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Research of subwavelength grating based on multilayer films structure

Liang Gao-Feng Zhao Qing Chen Xin Wang Chang-Tao Zhao Ze-Yu Luo Xian-Gang

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Research of subwavelength grating based on multilayer films structure

Liang Gao-Feng, Zhao Qing, Chen Xin, Wang Chang-Tao, Zhao Ze-Yu, Luo Xian-Gang
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  • Based on the theory of suface plasmon resonance and the special nano-optical effect of metal-dielectric composite, we study super-resolution photolithography using multilayer films. The main point is to use 365 nm exposal light to realize super-resolution imaging by using a mask with a period of 230 nm and linewidth of 100 nm. We discuss the selection of the parameters multi-film with equal thickness, and achieve a sufficient contrast and high intensity through numerical simulation, then verify the obtained results by the plasmon nanolithography technique. Choosing the best scheme, we achieve large-area super-resolution images with the subwavelength structure.
    • Funds: Project supported by the National Basic Research Program of China (Grant No. 2011CB301800-G), the International Cooperation Project, China (Grand No. 2011DFA63190), and the State Key Laboratory Foundation for Micro-Fabrication Optical Technology of China (Grant No. 201101445).
    [1]

    Pendry J B 2000 Phys. Rev. Lett. 85 3966

    [2]

    Liu Z W, Fang N, Yen T J, Zhang X 2003 Appl. Phys. Lett. 83 5184

    [3]

    Fang N, Liu Z W, Yen T J, Zhang X 2003 Opt. Express 11 682

    [4]

    Shelby R A, Smith D R, Schultz S 2001 Science 292 77

    [5]

    Ramakrishna S A, Pendry J B 2003 J. Modern Opt. 50 1419

    [6]

    Pendry J B, Ramakrishna S A 2003 Physica B 338 329

    [7]

    Bloemer J M, D'Aguanno G, Scalora M, Mattiucci N, de Ceglia D 2008 Opt. Express 16 19342

    [8]

    Fang N, Lee H, Sun C, Zhang X 2005 Science 308 534

    [9]

    Shen S 2006 Ph. D. Dissertation (Hangzhou: Zhejiang University) (in Chinese) [申溯 2006 博士学位论文 (杭州:浙江大学)]

    [10]

    Belov P A, Hao Y 2006 Phys. Rev. B 73 113110

    [11]

    Yang X F, Zeng B B, Wang C T, Luo X G 2009 Opt. Express 17 21560

    [12]

    Luo X G, Ishihara T 2004 Appl. Phys. Lett. 84 4780

    [13]

    Johnson P B, Christy R W 1972 Phys. Rev. B 6 4370

    [14]

    Tretyakov S 2000 Analytical Modeling in Applied Electromagnetic (Norwood MA: Artech House) p12-36

    [15]

    Liu B C, Yu L, Zhang K 2010 Chin. Phys. B 19 097303

    [16]

    Wood B, Pendry J B, Tsai D P 2006 Phys. Rev. B 74 115116

    [17]

    Xu T, Fang L, Ma J X, Zeng B B, Liu Y, Cui J, Wang C T, Feng Q, Luo X G 2009 Appl. Phys. B 97 175

    [18]

    Chen X, Zhao Q, Fang L, Wang C T, Luo X G 2011 High Power Laser and Particle Beams 23 806 (in Chinese) [陈欣, 赵青, 方亮, 王长涛, 罗先刚 2011 强激光与离子束 23 806]

    [19]

    Li H H, Chen J, Wang Q K 2010 Chin. Phys. B 19 114203

  • [1]

    Pendry J B 2000 Phys. Rev. Lett. 85 3966

    [2]

    Liu Z W, Fang N, Yen T J, Zhang X 2003 Appl. Phys. Lett. 83 5184

    [3]

    Fang N, Liu Z W, Yen T J, Zhang X 2003 Opt. Express 11 682

    [4]

    Shelby R A, Smith D R, Schultz S 2001 Science 292 77

    [5]

    Ramakrishna S A, Pendry J B 2003 J. Modern Opt. 50 1419

    [6]

    Pendry J B, Ramakrishna S A 2003 Physica B 338 329

    [7]

    Bloemer J M, D'Aguanno G, Scalora M, Mattiucci N, de Ceglia D 2008 Opt. Express 16 19342

    [8]

    Fang N, Lee H, Sun C, Zhang X 2005 Science 308 534

    [9]

    Shen S 2006 Ph. D. Dissertation (Hangzhou: Zhejiang University) (in Chinese) [申溯 2006 博士学位论文 (杭州:浙江大学)]

    [10]

    Belov P A, Hao Y 2006 Phys. Rev. B 73 113110

    [11]

    Yang X F, Zeng B B, Wang C T, Luo X G 2009 Opt. Express 17 21560

    [12]

    Luo X G, Ishihara T 2004 Appl. Phys. Lett. 84 4780

    [13]

    Johnson P B, Christy R W 1972 Phys. Rev. B 6 4370

    [14]

    Tretyakov S 2000 Analytical Modeling in Applied Electromagnetic (Norwood MA: Artech House) p12-36

    [15]

    Liu B C, Yu L, Zhang K 2010 Chin. Phys. B 19 097303

    [16]

    Wood B, Pendry J B, Tsai D P 2006 Phys. Rev. B 74 115116

    [17]

    Xu T, Fang L, Ma J X, Zeng B B, Liu Y, Cui J, Wang C T, Feng Q, Luo X G 2009 Appl. Phys. B 97 175

    [18]

    Chen X, Zhao Q, Fang L, Wang C T, Luo X G 2011 High Power Laser and Particle Beams 23 806 (in Chinese) [陈欣, 赵青, 方亮, 王长涛, 罗先刚 2011 强激光与离子束 23 806]

    [19]

    Li H H, Chen J, Wang Q K 2010 Chin. Phys. B 19 114203

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Publishing process
  • Received Date:  09 June 2011
  • Accepted Date:  28 May 2012
  • Published Online:  05 May 2012

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