin Film Optical Filters (3rd ed) (London: Institute of Physics Publishing) pp12---186
[15] Tanner B K, Bowen D K 1992 J. Cryst. Growth 126 1
[16] Nevot L, Croce P 1980 Revue Phys. Appl. 15 761
[17] Sinha S K, Sirota E B, Garoff S, Stanley H B 1988 Phys. Rev. B 38 2297
[18] Parrat L G 1954 Phys. Rev. 95 359
[19] Bevington P R, Robinson D K 1969 Data Reduction and Error Analysis for the Physical Science (3rd ed) (New York: McGraw-Hill) pp142---174
[20] Press W H, Teukolsky S A, Vetterling W T, Flannery B P 1986 The Art of Scientific Computing (3rd ed) (New York: Cambridge University Press) pp773---836
[21] Matney K, Goorsky M S 1995 J. Cryst. Growth 148 327
[22] Bowen D K, Wormington M 1993 Adv. X-Ray Anal. 35 35
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[1] Kishino K, Ünl? M S, Chyi J I, Reed J, Arsenault L, Morkoc H 1991 IEEE J. Quantum Electron. 27 2025
[2] Ünl? M S, Strite S 1995 J. Appl. Phys. 78 607
[3] Feltin E, Carlin J F, Dorsaz J, Christmann G, Butt? R, La黦t M, Ilegems M, Grandjean N 2006 Appl. Phys. Lett. 88 051108
[4] Mitrofanov O, Schmult S, Manfra M J, Siegrist T, Weimann N G, Sergent A M, Molnar R J 2006 Appl. Phys. Lett. 88 171101
[5] Li T, Carrano J C, Eiting C J, Grudowski P A, Lambert D J H, Kwon H K, Dupuis R D, Campbell J C, Tober R T 2001 Fiber Integ. Opt. 20 125
[6] Kishino K, Yonemaru M, Kikuchi A, Toyoura Y 2001 Phys. Stat. Sol. A 188 321
[7] Mitrofanov O, Schmult S, Manfra M J, Siegrist T, Weimann N G, Sergent A M 2006 Appl. Phys. Lett. 88 171101
[8] Ji X L, Jiang R L, Liu B, Xie Z L, Zhou J J, Li L, Han P, Zhang R, Zheng Y D, Zheng J G 2008 Phys. Stat. Sol. A 205 1572
[9] Ji X L, Jiang R L, Xie Z L, Liu B, Zhou J J, Li L, Han P, Zhang R, Zheng Y D, Gong H M 2007 Chin. Phys. Lett. 24 1735
[10] Liu B, Zhang R, Zheng J G, Ji X L, Fu D Y, Xie Z L, Chen D J, Chen P, Jiang R L, Zheng Y D 2011 Appl. Phys. Lett. 98 261916
[11] Stephens D J, He S S, Lucovsky G, Mikkelsen H, Leo K, Kurz H 1993 J. Vac. Sci. Technol. A 11 4
[12] Feltin E, Christmann G, Dorsaz J, Castiglia A, Carlin J F, Butte R, Grandjean N, Christopoulos S, Baldassarri G, Hogersthal H V, Grundy A J D, Lagoudakis P G, Baumberg J J 2007 Electron. Lett. 43 17
[13] Palik E D 1985 Handbook of Optical Constants of Solids (San Diego: Academic Press) pp719---774
[14] Macleod H A 1986 Thin Film Optical Filters (3rd ed) (London: Institute of Physics Publishing) pp12---186
[15] Tanner B K, Bowen D K 1992 J. Cryst. Growth 126 1
[16] Nevot L, Croce P 1980 Revue Phys. Appl. 15 761
[17] Sinha S K, Sirota E B, Garoff S, Stanley H B 1988 Phys. Rev. B 38 2297
[18] Parrat L G 1954 Phys. Rev. 95 359
[19] Bevington P R, Robinson D K 1969 Data Reduction and Error Analysis for the Physical Science (3rd ed) (New York: McGraw-Hill) pp142---174
[20] Press W H, Teukolsky S A, Vetterling W T, Flannery B P 1986 The Art of Scientific Computing (3rd ed) (New York: Cambridge University Press) pp773---836
[21] Matney K, Goorsky M S 1995 J. Cryst. Growth 148 327
[22] Bowen D K, Wormington M 1993 Adv. X-Ray Anal. 35 35
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